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Summary of Contents for MKS Baratron 622D
- Page 1 20054392-001 Rev A 11/21 ® MKS Baratron Type 622D/626D Absolute Pressure Transducers 623H Absolute Pressure Transducer with Trippoint Relays...
- Page 2 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
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Page 3: Table Of Contents
Table of Contents Table of Contents Pressure Transducer Safety Information ..................1 Symbols Used in This Instruction Manual ..............1 Symbols Found on the Unit .................... 2 Safety Procedures and Precautions ................. 3 Sicherheitshinweise für den Druckmeßumformer ............... 5 In dieser Betriebsanleitung vorkommende Symbole ............5 Erklärung der am Gerät angebrachten Symbole ............. - Page 4 General ..........................46 Zero Adjustment ......................46 Troubleshooting Chart ....................47 Appendix A: Product Specifications ..................49 MKS Types 622D and 626D Units ................. 49 Type 623H Transducer ....................50 Appendix B: Model Code Explanation ..................51 Model Code ........................51...
- Page 5 List of Figures and Tables List of Figures and Tables Figures Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable....22 Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable....22 Figure 3: Metal Single and Double Ferrule Compression-type Vacuum Fittings ...... 24 Figure 4: Location of the Zero Pot on Transducer Endcaps ............
- Page 6 List of Figures and Tables...
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Page 7: Pressure Transducer Safety Information
Pressure Transducer Safety Information Symbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. -
Page 8: Symbols Found On The Unit
Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit r c h s s i s Table 1: Definition of Symbols Found on the Unit... -
Page 9: Safety Procedures And Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. - Page 10 Safety Procedures and Precautions Pressure Transducer Safety Information OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise.
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Page 11: Sicherheitshinweise Für Den Druckmeßumformer
Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. -
Page 12: Erklärung Der Am Gerät Angebrachten Symbole
Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß... -
Page 13: Sicherheitsvorschriften Und Vorsichtsmaßnahmen
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben. - Page 14 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Druckmeßumformer Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
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Page 15: Informations Relatives À La Sécurité Pour Le Transducteur De Pression
Informations relatives à la sécurité pour le Symboles utilisés dans ce manuel d'utilisation transducteur de pression Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. -
Page 16: Symboles Apparaissant Sur L'unité
Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le transducteur de pression Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) -
Page 17: Mesures De Sécurité Et Précautions
Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité. - Page 18 Mesures de sécurité et précautions Informations relatives à la sécurité pour le transducteur de pression EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux spécifications de l'unité pour la pression maximum admissible). INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ...
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Page 19: Medidas De Seguridad Del Transductor De Presión
Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. -
Page 20: Símbolos Hallados En La Unidad
Símbolos hallados en la unidad Medidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra... -
Page 21: Procedimientos Y Precauciones De Seguridad
No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento. - Page 22 Procedimientos y precauciones de seguridad Medidas de seguridad del transductor de presión Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
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Page 23: Chapter One: General Information
® The MKS Baratron Types 622B, and 626D Absolute Pressure Transducers are part of the MKS family of general purpose pressure transducers designed to provide accurate, reliable, and repeatable pressure measurements in the range from 1000 Torr to as low as 0.10 Torr F.S. (626D only). -
Page 24: How This Manual Is Organized
MKS Calibration and Service Center before shipping. The RMA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. -
Page 25: Chapter Two: Installation
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an RMA (Return Material Authorization) Number from the MKS Service Center before shipping. -
Page 26: Interface Cables
RCB2000S-1-M1 RCB127S-1-10 Table 5: Interface Cables For cables connecting to non-MKS products, MKS can provide normal shielding or braided shielded cable assemblies in a nominal 10’ (3m) length, terminating in flying leads (pigtail) fashion at both ends. Braided shielded cable assemblies are recommended if the environment contains high EMI/RFI noise. -
Page 27: Generic Shielded Cable Guidelines
Chapter Two: Installation Interface Cables Generic Shielded Cable Guidelines Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2. -
Page 28: Figure 1: Preferred Method To Connect An Overall Metal Braided Shielded Cable
Interface Cables Chapter Two: Installation Example 1: Preferred Method To Connect Cable (shown on a transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary) -
Page 29: Product Location And Requirements
If the switch is located in an enclosed environment or where air flow is limited or impeded in any way please consult your local MKS office for additional guidance. For additional product requirements refer to Appendix A: Product Specifications, page 49. -
Page 30: Fittings
(female) • 1.33 inch (33.8 mm) O.D. CF MKS does not warranty the 622B, 623H, or 626D transducers when Caution single or double metal ferrule compression-type vacuum fittings (shown in Figure 3, page 24) are used because damage will occur to the transducer when improper tightening procedures are followed. -
Page 31: Setup
(or reset) by adjusting the zero potentiometer located on the top cover of the transducer or at the front panel of any MKS Power Supply/Readout which is being used. The unit must be fully stabilized before you change the zero adjustment. Stabilization is accomplished by allowing the unit to warm up for approximately 15 minutes. -
Page 32: Coarse Zero Adjustment
Some ranges of the 600 Series transducers provide additional zero range capability through the coarse zero adjustment feature. Please contact MKS applications for specific ranges and help on making this adjustment. The zero potentiometer provides ample control under normal conditions. -
Page 33: Figure 5: Location Of The Coarse Zero Adjustment Control
Chapter Two: Installation Setup Use the coarse zero adjustment only if the zero potentiometer fails to Note provide sufficient adjustment. The COARSE ZERO control is accessible through the side of the instrument, as shown in Figure 5. ZERO SIGNAL Type 62X Sig Output Pressure Pwr Com... -
Page 34: Dimensions
Setup Chapter Two: Installation Dimensions All dimensions are listed in inches with millimeters referenced in Note parentheses. -
Page 35: Figure 6: Dimensions Of The Types 622B, 623H, And 626D Transducers
Chapter Two: Installation Setup Figure 6: Dimensions of the Types 622B, 623H, and 626D Transducers... -
Page 36: Electrical Information
Electrical Information Chapter Two: Installation Electrical Information The Types 622B, 623H, and 626D transducers require an external power source capable of supplying the voltages stated in Table 7. Noise and ripple should be less than 20 mV p-p. You may use any readout device which has input capabilities of less than 0 to greater than 10 VDC, and impedance greater than 10K ohms. -
Page 37: Table 8: Post Assignments Of Type 622D Transducer
Chapter Two: Installation Electrical Information The 622D unit has a 5-pin terminal block connector, whose post assignments are listed in Table 8. The 626D uses a 15-pin Type “D” connector; its pinouts are shown in Table 9. The 623H transducer uses two (2) terminal blocks: a 5-post block known as TB1, and an 8-post block designated as TB2. -
Page 38: Table 9: Pinout Of Type 626D Transducer
Electrical Information Chapter Two: Installation Pinout of Type 626D Transducer Pin Number Assignment No connection Signal Output No connection No connection Power Common - 15 VDC + 15 VDC No connection No connection No connection No connection Signal Common No connection No connection Chassis Ground Table 9: Pinout of Type 626D Transducer... -
Page 39: Table 10: Post Assignments Of Type 623H Transducer, Tb1
Chapter Two: Installation Electrical Information Terminal Block 1 (TB1) Pinout (Type 623H only) Pin Number Signal Power Common Signal Common Signal Output - 15 VDC + 15 VDC Chassis Ground is made by using the screw labeled CHASSIS Table 10: Post Assignments of Type 623H Transducer, TB1 Terminal Block 2 (TB2) Pinout (Type 623H only) Pin Number Signal... -
Page 41: Chapter Three: Overview
DC voltage output: a sensor, signal conditioner, and power supply. An analog or digital meter is required to display the DC output in pressure units. MKS Types 622B, 623H, and 626D transducers contain two of the above components: the sensor and signal conditioner. An MKS or MKS-compatible power supply is required to complete the pressure to DC voltage output conversion, and an MKS or MKS-compatible display unit is required for direct pressure readout. -
Page 42: Chapter Four: Operation
General Chapter Four: Operation Chapter Four: Operation General After installation and during periodic maintenance, check the transducer zero to verify proper output. If the output is incorrect, set the output by adjusting the zero potentiometer (refer to Checking the Transducer Zero, page 25, for zeroing instructions). The transducer should be powered and allowed to warm up before use. -
Page 43: Type 623H End Cap
Chapter Four: Operation Type 623H End Cap Type 623H End Cap Figure 8 shows the endcap of a Type 623H instrument. Trip Point A Indicator LED Trip Point B Indicator LED Zero Potentiometer Zero G<<R G<<R Trip pt. A Trip pt. B Trip Point B TYPE 624 Adjustment Screw... -
Page 44: Figure 9: How Hysteresis Affects Accuracy And Relay Chatter
Hysteresis of Type 623H Trip Relays Chapter Four: Operation The noise in a system can cause the pressure signal to vary back and forth across an alarm trip point, causing the relay to repeatedly change state. This condition is known as relay chatter. By incorporating hysteresis in the control loop, relay chatter can be eliminated. -
Page 45: How To Set The Trip Points On Type 623H
Atomic Layer Deposition, please consult your local office for advice on more appropriate available MKS solutions. Refer to Hysteresis, page 37, and How To Adjust the Trip Point Hysteresis, page 44, for more... -
Page 46: How To Adjust The Trip Point Direction
How To Adjust the Trip Point Direction Chapter Four: Operation How To Adjust the Trip Point Direction The trip point direction defines the direction of pressure change that will energize the trip point. The trip point direction for the Type 623H transducer is initially set “low”; the trip points are energized as the pressure falls below the specified trip point level. -
Page 47: Figure 11: The Relay Board
Chapter Four: Operation How To Adjust the Trip Point Direction J12, J13, J14, and J16 have pins num be re d as s how n he re . Trip Point A Trip Point B J10 Trip Point B hysteresis J11 Trip Point A hysteresis J10 and J11 have pins num be re d as s how n he re . -
Page 48: Figure 12: The Alternate Relay Board
How To Adjust the Trip Point Direction Chapter Four: Operation J12, J13, J14, and J16 have pins num bered as s how n here. Trip Point A Trip Point B J10 and J11 have pins num bered as s how n here. J10 Trip Point B hysteresis J11 Trip Point A hysteresis Figure 12: The Alternate Relay Board... -
Page 49: Table 13: Factory-Set Positions Of The Shorting Jumpers
Chapter Four: Operation How To Adjust the Trip Point Direction 5. Move the shorting jumpers on jumpers J13 and J16 to change the configuration of Trip Point A, and move the shorting jumpers on jumpers J12 and J15 to change the configuration of Trip Point B. -
Page 50: How To Adjust The Trip Point Hysteresis On Type 623H
How To Adjust the Trip Point Hysteresis on Type Chapter Four: Operation 623H How To Adjust the Trip Point Hysteresis on Type 623H Hysteresis is built into the operation of the two alarm relays on the Type 623H to help compensate for the noise inherent in all systems. - Page 51 Chapter Four: Operation How To Adjust the Trip Point Hysteresis on Type 623H 6. Replace the graphics panel. 7. Replace the two screws on each side of TB1. 8. Replace the ring on the endcap and push down while turning it about ¼ turn clockwise. 9.
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Page 52: Chapter Five: Maintenance And Troubleshooting
Any damage should be reported to the carrier and MKS Instruments immediately. If there is no obvious damage and the continuity is correct, obtain an RMA (Return Material Authorization) number before returning the unit to MKS Instruments for service. -
Page 53: Troubleshooting Chart
(transducer to electronics Inspect cable and transducer. module). Replace if necessary. Measurement slowly goes Overpressure and/or a build- Return to MKS for servicing positive over time up of contamination in the P or transducer replacement. cavity. Unstable zero output The ambient temperature may Refer to Appendix A: be too high. -
Page 55: Appendix A: Product Specifications
Appendix A: Product Specifications MKS Types 622D and 626D Units Appendix A: Product Specifications MKS Types 622D and 626D Units Accuracy (includes non-linearity, 0.25% of Reading standard for ranges of 1 to 1000 Torr, hysteresis and non-repeatability) with option for 0.15% of reading . -
Page 56: Type 623H Transducer
Type 623H Transducer Appendix A: Product Specifications Type 623H Transducer Accuracy (including non-linearity, ± 0.25% of Reading hysteresis, and non-repeatability) Optional: 0.15% of Reading Ambient operating temperature range 0° to 50° C (32° to 122° F) Sensor operating temperature is ambient CE Compliance EMC Directive 2004/108/EC RoHS (Restriction of Hazardous... -
Page 57: Appendix B: Model Code Explanation
Appendix B: Model Code Explanation Model Code Appendix B: Model Code Explanation Model Code The options of your unit are identified in the model code. The model code is identified as follows: 62XBXXXYYZ where: Type 62XB Type Number Full Scale Range Fittings Accuracy Type Number (62XB) - Page 58 Model Code Appendix B: Model Code Explanation Full Scale Range (XXX) The full scale range is indicated by a three character code. Full Scale Range Ordering Code 0.1* 0.25* 1000 *Available on 626D models only **Available on 622D and 626D models only Fittings (Y) The choice of fittings is designated by a single letter code.
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Page 59: Index
Index Accuracy, 17, 52 lowest for control, 34 Cabling, 20–22 lowest for reading, 34 CE UKCA compliance, 20, 47 Returning the product, 18, 19, 44 Coarse Zero adjustment, 26–27 RoHS (Restriction of Hazardous Substances), 17, 47, 48 Companion products, 19 Safety information, 1–16 Connectors, 30 Sensor, 33...
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