6.2
6.2.1
Option M【DI water (Pure water) piping】 .............................................................................. 6-2
6.3
6.3.1
Option T1【Inverter pump】 .................................................................................................... 6-2
6.4
6.4.1
Option Y【With feet and no Rack Mounting bracket】 ........................................................... 6-3
6.4.2
6.5
Option Z ................................................................................................................... 6-5
6.5.1
Option Z................................................................................................................................ 6-5
6.5.2
Option Z1.............................................................................................................................. 6-5
7.1
Alarm Notification ................................................................................................... 7-1
7.2
Alarm Buzzer Stop .................................................................................................. 7-3
7.3
Trouble shooting ..................................................................................................... 7-4
7.3.1
7.4
Other Errors ............................................................................................................. 7-6
8.1
8.2
8.2.1
Daily check ........................................................................................................................... 8-2
8.2.2
Monthly check ...................................................................................................................... 8-4
8.2.3
Inspection every 3 months ................................................................................................... 8-5
8.3
Stop for a Long Time ............................................................................................... 8-8
8.3.1
8.3.2
8.4
8.4.1
Replacing Particle Filters ...................................................................................................8-13
8.4.2
8.5
8.5.1
HRR010-A/W-10- .............................................................................................................8-16
8.5.2
HRR010-A/W-20- .............................................................................................................8-18
Documents ........................................................................ 9-1
9.1
Specifications .......................................................................................................... 9-1
9.1.1
HRR010-A-10/20- ............................................................................................................... 9-1
9.1.2
HRR010-W-10/20- .............................................................................................................. 9-3
9.1.3
9.1.4
9.2
Outline dimensions ................................................................................................. 9-6
9.2.1
HRR010-A-10/20- ............................................................................................................... 9-6
9.2.2
HRR010-W-10/20- .............................................................................................................. 9-7
9.3
Flow Chart ................................................................................................................ 9-8
9.3.1
HRR010-A-10/20- ............................................................................................................... 9-8
9.3.2
HRR010-W-10/20- .............................................................................................................. 9-8
HRR Series
HRX-OM-X084
Contents