Related Manuals for Aerotech PRO560SL
Summary of Contents for Aerotech PRO560SL
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Page 1: Pro560Sl And Sle Mechanical Bearing, Ball-Screw Stage
PRO560SL and SLE Mechanical Bearing, Ball-Screw Stage HARDWARE MANUAL Revision 2.00... - Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
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Page 3: Table Of Contents
PRO560SL/SLE Hardware Manual Table of Contents Table of Contents PRO560SL and SLE Mechanical Bearing, Ball-Screw Stage Table of Contents List of Figures List of Tables Safety Procedures and Warnings EU Declaration of Incorporation Chapter 1: Overview 1.1. Environmental Specifications 1.2. Accuracy and Temperature Effects 1.3. -
Page 4: List Of Figures
List of Figures PRO560SL/SLE Hardware Manual List of Figures Figure 2-1: Lifting Features Figure 2-2: PRO560SL Dimensions Figure 2-3: PRO560SLE Dimensions Figure 2-4: Tabletop Accessory Dimensions (-TT3 Option) Figure 2-5: Stage Orientations Figure 2-6: Cantilevered Load Capability Figure 2-7: Load Torque Equation... -
Page 5: List Of Tables
List of Tables Table 1-1: Model Numbers and Ordering Options Table 1-2: Environmental Specifications Table 1-3: PRO560SL/SLE Series Specifications (-0300 to -0500) Table 1-4: PRO560SL/SLE Series Specifications (-0600 to -1000) Table 2-1: Stage Mounting Surface Flatness Requirement Table 2-2: Stage to Mounting Surface Hardware... - Page 6 List of Tables PRO560SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 7: Safety Procedures And Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the PRO560SL/SLE stage. Read all parts of this manual before you install or operate the PRO560SL/SLE stage or before you do maintenance to your system. To prevent injury to you and damage to the equipment, obey the precautions in this manual. - Page 8 Safety Procedures and Warnings PRO560SL/SLE Hardware Manual DANGER: Hot surfaces. The case temperature could exceed 70°C. Do not touch the motor while it is in operation. Wait until the motor has cooled before you touch it. DANGER: The motor is not rated for use in explosive atmospheres. Do not operate the motor in the presence of potentially explosive mixtures of air-borne dust or combustible vapors.
- Page 9 Use it to shut down the drive if the motor overheats. Make sure that the product is securely mounted before you operate it. Use care when you move the PRO560SL/SLE or you could negatively affect the per- formance of it.
- Page 10 Safety Procedures and Warnings PRO560SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 11: Eu Declaration Of Incorporation
PRO560SL/SLE Hardware Manual EU Declaration of Incorporation EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: PRO560SL/SLE Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... - Page 12 EU Declaration of Incorporation PRO560SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 13: Chapter 1: Overview
The specifications in this manual pertain to the second generation of PRO SL/SLE stages. Second generation stages can be distinguished from their first generation counterparts by the curved hardcover on the second generation. Contact Aerotech if you need a first generation manual. Table 1-1:... - Page 14 Chapter 1: Overview PRO560SL/SLE Hardware Manual PRO560SL and PRO560SLE Series Linear Ball-Screw Stage (continued) Foldback (Optional) -FB1 Foldback kit for 1/2" diameter shaft NEMA 34 motor Motor Orientation (Optional) Bottom cable exit, optional orientation Left-side cable exit, standard orientation Top cable exit, optional orientation...
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Page 15: Environmental Specifications
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level Contact Aerotech if your specific application involves use above 2,000 m or below sea level. Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration can affect system performance. -
Page 16: Basic Specifications
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications. 7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used. -
Page 17: Table 1-4: Pro560Sl/Sle Series Specifications (-0600 To -1000)
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications. 7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used. -
Page 18: Vacuum Operation
Teflon cables. Aerotech recommends that customers bake out vacuum systems when first installing them in the vacuum chamber. Contact Aerotech to discuss your application and the recommended bakeout procedure. -
Page 19: Chapter 2: Installation
Section 1.3. for stage mass specifications. Do not attempt to lift heavy loads single handed. Use care when you move the PRO560SL/SLE or you could negatively affect the per- formance of it. Lift this product only by the base. Use a cart, dolly, or similar device to move the stage to a new location. -
Page 20: Figure 2-1: Lifting Features
2.1. Unpacking and Handling the Stage PRO560SL/SLE Hardware Manual Lifting Features The lifting kit includes four eyebolts and four standoffs. Thread the eyebolts onto the standoffs and thread the standoffs into the stage base. Remove the lifting hardware by turning a wrench on the flats... -
Page 21: Dimensions
PRO560SL/SLE Hardware Manual 2.2. Dimensions 2.2. Dimensions Figure 2-2: PRO560SL Dimensions www.aerotech.com... -
Page 22: Figure 2-3: Pro560Sle Dimensions
2.2. Dimensions PRO560SL/SLE Hardware Manual Figure 2-3: PRO560SLE Dimensions www.aerotech.com... -
Page 23: Figure 2-4: Tabletop Accessory Dimensions (-Tt3 Option)
PRO560SL/SLE Hardware Manual 2.2. Dimensions Figure 2-4: Tabletop Accessory Dimensions (-TT3 Option) www.aerotech.com... -
Page 24: Securing The Stage To The Mounting Surface
DANGER: PINCH POINT! Keep Hands Clear while the stage is in motion. Make sure that all moving parts are secure before you move the PRO560SL/SLE. Unsecured moving parts could shift and cause injury or damage to the equipment. -
Page 25: Attaching The Payload To The Stage
If you start the PRO560SL/SLE without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance. -
Page 26: Figure 2-5: Stage Orientations
2.4. Attaching the Payload to the Stage PRO560SL/SLE Hardware Manual Figure 2-5: Stage Orientations Figure 2-6: Cantilevered Load Capability www.aerotech.com... -
Page 27: Figure 2-7: Load Torque Equation
PRO560SL/SLE Hardware Manual 2.4. Attaching the Payload to the Stage The approximate amount of torque required to turn the ball screw of PRO560SL/SLE series stages can be found from Figure 2-8 or the following equation: (AxialLoad) (LeadofScrew) Torque π (Efficiency) - Page 28 2.4. Attaching the Payload to the Stage PRO560SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 29: Chapter 3: Electrical Installation
Electrical installation requirements will depend on the ordered product options. Installation instructions in this section are for Aerotech stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information on products that are otherwise configured. -
Page 30: Motor And Feedback Connectors
IMPORTANT: If you are using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. The protective ground connection of the PRO560SL/SLE provides motor frame ground protection only. Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized. -
Page 31: Table 3-1: Brushless Motor Connector Pinout
PRO560SL/SLE Hardware Manual 3.1. Motor and Feedback Connectors Table 3-1: Brushless Motor Connector Pinout Description Connector Motor Phase A Motor Phase B Motor Phase C Frame Ground (motor protective ground) Backshell Motor Cable Shield P/N: MS3101A18-10P Table 3-2: Mating Connector Part Numbers for the Brushless Motor Connector... -
Page 32: Table 3-5: Linear Encoder Connector Pinout (-Sle Only)
3.1. Motor and Feedback Connectors PRO560SL/SLE Hardware Manual Table 3-5: Linear Encoder Connector Pinout (-SLE only) -E1, -E2, and -E4 Encoder Option -E3 Encoder Option Connector Case Shield Connection Shield Connection Reserved Reserved Reserved Reserved +5 V power supply +5 V power supply... -
Page 33: Table 3-7: Limit Connector Wiring
PRO560SL/SLE Hardware Manual 3.1. Motor and Feedback Connectors Table 3-7: Limit Connector Wiring Description Limits Connector Case Shield Connection -LI1/-LI2 Option:5V Power Supply Limit Input -LI3 Option: 24V Power Supply Limit Input Limit Common +Limit/CW (Positive/Clockwise Travel Limit) Home Limit -Limit/CCW (Negative/Counterclockwise Limit) -
Page 34: Motor And Feedback Wiring
3.2. Motor and Feedback Wiring PRO560SL/SLE Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: Brushless Motor and Feedback Wiring [-SL Option] www.aerotech.com... -
Page 35: Figure 3-2: Brushless Motor And Feedback Wiring [-Sle Option]
PRO560SL/SLE Hardware Manual 3.2. Motor and Feedback Wiring Figure 3-2: Brushless Motor and Feedback Wiring [-SLE Option] www.aerotech.com... -
Page 36: Motor And Feedback Specifications
+5 V (10 kΩ recommended) recommended) Note: If the PRO560SL/SLE is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Table 3-13:... -
Page 37: Table 3-14: Pro560Sl/Sle Motor Specifications (Bms465)
5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 100 °C (thermistor trips at 100 °C) 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated A ;... -
Page 38: Table 3-15: Pro560Sl/Sle Motor Specifications (Bm500)
5. Torque constant and motor constant specified at stall 6. Maximum winding temperature is 130 °C 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated A ;... -
Page 39: Table 3-16: Rotary Encoder Specifications For Pro560Sl/Sle Stages
PRO560SL/SLE Hardware Manual 3.3. Motor and Feedback Specifications Table 3-16: Rotary Encoder Specifications for PRO560SL/SLE Stages Fundamental Signal Encoder Option Digital Resolution Period -M1, -M2, -M5, -M6 2 µm 0.5 µm (2500 line TTL signal) -M3, -M4, -M7, -M8 5 µm... -
Page 40: Limits, Marker, And Machine Direction
PRO560SL/SLE Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer Section 3.2.). -
Page 41: Motor And Feedback Phasing
PRO560SL/SLE Hardware Manual 3.5. Motor and Feedback Phasing 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing Diagram www.aerotech.com... -
Page 42: Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave)
3.5. Motor and Feedback Phasing PRO560SL/SLE Hardware Manual Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-6: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com... -
Page 43: Chapter 4: Maintenance
4.1. Service and Inspection Schedule Inspect the PRO560SL/SLE at least once per month. The need for a longer or shorter inspection interval will depend on the application and conditions, such as the duty cycle, speed, and environment. -
Page 44: Cleaning And Lubrication
5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. For stages equipped with foldback motors, you should check the belt tension when you clean or lubricate the stage. - Page 45 9. Clean the linear bearing guides with a clean, lint-free cloth or swab. 10. Apply a thin, continuous film of lubricant to the ball-screw threads and linear bearing guides. Aerotech recommends that you use a good quality, natural bristle artist's brush.
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Page 46: Figure 4-1: Hardcover Rear End Plate Removal
4.2. Cleaning and Lubrication PRO560SL/SLE Hardware Manual Figure 4-1: Hardcover Rear End Plate Removal Figure 4-2: Hardcover Screw Removal www.aerotech.com... -
Page 47: Figure 4-3: Hardcover Removal
PRO560SL/SLE Hardware Manual 4.2. Cleaning and Lubrication Figure 4-3: Hardcover Removal www.aerotech.com... -
Page 48: Motor Mounting
4-4). Loctite products are printed with an expiration date. Before use, be sure that the expiration date is legible and the product has not expired. If your stage is used in a vacuum or cleanroom environment, contact Aerotech. Figure 4-4:... -
Page 49: Figure 4-5: Attach The Coupling Adapter To The Motor Shaft
PRO560SL/SLE Hardware Manual 4.3. Motor Mounting Figure 4-5: Attach the Coupling Adapter to the Motor Shaft 6. Attach the Motor to the Stage in the correct orientation (Figure 4-6). Use a hex wrench to ensure that the motor flange is fully seated and the hardware is tight. The motor housing prevents the use of a torque wrench. -
Page 50: Figure 4-7: Tighten The Shaft Coupling To The Drive Screw
4.3. Motor Mounting PRO560SL/SLE Hardware Manual 7. Tighten the Shaft Coupling to the drive screw (Figure 4-7). Refer to Table 4-1 for the correct hardware and torque requirements. Figure 4-7: Tighten the Shaft Coupling to the Drive Screw 8. Rotate the drive screw by hand to ensure that the drive screw rotates freely. -
Page 51: Belt Adjustment
PRO560SL/SLE Hardware Manual 4.4. Belt Adjustment 4.4. Belt Adjustment This section applies to stages equipped with foldback motor options. On foldback stages, the motor torque is transferred to the ball screw via a timing belt. Belt tension is critical to stage performance and accuracy. -
Page 52: Figure 4-8: Foldback Motor Cover Removal
4.4. Belt Adjustment PRO560SL/SLE Hardware Manual Figure 4-8: Foldback Motor Cover Removal IMPORTANT: If the stage has been calibrated (-PL2 option), note the orientation of the two pulleys with regard to each other or recalibration might be required. www.aerotech.com... -
Page 53: Figure 4-9: Foldback Motor Part Callouts
PRO560SL/SLE Hardware Manual 4.4. Belt Adjustment Figure 4-9: Foldback Motor Part Callouts Figure 4-10: Lubricate the Pulley Flanges www.aerotech.com... -
Page 54: Troubleshooting
4.5. Troubleshooting PRO560SL/SLE Hardware Manual 4.5. Troubleshooting Symptom Possible Cause and Solution Brake not released (if equipped with brake; refer to stage documentation). In Limit condition. Check limits (refer to Chapter 3: Electrical Installation) and Stage will not move refer to the Controller documentation for polarity and compatibility requirements (Example: voltage requirements). -
Page 55: Appendix A: Warranty And Field Service
Aerotech’s products are specifically designed and/or manufactured for buyer’s use or purpose. Aerotech’s liability on any claim for loss or damage arising out of the sale, resale, or use of any of its products shall in no event exceed the selling price of the unit. - Page 56 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
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Page 57: Appendix B: Revision History
PRO560SL/SLE Hardware Manual Appendix B: Revision History Appendix B: Revision History Revision Description Updates have been made to: 2.00 Section 1.3. Basic Specifications Section 4.3. Motor Mounting 1.07 1.06 1.05 1.04 Revision changes have been archived. If you need a copy of this revision, contact Aerotech Global Technical Support. - Page 58 Appendix B: Revision History PRO560SL/SLE Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 59: Index
PRO560SL/SLE Hardware Manual Index Index foldback 2006/42/EC 2011/65/EU grease Accuracy and Temperature Effects Accuracy of the Ballscrew Hall-Effect Sensors Specifications acetone (caution) Humidity Altitude Ambient Temperature Attaching the Payload Inspection Schedule isopropyl alcohol Belt Adjustment belt tension label Belt Tension Adjustment Procedure... - Page 60 Index PRO560SL/SLE Hardware Manual serial number shimming Solution Specifications BM500 Motor BMS465 Motor Brake Encoder Hall-Effect Sensors Limit Switch Linear Encoder Rotary Encoder Thermistor Specifications stabilizing stage stage distortion stabilizing standoffs Symptom Table of Contents Temperature Effects thermal expansion coefficient...