Ultra Optics MR3 Standard Operating Procedure page 19

Preventive Maintenance
Weekly
Check vacuum pressure using the VACUUM
DIAGNOSTIC screen or using the Convum
Gauge.
**If a spindle reads below 13 with a lens chucked,
**
Contact UOC Tech Support for assistance
Inspect entire vacuum chuck assembly for
any dry coating or debris. Clean as needed.
Turn main machine air off:
Visually check the Air Dryer Filter Pack by
unscrewing the filter from the canister and
feel the inside of filter for moisture.
If any moisture is found replace all three
filters.
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