MKS GE50A Instruction Manual

Digital mass flow controller

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Table of Contents

Table of Contents
List of References
Mass Flow Device Safety Information
Symbols Used in this Instruction Manual
Symbols Found on the Unit
Safety Procedures and Precautions
Table 1: Definition of Symbols Found on the Unit
Sicherheitshinweise für das Massenflussgerät
In dieser Betriebsanleitung Vorkommende Symbole
Erklärung der am Gerät Angebrachten Symbole
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
Informations de Sécurité Pour Appareils de Mesure/Contrôle de Débit Massique
Symboles Utilisés Dans Ce Manuel D'utilisation
Symboles Figurant Sur L'unité
Mesures de Sécurité Et Précautions
Tableau 3: Définition des Symboles Sur L'unité
Medidas de Seguridad del Dispositivo de Flujo de Masa
Símbolos Usados en Este Manual de Instrucciones
Símbolos Hallados en la Unidad
Procedimientos y Precauciones de Seguridad
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
マスフロー機器の安全に関する情報
本取扱説明書のマーク
本機器のマーク
表 5: 本機器に使⽤されているマークについて
安全対策について
질량 유량 장치 안전 정보
본 지침 매뉴얼에 사용되는 기호들
장치에 표시된 기호들
표 6: 장치에 표시된 기호들의 정의
안전 절차 및 예방조치
Chapter One: General Information
Introduction
How this Manual Is Organized
Customer Support
Chapter Two: Overview
General Information
How the MFC Works
Operation of the MFC with Gases Other than Nitrogen
Chapter Three: Installation and Configuration
Unpacking
Product Location and Requirements
Product Dimensions
GE50A and GM50A - See Appendix C
GV50A - See Appendix D
Mounting Hardware
Installation Procedure
Figure 1: Serial Number Label (Sample)
Chapter Four: Analog and Digital Interfaces
Analog I/O Interface Cables
Table 7: MKS Interface Cables
Analog Interface Input and Output Options
Table 8: Analog Interface Voltage I/O (0 to 5 VDC) - 9 Pin D Male Pinouts - Model Code a
Table 9: Analog Interface Voltage I/O (0 to 5 VDC) - 15 Pin D Male Pinouts - Model Code B
Digital Interface Input and Output Options
Figure 2: Devicenet Connector Pin Diagram
Table 10: Digital Interface - Devicenet Connector Pinout - Model Code 6
Figure 3: Devicenet Top View
Table 11: Network (NET) Status LED Indicators
Figure 4: Devicenet Baud Rate Switch
Figure 5: Devicenet MAC ID Switches
Table 12A: Profibus 9 Pin D Male Power Connector- Model Code 4
Figure 6: Profibus Top View
Table 12B: Profibus 9 Pin D Female Communications Connector - Model Code 4
Figure 7: Profibus Station Address Switches
Table 13: Digital Interface - RS485 Using 9 Pin D - Model Code 5
Table 14: RS485 Module Status LED Indicators
Figure 8: RS485 Top View
Chapter Five: Ethernet Interface Setup and Configuration
Step 1: Install the Java™ Plug-In (for Single IP Address)
Step 2: Setup Network for Communication through Ethernet
Chapter Six: Embedded Web-Based GUI and Diagnostics
Logging on to Your MFC
Monitor Mode
Figure 9: Embedded GUI, MFC Device Page in Monitor Mode
Figure 10: Embedded GUI, Plot Page in Monitor Mode
Figure 11: Embedded GUI, Configuration Page in Monitor Mode
Figure 12: Embedded GUI, RS485 Comm Page in Monitor Mode
Setup Mode
Figure 13: Setup Mode (Configuration Page)
Figure 14: Embedded GUI, Device Page in Setup Mode
Figure 15: Embedded GUI, Creating a New Gas Instance
Figure 16: Changing the Full Scale Flow Range
Figure 17: Embedded GUI, Plot Page in Setup Mode
Figure 18: Embedded GUI, Configuration Page in Setup Mode
Figure 19: Embedded GUI, RS485 Comm Page in Setup Mode
Figure 20: Embedded GUI, Diagnostics Page in Setup Mode
Chapter Seven: Maintenance
General Information
Recalibration
Flow Zero Adjustment
Chapter Eight: Troubleshooting
Troubleshooting Chart
Table 15: Troubleshooting Chart
Appendix A: Product Specifications
Performance Specifications - GE50A/GV50A/GM50A
Specifications Are Subject to Change Without Notice.mechanical Specifications - GE50A/GV50A/GM50A
Electrical Specifications for GE50A, GM50A and GV50A
Appendix B : Model Code Explanation for GE50A & GV50A
Model Code Description - Elastomer Sealed Products
Appendix C: Model Code Explanation for GM50A
Model Code Description - GM50A - Metal Sealed Products
Appendix D : Outline Drawings
GE50A MFC and GM50A MFC/MFM
GV50A MFC W/ Integral Shut-Off Valve
Appendix D: Health and Safety Form

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2 Chapter Three: Installation and Configuration
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1046210-001, Rev A

January, 2013

MKS G-Series

Digital

Mass Flow Controllers

Instruction Manual

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MKS GE50A Instruction Manual

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