Table Of Contents - Aerotech PRO22SL Hardware Manual

PRO225SL/SLE Hardware Manual

Table of Contents

PRO22SL and SLE Mechanical Bearing, Ball-Screw Stage
Table of Contents
List of Figures
List of Tables
Safety Procedures and Warnings
EU Declaration of Incorporation
Chapter 1: Overview
1.1. Environmental Specifications
1.2. Accuracy and Temperature Effects
1.3. Basic Specifications
1.4. Vacuum Operation
Chapter 2: Installation
2.1. Unpacking and Handling the Stage
2.2. Dimensions
2.3. Securing the Stage to the Mounting Surface
2.4. Attaching the Payload to the Stage
Chapter 3: Electrical Installation
3.1. Motor and Feedback Connectors
3.2. Motor and Feedback Wiring
3.3. Motor and Feedback Specifications
3.4. Limits, Marker, and Machine Direction
3.5. Motor and Feedback Phasing
Chapter 4: Maintenance
4.1. Service and Inspection Schedule
4.2. Cleaning and Lubrication
4.3. Motor Mounting
4.4. Belt Adjustment
4.5. Troubleshooting
Appendix A: Warranty and Field Service
Appendix B: Revision History
Index
www.aerotech.com
Table of Contents
1
3
4
5
7
11
13
15
15
16
18
19
19
21
25
26
29
30
34
36
40
41
43
43
44
48
51
54
55
57
59
3