Table Of Contents - MKS Spectra-Physics HighQ-2 Pre-Installation Manual

Table of Contents

Introduction ........................................................................................................................ 3
When the system Arrives ................................................................................................... 4
Inspection ........................................................................................................... 4
Review Instruction Manuals ................................................................................ 4
Laser Safety Considerations ............................................................................... 4
Diagnostics ......................................................................................................... 4
Pre-Installation Considerations .......................................................................................... 5
Location and Environment ................................................................................... 5
Physical Description ............................................................................................. 6
Utility Requirements ........................................................................................................... 7
Computer Requirements ..................................................................................... 8
Pre-Installation Checklist .................................................................................................... 9
Physical Locations: ............................................................................................. 9
Maintenance Agreement ................................................................................................. 10
Nalco Mixture .................................................................................................... 10
Filters ............................................................................................................................... 10
Chiller Fluid ....................................................................................................... 11
General Procedures .......................................................................................... 11
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