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Ulvac LS Series Instruction Manual

Dry vacuum pump
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YO17-0938-DI-001-07
Prepared on: June 28ｔｈ, 2023

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Summary of Contents for Ulvac LS Series

  • Page 1 YO17-0938-DI-001-07 Prepared on: June 28ｔｈ, 2023...

  • Page 3: Before Using This Pump

    Before Using This Pump Thank you for purchasing the dry pump LS series (hereafter, "this pump") made by ULVAC (hereinafter, "we"). To ensure safety, upon receiving the pump, confirm that it matches the details of your order and has not been damaged in transit or for another reason.

  • Page 4: Safety Indications

    Safety Indications Signal words and symbol marks are used in the warning indications contained in this document and on the product so that the user can understand the matters to be observed. Their meanings are as follows. ▶ Meanings of signal words Terms that indicate a safe warning level are called signal words.

  • Page 5: Warning Label Types And Display Positions

    Warning Label Types and Display Positions Attach warning labels to the warning locations on this pump. Before operating this pump, be sure to confirm the warning contents. ▶ Warning Label Types and Descriptions Parts with this warning label have a risk of electrical shock. Turn off the primary power supply before starting wiring or maintenance.

  • Page 6: Warning Label Display Positions

    ▶ Warning label display positions Fig. 1 Warning label attachment position (LS120) Fig. 2 Warning label attachment position (LS300) YO17-0938-DI-001-07...
  • Page 7 Fig. 3 Warning label attachment position (LS600) Fig. 4 Warning label attachment position (LS1200) YO17-0938-DI-001-07...

  • Page 8: Warranty Terms

    Warranty Terms Although this pump undergoes our stringent internal inspection before shipment, if there are any failures attributable to us such as a manufacturing defect or accident during shipping, contact our nearest sales office or dealer. We will repair or replace it free of charge. ▶...

  • Page 9: Response

    ▶ Response （ａ） Transactions in Japan: We will send a substitute product, or repair the product returned to us or our nearest ULVAC TECHNO office. If on-site action is required, contact our nearest sales office or dealer separately. （ｂ） Direct export transactions: We will send a substitute product, or repair the product returned to us or our nearest service center.

  • Page 10: About This Document

    About This Document ● To ensure this pump remains usable for a long time, before installing, operating, inspecting, or maintaining it, be sure to read this document and fully understand the safety notes as well as the pump's specifications and operating procedures.

  • Page 11: Applicable Standards

    Applicable Standards YO17-0938-DI-001-07...

  • Page 13: Table Of Contents

    Contents Before Using This Pump ................ i Safety Indications ......................ii ▶ Meanings of signal words ....................... ii ▶ Meanings of symbol marks ......................ii Warning Label Types and Display Positions ..............iii ▶ Warning Label Types and Descriptions ..................iii ▶...
  • Page 14 2. Product Overview ................7 Features ....................... 7 Applications ......................7 Naming ......................... 8 Efforts Related to RoHS Directive and Regulated Hazardous Substances ..8 Performance Curves ................... 9 2.5.1 Pumping speed ......................9 2.5.2 Power requirements ....................10 Part Names and Functions ................11 Description of the Controller ................13 System Configuration ..................16 3.
  • Page 15 4. Operation ..................35 Precautions for operation ..................35 Preparations for Operation ................37 4.2.1 Pre-operation check ....................37 4.2.2 How to switch between LOCAL (manual) / REMOTE modes ........ 37 How to Start and Stop the Pump ...............38 4.3.1 LOCAL operation ...................... 38 4.3.2 REMOTE operation ....................

  • Page 17: To Ensure Safe Use

    1. To Ensure Safe Use This chapter describes how to reduce risks as well as which dangerous behaviors must be avoided for each work item 1.1 Handling of This Pump If you need an overhaul or repair or if you have a problem, contact our nearest service center. This manual assumes that this pump's interlock system or control system has been integrated into the host equipment.

  • Page 18: Acceptance, Transport, And Storage

    Foreign Trade Law as well as government ordinances, ministerial ordinances, notices, and other orders based on said law. Contact our nearest sales office or dealer. [List of sales offices] https://www.ulvac.co.jp/support_info/sales_office/ 1.2 Acceptance, Transport, and Storage 1.2.1 Acceptance Never get under this pump.

  • Page 19: Storage

    For transport, use cargo-handling equipment or a pallet truck. To transport this pump, a load higher than the safety standards is required. Therefore, manually transporting it may cause lower back pain or injury. For transport, hang this pump with cargo-handling equipment (such as a mobile crane) or fix it on a pallet and then transport it by pallet truck.

  • Page 20: Disposal

    1.4 Disposal Ask a waste disposal specialist to dispose of this pump if you have used it to exhaust harmful gas that may endanger human health. Ask a waste disposal specialist to dispose of this pump if you have used it to exhaust harmful gas that may endanger human health.

  • Page 21: Transport Of Heavy Objects

    1.6.2 Transport of heavy objects Never get under this pump. The pump may fall or topple if a forcible operation is performed or if the equipment is not sufficiently maintained. Never get under this pump. Never perform loading work or operate the cargo-handling machine if you do not have the appropriate certifications.

  • Page 22: Leakage Of Hot Cooling Water

    1.6.6 Leakage of hot cooling water If you inadvertently operate this pump without flowing water, stop the pump immediately and keep away from it. If you inadvertently operate this pump without flowing water, stop the pump immediately and keep away from it. Hot steam may blast out of the pump's cooling water port.

  • Page 23: Product Overview

    2. Product Overview The LS series is designed for vacuum pumping of general equipment; it assumes that the interlock system and control system have been integrated into the host equipment. The LS series is mainly used in the following processes: ●...

  • Page 24: Naming

    2.3 Naming The pump has two types for specific applications. ■ C type ： Clean process ● Feature ： Low power consumption model (with built-in ECO-SHOCK) ● Applications ： For clean process such as air and nitrogen Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc. ■...

  • Page 25: Performance Curves

    2.5 Performance Curves 2.5.1 Pumping speed Applicable-Standards： LS120 ISO 1607-1 : 1993 (JIS B 8316-1 : 1999) 1000 10000 100000 Pressure (Pa) Fig. 5 Pumping speed curve (LS120) 1,200 Applicable-Standards： LS300 ISO 1607-1 : 1993 (JIS B 8316-1 : 1999) LS600 1,000 LS1200...

  • Page 26: Power Requirements

    2.5.2 Power requirements Fig. 7 Power curve (LS120) Fig. 8 Power curve (LS300, LS600, LS1200) YO17-0938-DI-001-07...

  • Page 27: Part Names And Functions

    2.6 Part Names and Functions Fig. 9 Part names (LS120) Table 3 Part names (LS120) Name Function Reference Cooling water outlet Connects the piping that exhausts cooling water. (Rc3/8) 3.5.2 Cooling water inlet Connects the piping that supplies cooling water. (Rc3/8) 3.5.2 Purge gas inlet (L types only) Connects the piping that supplies purge gas.
  • Page 28 Fig. 10 Part names (LS300, LS600, LS1200) Table 4 Part names (LS300, LS600, LS1200) Name Function Reference Cooling water outlet Connects the piping that exhausts cooling water. (Rc3/8) 3.5.2 Cooling water inlet Connects the piping that supplies cooling water. (Rc3/8) 3.5.2 Purge gas inlet (L types only) Connects the piping that supplies purge gas.

  • Page 29: Description Of The Controller

    2.7 Description of the Controller Fig. 11 Controller Table 5 Description of the controller Name Function Data display section Displays information such as the number of revolutions and current status. ESC key Returns to the status that is active before pressing the ENTER key. During controller operation, this key moves between digits.
  • Page 30 Fig. 12 LED lamps Table 6 LED lamp display Name Blinking ALM LED lamp Alarm detected. Warning detected. Normal status. The reverse rotation The forward rotation command REV LED lamp* command has been － has been entered. entered. DRV LED lamp* In drive mode （...
  • Page 31 Data display transition Fig. 14 Data display Transition diagram YO17-0938-DI-001-07...

  • Page 32: System Configuration

    2.8 System Configuration The customer must take responsibility for the area enclosed by the dashed line in the figure below. The customer should prepare and manage the piping, wiring, and facilities in this area under their own responsibility 3-phase power supply Ground-fault interrupter Feed Feed...

  • Page 33: Installation

    Packing - ULVAC Transport - ULVAC entrusts this task to a specified carrier. Cargo reception and unpacking - Customer Inspection - Customer...

  • Page 34: Storage Environment Requirements

    3.1.2 Storage environment requirements When storing this pump (prior to installation) in a warehouse or lobby, or when you will not be using it for a long time, store it so that the following requirements are satisfied. Ambient temperature -20°C to 60°C (no freezing) Ambient humidity 95% RH or less (no condensation) Altitude...

  • Page 35: Unpacking

    3.2 Unpacking This pump is protected with stretch film, a buffer, or other materials and is packaged in a wooden crate or cardboard box upon shipment. If this pump has been packaged in a wooden crate, ask a specialist to disassemble the crate. Provide the following notes and instructions to the company you ask to perform unpacking.

  • Page 36: Transport

    Table 8 List of standard accessories Product name Specifications Qty. Remarks CE connector (DDK) CE05-6A22-22SD-D-BSS Power connector /JL04V connector (JAE) / JL04V-6A22-22SE-EB-R CE connector (DDK) CE3057-12A-1-D Waterproof cable clamp / JL04V connector (JAE) / JL04-2022CK(14)-R Signal connector With a clamp hood Ｄ-sub 15pin male Quick Manual Japanese and English...

  • Page 37: How To Hoist This Pump Using A Crane

    3.3.1 How to hoist this pump using a crane Never get under this pump. When hoisting this pump, it may fall or topple if a forcible operation is performed or if the equipment is not sufficiently maintained. Never get under this pump. Use a crane or other cargo-handling equipment.

  • Page 38: How To Transport This Pump Via Pallet Truck

    3.3.2 How to transport this pump via pallet truck Do not carry this pump with the adjusters raised. When transporting this pump via pallet truck, lower the four adjusters. If you carry this pump without the adjusters attached to the pallet, the pump may topple, causing injury or damage.

  • Page 39: Installation

    3.4 Installation 3.4.1 Leveling Install this pump so that it is level. If you install this pump on an inclined floor or other such surface, or if adjuster-based adjustment is out of balance, noise or failure may occur. After moving this pump to the installation location, use the adjusters to adjust the pump’s inclination and install it so that it is as horizontal as possible.
  • Page 40 Table 9 Earthquake resistance evaluation YO17-0938-DI-001-07...

  • Page 41: Piping And Wiring

    ● Before connecting piping, remove the flange for storage. In the LS series, the flange for storage, inlet port mesh, and desiccant are attached to the pump inlet port flange upon shipment from the factory. Before connecting piping, remove the flange and desiccant for storage.

  • Page 42: Cooling Water Piping

    3.5.2 Cooling water piping Use an appropriate joint. This pump's cooling water port is Rc3/8. Connect the cooling water piping to it using an appropriate joint. Do not confuse the cooling water inlet with the cooling water outlet. Points to observe when using cooling water piping Observe the following items related to cooling water and piping.
  • Page 43 ● When using multiple pumps, connect their cooling water piping in parallel. When using multiple pumps, connect their cooling water piping in parallel. If such piping is connected in series, cooling capacity will be insufficient, causing a failure. ● Use a filter or other tool to filter water that has many impurities. When using that has with many impurities, including water stains or iron, use a filter or other tool to filter it during the stage prior to use.

  • Page 44: Purge Gas

    3.5.3 Purge gas The pump with the L types has a purge gas introduction mechanism. If the gas you handle contains condensable gas or water, liquid may accumulate at the pump's final stage. Introduce CDA (dew point: -60°C) or nitrogen at the pump's final stage using purge gas to suppress liquid from accumulating at the pump's final stage.

  • Page 45: Drain

    3.5.4 Drain The L types provide a front drain valve and side drain port in order to prevent liquid condensed on the exhaust port side from accumulating inside the pump. When discharging a condensable gas, connect the drain pipe to the drain valve and drain port, and then actively discharge the liquid.

  • Page 46: Wiring

    3.6 Wiring 3.6.1 Power wiring Wiring work must be performed by certified workers. Electrical wiring work must be performed by certified workers. Before performing wiring work, turn off the primary side power supply. When performing wiring work, before starting, be sure to turn off the primary side power supply.
  • Page 47 Table 12 Power supply capacity and recommended earth leakage circuit breaker ratings list 200V 400V Ratings list LS120 LS300 LS600 LS1200 LS120 LS300 LS600 LS1200 Recommended type NV-32SV(F)-(Mitsubishi Electric) Rated current (A) Rated residual operating current (mA) Power supply capacity (kVA) ■...

  • Page 48: Wiring For Remote Control

    3.6.2 Wiring for remote control Power supply wiring work must be performed by certified workers. Electrical wiring work must be performed by certified workers. Before performing wiring work, turn off the primary side power supply. Before performing wiring work, turn off the primary side switch. Never perform wiring work while applying voltage.
  • Page 49 ■ Pin assignment for remote control wiring Pin assignment I / O Item Specifications Pump start CLOSE: Run OPEN: Stop Alarm reset CLOSE: Reset External abnormality CLOSE: Abnormal OPEN: Normal Spare Unavailable Startup check CLOSE: Running OPEN: Stopped Alarm CLOSE: Normal OPEN: Alarm IN COM External interlock...
  • Page 50 Fig. 25 I/O block diagram for remote control wiring YO17-0938-DI-001-07...

  • Page 51: Operation

    4. Operation 4.1 Precautions for operation Only suction for inert gases. This pump is designed to exhaust only inert gases (air, nitrogen, or argon). It cannot be used to exhaust other gases (toxic, combustible, corrosive, or explosive gas, or gas that increases the susceptibility of substances) because such gas may leak from the pump's main unit or ignite or explode inside the pump.
  • Page 52 For cooling water, use water containing few impurities. We recommend using water that contains few impurities (e.g., industrial water; refer to the table below). Depending on water quality, water stains from calcium carbonate or other substance may accumulate inside the pump's cooling water system, reducing the amount of cooling water.

  • Page 53: Preparations For Operation

    4.2 Preparations for Operation 4.2.1 Pre-operation check Before starting operation of this pump, reconfirm the following. 1． Confirm that connection of the cooling water piping, and power connector, and signal connector has been completed. 2． Open the cooling water valve and confirm that no cooling water leaks. 3．...

  • Page 54: How To Start And Stop The Pump

    4.3 How to Start and Stop the Pump 4.3.1 LOCAL operation Use the pump with the supplied signal connector plug attached. ■ How to start the pump Press on the DRP controller. The pump starts and the RUN lamp on the controller turns on. * MBP starts rotating automatically when the DRP revolution speed exceeds 4000 rpm.

  • Page 55: Monitor Display

    4.4 Monitor Display 4.4.1 Monitor display method To check each pump state, select "Monitor Display" on the controller and follow the procedures below. 1． Turn on the power supply. The initial screen appears. 2． Press until (monitor display) appears on the controller, and then press The controller changes to "Monitor Display"...

  • Page 56: List Of Parameters

    4.5 List of Parameters 4.5.1 U1：Status monitor To display the operation status, use the U1 parameter. Table 15 List of status monitor parameters Name Function U1-03 Output current Displays the output current. 4.5.2 U3：Alarm history To display the alarm history, use the U3 parameter. Table 16 List of alarm history parameters Name...

  • Page 57: U4：Operation Monitor

    4.5.3 U4：Operation monitor To display the pump’s operation information, use the U4 parameter. Table 17 List of operation monitor parameters. Name Function U4-01 Cumulative No. of operating hours Displays the pump's cumulative No. of operating hours. U4-08 Inverter temperature Displays the inverter temperature. YO17-0938-DI-001-07...

  • Page 58: Maintenance And Inspections

    If this pump is stored for a long period of time without being operated (at least six months), trouble may occur when the pump is operated due to rusting. If the pump has not been used for a long period of time, before using the pump again, request an inspection from your local ULVAC service center. YO17-0938-DI-001-07...

  • Page 59: Overhaul

    Replacement Parts" must be replaced at a minimum. When an overhaul is required, contact your local ULVAC service center. When requesting overhaul, maintenance, repair, or other work, fill out the Declaration of Contamination attached to this document and submit it to the service center.

  • Page 60: Troubleshooting

    No power is supplied. Supply power. The pump does not turn 3.6.1 The connector is incorrectly wired. Perform wiring correctly. Last page of this Contact ULVAC service There is a leak inside the pump. center. manual No power is supplied. Supply power. 4.2.1...

  • Page 61: Alarm Statuses And Corrective Actions

    3.6.1 After cooling down the pump, let cooling water flow. No cooling water flow 3.5.2 Last page of Pump overload Contact the ULVAC service center. this manual Last page of Ventilation fan failure Contact the ULVAC service center. this manual Ambient temperature outside the Operate the pump at an appropriate ambient temperature.
  • Page 62 Motor failure Contact the ULVAC service center. manual A foreign object has disabled rotation. Last page of this ➡ Contact the ULVAC service center. manual The exhaust port pressure has risen. 3.5.1 ➡ Clean and wash the pump’s exhaust piping.
  • Page 63 （oL2） Cause Corrective action Reference A foreign object has disabled rotation. Last page of ➡ Contact the ULVAC service center. this manual The exhaust port pressure has risen. 3.5.1 ➡ Clean and wash the pump’s exhaust piping. Pump overload A bearing has been damaged.
  • Page 64 3.5.2 ➡ Clean the piping. The cooling water piping has a leak. Last page of ➡ If the leak is inside the pump, contact the ULVAC this manual service center. Display Alarm name Status ・The thermistor input circuit has become disconnected.
  • Page 65 Corrective action Reference We recommend performing an overhaul, including It had been exceeded time for Last page of replacement of the inverter. replacing the inverter, then operating this manual ➡ Contact the ULVAC service center. hours has been exceeded 30,000. YO17-0938-DI-001-07...

  • Page 66: How To Restart The Pump After An Alarm

    Use a shielded cable for the remote control wiring. Noise from the remote control wiring ➡ Be sure to ground the wiring. Last page of Bad controller wiring Contact the ULVAC service center. this manual Display Alarm name Status External abnormality signal An external abnormality signal has been input in the （EF3）...

  • Page 67: Specifications

    7. Specifications 7.1 Performance Specifications Model LS120 LS300 LS600 LS1200 C : C Type L : L Type Max. 1000 Pumping / hr speed Atmospheric pressure Ultimate pressure Power Supply (selection) 3phase 200-240 Vac±10% or 380-480 Vac±10% 50/60 Hz At ultimate Approx.

  • Page 68: Dimentional Drawings

    7.2 Dimentional Drawings External dimensions of Fig. 26 LS120-C External dimensions of Fig. 27 LS120-L YO17-0938-DI-001-07...
  • Page 69 External dimensions of Fig. 28 LS300-C External dimensions of Fig. 29 LS300-L YO17-0938-DI-001-07...
  • Page 70 External dimensions of Fig. 30 LS600-C External dimensions of Fig. 31 LS600-L YO17-0938-DI-001-07...
  • Page 71 External dimensions of Fig. 32 LS1200-C External dimensions of Fig. 33 LS1200-L YO17-0938-DI-001-07...

  • Page 72: Appendix

    Appendix Major Replacement Parts The list of parts that must be replaced during an overhaul is as follows. The replacement timing differs depending on the part. The recommended replacement periods indicated in the table below are for reference. Actual periods may differ depending on usage conditions and the environment.
  • Page 73 Type Part name Target Models Cylinder All models Rotor shaft All models Side cover All models Motor All models Parts that must be replaced every five years Timing gear All models Thermistor LS300, LS600, LS1200 Controller All models Power supply All models Noise filter All models...
  • Page 74 YO17-0938-DI-001-07...
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This manual is also suitable for:

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