Ultra Optics MR3 Standard Operating Procedure page 20

Coating machine
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Preventive Maintenance
Monthly & Annually
Every 6-8 weeks, replace the UOC filters in
the coating system and clean water bucket.
ELECTRICAL HAZARD
UNPLUG & DISCHARGE CAPACITORS BEFORE TESTING
Contact UOC tech support for proper procedures & tolerances
Every month, check the 16uf and 4uf
Capacitors
Hepa Filter:
Remove from the fan assembly and inspect
the Hepa Filter. Replace as needed.
DO NOT exceed 2 years
18

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