Related Manuals for MKS Spectra Vision 2000-P
Summary of Contents for MKS Spectra Vision 2000-P
- Page 1 Vision 2000-P Manual SP102006.103 March 2013 MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013...
- Page 2 Or to find a local agent, please visit: http://www.mksinst.com/service/servicehome.aspx MKS Products provided subject to the US Export Regulations. Diversion or transfer contrary to U.S. law is prohibited. Windows is a registered trademark of the Microsoft Corporation and is fully recognised.
- Page 3 MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013...
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Page 4: Additional Installation Maintenance And Operating Instructions
EQUIPMENT Maintenance functions must only be carried out by competent persons. During the warranty period, faulty equipment must be returned to MKS Instruments UK Ltd., unless special arrangements are made. There are no user replaceable parts in the electronic equipment. Certain components are EMC and safety critical and must not be substituted. -
Page 5: Table Of Contents
Mass spec maintenance ................... 28 Removing the analyser ..................28 Re-fitting the analyser ..................28 Returning Your Equipment ..................29 Support Contact Numbers ................29 Health and safety clearance form ..............29 MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 6: Health & Safety
Instructions in CAUTION and WARNING boxes MUST be observed. MKS Instruments accepts no liability for any injury or damage resulting from a failure to observe instructions in CAUTION or WARNING boxes. -
Page 7: Warning Symbols
On the rear panel of the Microvision2 there are no hazardous voltages on any of the ports (electrical connectors). Connections must not be made that may place hazardous voltages or currents on these ports. MKS Instruments must be consulted before any non-MKS Instruments cables or accessories are connected to these ports. Consult the relevant manual for detailed descriptions of these connectors. -
Page 8: Installation
If there has been obvious damage during shipment or if there are items listed on the packing slip as shipped which have not arrived, immediately contact your local MKS Spectra facility or sales/service representative. Carefully unpack the various parts of your Vision 2000-P system. Again, check for any signs of damage. -
Page 9: Dimensions
Dimensions 562mm 225mm 290mm 179mm MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 10: System Components
System Components Item Ref Description RGA Chamber Chamber Mounting Flange Isolation Valve System Interface Module (LM108) Turbo Molecular Pump Foreline Port MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 11: Vacuum System Installation
Changing the orifice is detailed later in this manual but it is important to consult your local MKS Spectra facility before making any changes. Warning, exposed metal surfaces reach high temperatures during bake-out. Allow an adequate... -
Page 12: Main Chamber Installation
The last 3mm (1/8”) is important. When correctly fitted the front face of the RF/analyser connector should butt up against the analyser flange. Finally, pinch up the cap head bolt on the locking ring to secure the Microvision 2 in place. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 13: Electrical Installation
There is a single mains power connection to the Vision 2000-P which is made to the RVC2. Connect the mains power cable to a suitable single-phase supply: See the RVC2 User Manual for specifications MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 14: Rcv Connections
Backing pump power connection IEC Mains Connector Local mains supply (see Specifications) Interface Module Connections System Box Destination / Notes System 1 VacOK Connection System 2 System 3 Diagnostics Not used MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 15: Connecting To The Process Tool (Vacok)
OK. PC Connection Vision 2000-P systems are used in conjunction with MKS Instruments Process Eye Professional software running on a PC. If a PC has been supplied as part of the system, the software will have been installed onto the hard drive and will have been fully tested as part of the complete system. -
Page 16: Operation
Before a process sampling valve can be opened, the corresponding “VacOK” signal from the tool must be met. A process valve can be opened either manually or automatically from the Process Eye Professional software interface to the RVC2. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 17: Start Up
Once you have established that the process valve is working correctly, close the valve. Minimizing exposure to corrosive process gases when not actively monitoring them will protect RGA system operating life. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 18: Leak Checking
Remember you may need to break the seal between the Vision 2000-P and the process chamber in which case you will also have to shut down the process chamber. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 19: Heating And Baking
If you switch the system off it will vent to atmosphere introducing water vapour and you will have to bake again. Venting to clean dry nitrogen or argon is strongly recommended. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 20: System Shut Down Procedure
Switch off the turbo pump from the RVC2 Window within Process Eye Professional, or by pressing the PUMPS switch on the RVC2. Switch off the RVC2. Allow the turbopump to come to a complete stop MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 21: Maintenance
To re-fit simply follow the removal procedure in reverse. Take care to ensure the ceramic socket mates correctly with the gas inlet tube on the PVD source. Once the Vision 2000-P system is re-assembled it must be leak checked before re-fitting the heater jacket. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 22: Replacing The Orifice
Orifice disk insertion and removal tools are supplied as part of the V2000P toolkit. Do not attempt to remove or insert an orifice disk without using these tools. If they are missing from your toolkit, please contact your local MKS Spectra facility for replacements. Clean each tool before use using IPA. -
Page 23: Fitting The Tool Guide
Insert the Removal Tool into the guide and push the tool into the orifice disk. Press firmly until the tool bottoms against the guide. Remove the tool and Tool Guide and remove the Orifice Disk from the flange. DO NOT RE-USE THE ORIFICE DISK MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 24: Fitting A New Orifice Disk
Fitting a new Orifice Disk Ensure you have purchased the correct size orifice disk for your application, advice on the size and part number can be sought via your local MKS office. Keep the disk in its original packaging until needed. -
Page 25: Re-Assembling The Inlet Flange
Clean all handled parts with a suitable solvent and re-fit the Inlet Flange to the chamber using a new copper gasket, by firstly sliding the bypass connection through the oven wall and then carefully locating the Ceramic Coupling over the PVD ion-source of the quadrupole. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... - Page 26 Remove the old disk and replace with the new part, refit the holder to the inlet flange and retighten the VCR fitting. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013...
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Page 27: Vision 2000-P Electronics
PVD ion source. No damage will be caused to the analyser or the electronics if a replacement standard RGA control unit is fitted but the performance will be dramatically reduced. This is of particularly relevance to customers who operate more than one MKS RGA. Diaphragm pump maintenance Unlike rotary pumps diaphragm pumps are free from routine maintenance. -
Page 28: Mass Spec Maintenance
Bolt the flanges together remembering to tighten opposite bolts equally. Re-fit the Microvision 2. Detailed views and information on the analyser can be found in the Microvision2 user manual. MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013... -
Page 29: Returning Your Equipment
If you wish to return your instrument for service, please follow these simple guidelines: Contact your local MKS service facility to obtain a Returns Material Authorisation (RMA) number. We will require some instrument details, such as the serial numbers, date of purchase and a fault description. - Page 30 Customer Return To Address (if different from above): Company Department Address City Zip/Postal Code User’s Name: Phone No.: Equipment Shipped Item 1: Serial No.: Item 2: Serial No.: Item 3: Serial No.: MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013...
- Page 31 1. The equipment has been securely packaged and labelled. 2. The carrier has been informed of the hazardous nature of the consignment. Signed: Title: Date: Phone No.: MKS Instruments UK Ltd V2000-P Hardware Manual – SP102006.103 March 2013...
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