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SMC Networks ITV0000 Series Manual
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SMC Networks ITV0000 Series Manual

Lectro-pneumatic regulator/ electronic vacuum regulator
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Electro-Pneumatic Regulator/
Electronic Vacuum Regulator
For the stepless control of air pressure in
proportion to electrical signals
Serial communication specification
Applicable Fieldbus protocols
RS-232C specification
Compact and lightweight
(Integrated communication parts)
350
*
Weight:
g
Power consumption:
*1 Values for the communication type (PROFIBUS DP)
Electro-Pneumatic Regulators
ITV0000
Series
Max. flow rate
6
L/min (ANR)
ITV2000
Series
Max. flow rate
1500
L/min (ANR)
ITV
Series
1
(ITV1000)
4
*
1
W
or less
Set pressure: 0.6 MPa Supply pressure: 1.0 MPa
ITV1000
5
p.
Grease-free specification
(Parts in contact
with fluid)
Max. flow rate
200
L/min (ANR)
ITV3000
13
p.
Max. flow rate
4000
50
13
Series
p.
13
p.
Series
L/min (ANR)
IP65
New
New
compatible
products have
been added.
Due to the built-in
communication board,
no converter is required.
50
For the ITV10m0-IL
Electronic Vacuum Regulators
ITV009m
Series
ITV209m
Series
CAT.ES60-15G
RoHS
39
p.
46
p.

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Summary of Contents for SMC Networks ITV0000 Series

  • Page 1 Electro-Pneumatic Regulator/ Electronic Vacuum Regulator RoHS IP65 For the stepless control of air pressure in proportion to electrical signals Serial communication specification Applicable Fieldbus protocols compatible products have been added. Due to the built-in communication board, RS-232C specification no converter is required. Compact and lightweight (Integrated communication parts) Weight:...
  • Page 2 Electro-Pneumatic Regulator/Electronic Vacuum Regulator Series ITV0000 Series Compact Electro-Pneumatic Regulator IP65 equivalent ITV009 m Series Compact Vacuum Regulator Compact Improved space saving and weight reduction when Lightweight used in a manifold Thanks to its simplified high- density circuit board design, Stations can be easily an extremely compact increased or decreased due...
  • Page 3 Electro-Pneumatic Regulator/Electronic Vacuum Regulator Series IO-Link Compatible Devices: Electro-Pneumatic Regulator ITV10m0/20m0/30m0-IL Electronic Vacuum Regulator ITV2090-IL IO-Link communication enables users to check device information and monitor device status in IO-Link is an open communication inter- face technology between the sensor/actu- addition to performing pressure control. ator and the I/O terminal that is an interna- tional standard: IEC 61131-9.
  • Page 4 For the stepless control of air pressure in proportion to electrical signals Series Model Set pressure range Input signal Port size Page ITV0000 Series ITV001m 0.001 to 0.1 MPa Current type: 4 to 20 mADC (Sink type) Built-in One-touch Current type: 0 to 20 mADC...
  • Page 5 C O N T E N T S Electro-Pneumatic Regulators ITV0000 Series How to Order p. 5 Specifications p. 6 Accessories (Option) p. 6 Working Principle p. 7 Linearity/Hysteresis, Repeatability, Pressure Characteristics, Flow Rate Characteristics p. 8 Dimensions p. 10 ITV1000/2000/3000 Series How to Order...
  • Page 6 Compact Electro-Pneumatic Regulator ITV0000 Series RoHS How to Order For single unit and single unit for manifold ITV00 1 0 Pressure range Cable connector (Option) 0.1 MPa Power supply voltage Without cable connector 0.5 MPa 24 VDC ±10% Straight type 3 m 0.9 MPa 12 to 15 VDC Right angle type 2 m...
  • Page 7 ITV0000 Series Compact Electro-Pneumatic Regulator Specifications ITV001m ITV003m ITV005m Model Min. supply pressure Set pressure + 0.1 MPa Max. supply pressure 0.2 MPa 1.0 MPa Set pressure range 0.001 to 0.1 MPa 0.001 to 0.5 MPa 0.001 to 0.9 MPa 24 VDC ±10%, 12 to 15 VDC Voltage Power supply...
  • Page 8 ITV0000 Series Working Principle When the input signal rises, the air supply solenoid valve q turns ON. Due to this, part of the supply pressure passes through the air supply solenoid valve q and changes to output pressure. This output pressure feeds back to the control circuit r via the pressure sensor e.
  • Page 9 ITV0000 Series Compact Electro-Pneumatic Regulator ITV001m Series Linearity, Hysteresis Repeatability With 50% of signal input Return –0.2 –0.4 –0.5 –0.6 –0.8 –1 –1 Input signal [% F.S.] Count Pressure Characteristics Flow Rate Characteristics Set pressure: 0.05 MPa Supply pressure: 0.2 MPa 100 kPa 80 kPa 60 kPa...
  • Page 10 ITV0000 Series ITV005m Series Linearity, Hysteresis Repeatability With 50% of signal input Return –0.2 –0.4 –0.5 –0.6 –0.8 –1 –1 Input signal [% F.S.] Count Pressure Characteristics Flow Rate Characteristics Set pressure: 0.45 MPa Supply pressure: 1.0 MPa 1000 900 kPa 800 kPa 700 kPa 600 kPa...
  • Page 11 ITV0000 Series Compact Electro-Pneumatic Regulator Dimensions For single unit L-bracket Flat bracket (Option) (Option) M8 x 1 Cable connection thread ∗ Breathing hole (M3 x 0.5) SUPz OUT port SUP port OUTx (ø4, ø5/32") EXHc (ø4, ø5/32") EXH port (ø4, ø5/32") L-bracket Flat bracket (Option)
  • Page 12 ITV0000 Series Dimensions Single unit for manifold M8 x 1 Cable connection thread ∗ Breathing hole (M3 x 0.5) OUTx port (ø4, ø5/32") Bushing assembly *1 When using under the conditions equivalent to IP65, connect the fittings or tube to the breathing hole before use.
  • Page 13 ITV0000 Series Compact Electro-Pneumatic Regulator Dimensions Manifold 4 x M3 x 0.5 thread depth 3.5 Mounting hole Port Location ITV00 3 m * Stations are counted starting from the D side. 5.25 12.5 (Pitch) (Pitch) D side U side 2 ····stations 3 (8) Dimension for the inch size is SUPz port...
  • Page 14 Electro-Pneumatic Regulator ITV1000/2000/3000 Series ® RoHS How to Order 3 0 1 0 Model type 1000 type 2000 3000 type Pressure range Made to order Refer to page 15 for details. 0.1 MPa 0.5 MPa 0.9 MPa Pressure display unit kgf/cm Power supply voltage 24 VDC...
  • Page 15 ITV1000/2000/3000 Series Electro-Pneumatic Regulator Standard Specifications ITV101m ITV103m ITV105m ITV201m ITV203m ITV205m Model ITV301m ITV303m ITV305m Min. supply pressure Set pressure + 0.1 MPa Max. supply pressure 0.2 MPa 1.0 MPa Set pressure range 0.005 to 0.1 MPa 0.005 to 0.5 MPa 0.005 to 0.9 MPa Voltage 24 VDC ±10%, 12 to 15 VDC...
  • Page 16 ITV1000/2000/3000 Series Modular Products and Accessory Combinations Applicable model Applicable products and accessories ITV20ll ITV30ll ITV20„„ rSpacer Air filter AF30-A AF40-A Mist separator AFM30-A AFM40-A L-bracket B310L-A B410L-A Spacer Y30-A Y40-A Spacer with L-bracket ( Y30L-A Y40L-A Spacer with T-bracket —...
  • Page 17 ITV1000/2000/3000 Series Electro-Pneumatic Regulator Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF. Therefore, supply pressure passes through the air supply solenoid valve q and is applied to the pilot chamber e. The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r.
  • Page 18 ITV1000/2000/3000 Series ITV101m Series Linearity Hysteresis Repeatability 0.10 0.09 0.08 0.07 Return 0.06 0.05 0.04 0.03 – – 0.02 0.01 – 0.00 – Input signal [% F.S.] Input signal [% F.S.] Repetition Pressure Flow Rate Relief Characteristics Characteristics Characteristics Supply pressure: 0.2 MPa Back pressure: 0.2 MPa Set pressure: 0.05 MPa 0.15...
  • Page 19 I TV1000/2000/3000 Series Electro-Pneumatic Regulator ITV301m Series Linearity Hysteresis Repeatability 0.10 0.09 0.08 0.07 0.06 0.05 Return 0.04 0.03 – – 0.02 0.01 – 0.00 – Input signal [% F.S.] Input signal [% F.S.] Repetition Pressure Flow Rate Relief Characteristics Characteristics Characteristics Set pressure: 0.05 MPa...
  • Page 20 ITV1000/2000/3000 Series ITV103m Series Linearity Hysteresis Repeatability Return – – – – Input signal [% F.S.] Input signal [% F.S.] Repetition Pressure Flow Rate Relief Characteristics Characteristics Characteristics Set pressure: 0.2 MPa Supply pressure: 0.7 MPa Back pressure: 0.7 MPa Set point –...
  • Page 21 ITV1000/2000/3000 Series Electro-Pneumatic Regulator ITV303m Series Linearity Hysteresis Repeatability Return – – – – Input signal [% F.S.] Input signal [% F.S.] Repetition Pressure Flow Rate Relief Characteristics Characteristics Characteristics Set pressure: 0.2 MPa Supply pressure: 0.7 MPa Back pressure: 0.7 MPa Set point –...
  • Page 22 ITV1000/2000/3000 Series ITV105m Series Linearity Hysteresis Repeatability Return – – – – Input signal [% F.S.] Input signal [% F.S.] Repetition Pressure Flow Rate Relief Characteristics Characteristics Characteristics Set pressure: 0.4 MPa Supply pressure: 1.0 MPa Back pressure: 1.0 MPa Set point –...
  • Page 23 ITV1000/2000/3000 Series Electro-Pneumatic Regulator ITV305m Series Linearity Hysteresis Repeatability Return – – – – Input signal [% F.S.] Input signal [% F.S.] Repetition Pressure Flow Rate Relief Characteristics Characteristics Characteristics Set pressure: 0.4 MPa Supply pressure: 1.0 MPa Back pressure: 1.0 MPa Set point –...
  • Page 24 ITV1000/2000/3000 Series Construction ITV1000 Main Component Parts Description Material Body Aluminum alloy Cover Aluminum alloy Valve guide Resin Aluminum alloy Diaphragm assembly HNBR Steel Seal Resin Bowl assembly Silicone rubber Sub-plate Resin Seal Control circuit assembly — Bumper Stainless steel Valve HNBR Guide retainer...
  • Page 25 ITV1000/2000/3000 Series Electro-Pneumatic Regulator Construction ITV3000 Main Component Parts Description Material Cover Aluminum alloy Body Aluminum alloy Valve guide Aluminum alloy Bias spring Stainless steel Intermediate body Aluminum alloy HNBR Stainless steel Diaphragm assembly Aluminum alloy Steel Valve (Supply valve) HNBR/Brass Valve (Exhaust valve) HNBR/Brass...
  • Page 26 ITV1000/2000/3000 Series Dimensions ITV10mm * Do not attempt to rotate, as the cable connector does not turn. Flat bracket Right angle type (4 cores) Straight type (4 cores) Cable connector 3 m Cable connector 3 m „50 Setting part 12.5 M12 x 1 Cable connection thread (Plug type) Digital pressure display...
  • Page 27 ITV1000/2000/3000 Series Electro-Pneumatic Regulator Dimensions (16 points preset input, 10-bit digital input, CC-Link, DeviceNet™) 16 points preset input 10-bit digital input M12 x 1 M12 x 1 Signal cable connection RP13A-12RB-13PA (71) made by Power cable connection thread thread (Plug type) HIROSE ELECTRIC CO., LTD.
  • Page 28 ITV1000/2000/3000 Series Dimensions (PROFIBUS DP, RS-232C, IO-Link) ITV10m0-PR ITV10m0-RC PROFIBUS DP: RS-232C: M12 x 1 M12 x 1 M12 x 1 Communication cable connection M12 x 1 Communication cable connection Power cable connection thread thread (Socket type) Power cable connection thread thread (Plug type) (Plug type) 10.5...
  • Page 29 ITV1000/2000/3000 Series Electro-Pneumatic Regulator Dimensions ITV20mm * Do not attempt to rotate, as the cable connector does not turn. Flat bracket Right angle type (4 cores) Straight type (4 cores) Cable connector 3 m Cable connector 3 m „50 12.5 M12 x 1 Cable connection thread (Plug type) Digital pressure display...
  • Page 30 ITV1000/2000/3000 Series Dimensions (16 points preset input, 10-bit digital input, CC-Link, DeviceNet™) 16 points preset input 10-bit digital input M12 x 1 M12 x 1 RP13A-12RB-13PA (71) made by Signal cable connection Power cable connection thread HIROSE ELECTRIC CO., LTD. thread (Plug type) (Plug type) (ø14.3)
  • Page 31 ITV1000/2000/3000 Series Electro-Pneumatic Regulator Dimensions (PROFIBUS DP, RS-232C, IO-Link) ITV20m0-PR ITV20m0-RC PROFIBUS DP: RS-232C: M12 x 1 M12 x 1 M12 x 1 M12 x 1 Communication cable connection Power cable connection thread Communication cable connection Power cable connection thread thread (Socket type) (Plug type) thread (Plug type)
  • Page 32 ITV1000/2000/3000 Series Dimensions ITV30mm * Do not attempt to rotate, as the cable connector does not turn. Flat bracket Right angle type (4 cores) Straight type (4 cores) Cable connector 3 m Cable connector 3 m M12 x 1 12.5 Cable connection thread (Plug type) Digital pressure display M5 x 0.8...
  • Page 33 ITV1000/2000/3000 Series Electro-Pneumatic Regulator Dimensions (16 points preset input, 10-bit digital input, CC-Link, DeviceNet™) 16 points preset input 10-bit digital input M12 x 1 M12 x 1 RP13A-12RB-13PA (71) made by Signal cable connection Power cable connection thread HIROSE ELECTRIC CO., LTD. thread (Plug type) (Plug type) (ø14.3)
  • Page 34 ITV1000/2000/3000 Series Dimensions (PROFIBUS DP, RS-232C, IO-Link) ITV30m-PR ITV30m-RC PROFIBUS DP: RS-232C: M12 x 1 M12 x 1 M12 x 1 M12 x 1 Communication cable connection thread (Socket type) Communication cable connection Power cable connection thread Power cable connection thread (Plug type) 10.5 11.5 thread (Plug type)
  • Page 35 ® RoHS ITV1000/2000/3000 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times. Reverse Type High-Pressure Type (SUP 1.2 MPa, OUT 1.0 MPa) In accordance with the input signal, the inverse proportional pressure is output. ITV10 X224 ITV10 X102...
  • Page 36 ITV1000/2000/3000 Series High-Speed Response Time Type Pressure response with no load is approx. 0.1 s. * This is not a guaranteed value as it depends on the operating environment. * When the input signal is at 0%, the exhaust solenoid valve is controlled to reduce the outlet pressure to zero. For this reason, a noise may be generated. This noise is normal and does not indicate a fault.
  • Page 37 ITV1000/2000/3000 Series Made to Order Manifold Specifications (Excludes the ITV3000 series) 2 through 8-station manifold How to Order Manifolds How to Order Manifold Assemblies IITV20 Example Blanking plate assembly Stations P398020-13 Electro-pneumatic regulator 2 stations ITV1030-311S-X26 Electro-pneumatic regulator ITV2050-212S-X26 8 stations ITV1000, 2000 OUT port size Rc, NPT, G1/2...
  • Page 38 ITV1000/2000/3000 Series Linearity: ±0.5% F.S. or Less Application examples: Polishing equipment and peripheral equipment for wafers, LCD glasses, color filters, etc. X410 Model Linearity: ±0.5% F.S. or less 1000 type Pressure range 2000 type 0.1 MPa Pressure display unit 3000 type 0.5 MPa 0.9 MPa kgf/cm...
  • Page 39 ITV1000/2000/3000 Series Made to Order With Alarm Output Alarm is output if the set pressure is not reached or maintained for 5 seconds or more. Application examples: Pressure management for thrust control, etc. X420 Model With alarm output Pressure range 1000 type Pressure display unit 0.1 MPa...
  • Page 40 Compact Vacuum Regulator ITV009m Series RoHS How to Order For single unit and single unit for manifold ITV00 9 0 Pressure range 100 kPa – Cable connector (Option) Without cable connector Power supply voltage Straight type 3 m 24 VDC ±10% Right angle type 2 m 12 to 15 VDC Input signal...
  • Page 41 ITV009m Series Compact Vacuum Regulator Specifications ITV009 Model Min. supply pressure Set pressure – 1 kPa Max. supply pressure –101 kPa Set pressure range –1 to –100 kPa 24 VDC ±10%, 12 to 15 VDC Voltage Power supply Current Power supply voltage 24 VDC type: 0.12 A or less consumption Power supply voltage 12 to 15 VDC type: 0.18 A or less Voltage type...
  • Page 42 ITV009m Series Working Principle When the input signal rises, the vacuum pressure solenoid valve q turns ON. Due to this, part of the vacuum pressure (VAC.) passes through the vacuum pressure solenoid valve q and changes to a vacuum pressure. This vacuum pressure feeds back to the control circuit r via the pressure sensor e.
  • Page 43 ITV009m Series Compact Vacuum Regulator ITV009m Series Linearity, Hysteresis Repeatability With 50% of signal input Return –0.5 –0.5 –1 –1 Input signal [% F.S.] Count Pressure Characteristics Flow Rate Characteristics Set pressure: –10 kPa –10 kPa –20 kPa –20 –40 kPa –40 –60 kPa –60...
  • Page 44 ITV009m Series Dimensions For single unit L-bracket Flat bracket (Option) (Option) M8 x 1 Cable connection thread Breathing hole ∗ (M3 x 0.5) VACz OUT port VAC port OUTx (ø4, ø5/32") ATMc (ø4, ø5/32") ATM port (ø4, ø5/32") L-bracket Flat bracket (Option) (Option) Port Location...
  • Page 45 ITV009m Series Compact Vacuum Regulator Dimensions Single unit for manifold M8 x 1 Cable connection thread Breathing hole ∗ (M3 x 0.5) OUTx port (ø4, ø5/32") Bushing assembly *1 When using under the conditions equivalent to IP65, connect the fit- tings or tube to the breathing hole before use.
  • Page 46 ITV009m Series Dimensions Manifold 4 x M3 x 0.5 thread depth 3.5 Mounting hole Port Location ITV009m * Stations are counted starting from the D side. 5.25 12.5 (Pitch) (Pitch) D side U side 2 ····stations 3 (8) VACz port Dimension for the inch size is noted in parentheses.
  • Page 47 Electronic Vacuum Regulator ITV2090/2091 Series ® RoHS How to Order ITV 209 0 Pressure range Pressure display unit –1.3 to –80 kPa * For the communication models CC, DE, PR, and RC, only “Nil” is Power supply voltage available as it does not have a pressure display.
  • Page 48 ITV2090 / 2091 Series Standard Specifications ITV2090 ITV2091 Model For the stepless control of Min. supply vacuum pressure Set pressure – 13.3 kPa vacuum pressure in propor- Max. supply vacuum pressure –101 kPa tion to electrical signals Set pressure range –1.3 to –80 kPa Voltage 24 VDC ±10%...
  • Page 49 ITV209m Series Electronic Vacuum Regulator Working Principle Working Principle Pressure When the input signal increases, the vacuum pressure solenoid display valve q turns ON, and the atmospheric pressure solenoid valve w turns OFF. Because of this, VAC. and the pilot chamber e are Power supply Output signal i Control...
  • Page 50 ITV209m Series Dimensions ITV209m * Do not attempt to rotate the cable connector, as it does not turn. Flat bracket Right angle type (4 cores) Straight type (4 cores) Cable connector 3 m Cable connector 3 m „50 M12 x 1 12.5 Cable connection thread (Plug type)
  • Page 51 ITV209m Series Electronic Vacuum Regulator Dimensions (16 points preset input, 10-bit digital input, CC-Link, DeviceNet™) 16 points preset input 10-bit digital input M12 x 1 M12 x 1 RP13A-12RB-13PA (71) made by Signal cable connection thread (Plug type) Power cable connection thread (Plug type) HIROSE ELECTRIC CO., LTD.
  • Page 52 ITV209m Series Dimensions (PROFIBUS DP, RS-232C, IO-Link) PROFIBUS DP: ITV2090-PR RS-232C: ITV2090-RC M12 x 1 M12 x 1 M12 x 1 M12 x 1 Communication cable connection thread (Socket type) Power cable connection thread (Plug type) Communication cable connection thread (Plug type) Power cable connection thread (Plug type) 10.5 11.5...
  • Page 53 ITV1000/2000/3000/209m Series Accessories (Option) Accessories (Option)/Part Nos. [Bracket] Description Part no. Weight Flat bracket assembly (including mounting screws) P398020-600 L-bracket assembly (including mounting screws) P398020-601 [Cable connector] Applicable model Description Part no. Weight Current type Straight type 3 m P398020-500-3 Voltage type Cable connector (4 cores) 4 points preset input...
  • Page 54 Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to the back cover for safety instructions. For F.R.L. units precautions, refer to the “Handling Precautions for SMC Products” and the “Operation Manual” on the SMC website: https://www.smcworld.com ITV0000/009m Series Precautions Air Supply Handling...
  • Page 55 Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions. For F.R.L. units precautions, refer to the “Handling Precautions for SMC Products” and the “Operation Manual” on the SMC website: https://www.smcworld.com ITV0000/009m Series Precautions Handling Return of Product...
  • Page 56 Series Specific Product Precautions 3 Be sure to read this before handling the products. Refer to the back cover for safety instructions. For F.R.L. units precautions, refer to the “Handling Precautions for SMC Products” and the “Operation Manual” on the SMC website: https://www.smcworld.com ITV1000/2000/3000/209m Series Precautions Piping Operating Environment...
  • Page 57 Series Specific Product Precautions 4 Be sure to read this before handling the products. Refer to the back cover for safety instructions. For F.R.L. units precautions, refer to the “Handling Precautions for SMC Products” and the “Operation Manual” on the SMC website: https://www.smcworld.com ITV1000/2000/3000/209m Series Precautions Handling Handling...
  • Page 58 Series Specific Product Precautions 5 Be sure to read this before handling the products. Refer to the back cover for safety instructions. For F.R.L. units precautions, refer to the “Handling Precautions for SMC Products” and the “Operation Manual” on the SMC website: https://www.smcworld.com ITV1000/2000/3000/209m Series Precautions Wiring Caution...
  • Page 59 Series Specific Product Precautions 6 Be sure to read this before handling the products. Refer to the back cover for safety instructions. For F.R.L. units precautions, refer to the “Handling Precautions for SMC Products” and the “Operation Manual” on the SMC website: https://www.smcworld.com ITV1000/2000/3000/209m Series Precautions Wiring CE Marking...
  • Page 60 Series Specific Product Precautions 7 Be sure to read this before handling the products. Refer to the back cover for safety instructions. For F.R.L. units precautions, refer to the “Handling Precautions for SMC Products” and the “Operation Manual” on the SMC website: https://www.smcworld.com ITV009m/209m Series Precautions Handling Handling...
  • Page 61 Revision History ∗ The ITV1000 series has been added. Edition D ∗ Number of pages has been increased from 16 to 20. ∗ The ITV0000 and 009m series have been added. Edition E ∗ The ITV209m series has been added. ∗...
  • Page 62 These safety instructions are intended to prevent hazardous situations and/or Safety Instructions equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.” They are all important notes for ∗1) safety and must be followed in addition to International Standards (ISO/IEC) and other safety regulations.

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