Related Manuals for Inficon Stripe CDG045Dhs
Summary of Contents for Inficon Stripe CDG045Dhs
- Page 1 Capacitance Diaphragm Gauge Stripe™ CDG045Dhs Operating Manual Incl. EU Declaration of Conformity tina84e1-a (2019-07)
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Page 2: Product Identification
For convenient refer- ence copy that information into the space provided below. Model: Validity This document applies to products of the Stripe CDG045Dhs series. Part numbers of standard products are indicated below. OEM products have other part numbers and different parameter settings (e.g. - Page 3 The part number (PN) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this document correspond to gauges with DN 16 ISO-KF vacuum connection. They apply to gauges with other vacuum connec- tions by analogy.
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Page 4: Intended Use
Intended Use The temperature compensated Capacitance Diaphragm Gauges of the Stripe CDG045Dhs series are intended for absolute pressure measurement of gases in their respective pressure ranges (→ 2). Ideally the measurement values can be read out digitally via EtherCAT interface or analog. The gauges can also be operated in connection with an INFICON Vacuum Gauge Controller (VGC series) or another appropriate controller. -
Page 5: Scope Of Delivery
Scope of Delivery 1× gauge Stripe CDG045Dhs 1× pin for adjusting settings via buttons 1× Calibration Test Report 1× Operating Manual German 1× Operating Manual English tina84e1-a (2019-07) -
Page 6: Table Of Contents
Contents Product Identification Validity Intended Use Functional Principle Trademarks Patents Scope of Delivery Safety Symbols Used Personnel Qualifications General Safety Instructions Liability and Warranty Technical Data Installation Vacuum Connection Power Connection 3.2.1 D-sub, 15-pin Connector 3.2.2 EtherCAT Connector 3.2.3 Mini USB Type B Connector (Diagnostic Port) Operation Status Indication Zeroing the Gauge... - Page 7 Returning the Product Disposal Further Information EU Declaration of Conformity For cross-references within this document, the symbol (→ XY) is used, for cross-references to further documents, listed under "Further Information", the symbol (→ [Z]). tina84e1-a (2019-07)
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Page 8: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice <…> Labeling Personnel Qualifications Skilled personnel... -
Page 9: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 10: Technical Data
Technical Data Measurement range → "Validity" Precision 0.01 … 0.05 F.S. 0.2% of reading Accuracy 0.1 … 1100 F.S. 0.15% of reading Temperature effect on zero 0.01 … 0.02 F.S. 0.0100% F.S./ °C 0.05 … 0.5 F.S. 0.0050% F.S./ °C 1 …... - Page 11 Identification Resistance R 13.2 kΩ referenced to sup- Ident ply common Voltage ≤5 V Remote Zero Adjust digital input for zero adjust- ment with external switching contact (→ 24) External switching contact 30 V (dc) / <5 mA (dc) Pulse >1 s …...
- Page 12 ±15 V (dc) Power consumption while being heated ≤14 W at operating temperature ≤9 W Fuse to be connected 1.25 AT The gauge is protected against reverse polarity of the supply voltage and overload. INFICON controllers fulfill this requirement. tina84e1-a (2019-07)
- Page 13 Electrical connection 15-pin D-sub, male Sensor cable 15-pin plus shielding Cable length Supply voltage 15 V ≤ 8 m (0.14 mm²/conductor) ≤15 m (0.25 mm²/conductor) Supply voltage 24 V ≤43 m (0.14 mm²/conductor) ≤75 m (0.25 mm²/conductor) Supply voltage 30 V ≤88 m (0.14 mm²/conductor) ≤135 m (0.25 mm²/conductor) For longer cables, larger conductor cross-sections are required...
- Page 14 Dimensions [mm] ø85 ø82 ½¨ tube DN 16 ISO-KF DN 16 CF-R 8VCR female Weight 837 … 897 g tina84e1-a (2019-07)
- Page 15 Analog Measurement Signal vs. Pressure Pressure p 1.1×F.S. 1.0×F.S. 0.9×F.S. 0.8×F.S. 0.7×F.S. 0.6×F.S. 0.5×F.S. 0.4×F.S. 0.3×F.S. 0.2×F.S. 0.1×F.S. 0.0×F.S. Measurement U p = (U / 10 V) × p (F.S.) Conversion Torr ↔ Pascal Torr mbar 1013.25 / 760 = 101325 / 760 = 1.00 1.3332…...
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Page 16: Installation
Installation WARNING Fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. Vacuum Connection DANGER Overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. - Page 17 DANGER Protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 18 Mounting orientation standing upright or horizontal acc. to the 0.01 … 0.05 F.S. "Calibration Test Report" standing upright to 0.1 … 1100 F.S. horizontal If adjustment should be possible after the gauge has been in- stalled, be sure to install it so that the buttons can be accessed with a pin.
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Page 19: Power Connection
• Connect the supply common with protective ground directly at the power. • Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤18 V (overvoltage protection). INFICON controllers fulfill this requirement. tina84e1-a (2019-07) -
Page 20: D-Sub, 15-Pin Connector
3.2.1 D-sub, 15-pin Connector If no sensor cable is available, make one according to the following diagram (cable length and conductor cross-sections → 13). Status Remote Zero Adjust Ident 10 Ω 14…30 V case Electrical connection Pin 1, 4 Relay SP1, closing contact Pin 2 Signal output (measuring... -
Page 21: Ethercat Connector
3.2.2 EtherCAT Connector EtherCAT is a communications interface. It is powered via the sensor cable. If no EtherCAT cables are available, make them according to the following diagram. Connect the EtherCAT cables. FCC68, 8-pin, soldering side Pin 1 Transmission data + Pin 2 Transmission data - Pin 3... -
Page 22: Mini Usb Type B Connector (Diagnostic Port)
3.2.3 Mini USB Type B Connector (Diagnostic Port) A standard USB cable can be used. If no cable is available, make one according to the following diagram. Connect the cable. Mini USB typ B, soldering side Pin 1 VBUS (5 V) Pin 2 Pin 3 Pin 4... -
Page 23: Operation
Operation Put the gauge into operation. If you are using an INFICON con- troller, define the measurement range ( [1], [2], [3]). → A warm-up time of at least ½ hour should be allowed; for precise pressure measurements a warm-up time of at least 2 hours is required. -
Page 24: Zeroing The Gauge
Zeroing the Gauge The gauge is factory calibrated while "standing upright" or in horizontal position (→ "Calibration Test Report"). Perform a zero adjustment, when the gauge is operated for the first time. Due to long time operation or contamination, a zero drift could occur and zero adjustment may become necessary. - Page 25 • the digital input "Remote Zero": Apply the supply voltage to pin 10 (pulse → 11), • an INFICON Vacuum Gauge Controller (VGC series). While the gauge is being heated and/or under atmos- pheric pressure, the zeroing function is locked in order for operating errors to be prevented.
- Page 26 Briefly press the <ZERO> button with a pin (max. ø1.1 mm). or … Press the button briefly max. ø1.1 mm … apply supply voltage to Remote Zero at pin 10 (pulse → 11). The zero adjustment runs automatically. The <STATUS> indicator flashes until the adjustment (duration ≈8 s) is completed.
- Page 27 It also permits to adjust an offset of the characteristic curve in order to • compensate for the offset of the measuring system or • obtain a slightly positive zero for a 0 … 10 V AD converter. The offset should not exceed 5% of the F.S. (+500 mV). At a higher positive offset, the upper limit of the measurement range is exceeded.
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Page 28: Switching Functions Sp1, Sp2, Atm, Status
• Change of direction (inverse ramp): Release the button. Press and keep it depressed again within 3 … 5 s (the flashing frequency of the <STATUS> indicator changes briefly). • Fine adjustment: Release the button. Briefly press it again within 0 … 3 s. The zero adjustment value chang- es by one unit. - Page 29 Low Trip Point (default) If the pressure in the vacuum system is lower than the setpoint, the corresponding LED (<SP1> or <SP2>) is lit solid and the corresponding switching contact is closed. Measurement signal (pressure p) Reset value Hysteresis Setpoint (1% F.S.) Threshold value Time t...
- Page 30 4.3.1 Adjusting the Vacuum Pressure Setpoints (SP1 & SP2) The two setpoints can be set to any pressure within the meas- urement range of the gauge. The thresholds of the setpoints SP1 & SP2 can be adjusted via • the buttons on the gauge •...
- Page 31 Press the button max. ø1.1 mm For changing the threshold value, push the <ZERO> button and keep it depressed. The threshold keeps changing from the current value (ramp) until the button is released or until the limit of the setting range is reached. Keep the button depressed max.
- Page 32 If the <ZERO> button is released for more than 5 s, the gauge returns the measurement mode. The factory setting of the reset value is 1% F.S. above the Low Trip Point and 1% F.S. below the High Trip Point (hysteresis). If after programming of the hysteresis the button <SP>...
- Page 33 Example: Setpoint of the High Trip Point with threshold 110% of the atmospheric pressure (= factor 1.1) Hysteresis: 1% Measurement signal (pressure p) ATM setpoint 110% (= factor 1.1) Threshold value 1078 mbar Hysteresis (1% F.S.) Reset value Atmospheric pres/ 980 mbar sure (ambience) The current programmed ATM threshold setting...
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Page 34: Activating The Factory Setting (Factory Reset)
Switching characteristics of the setpoints → 28. Diagnostic port → [4]. 4.3.3 Programming Gauge Status The vacuum pressure setpoints SP1 & SP2 can be programmed to gauge status via the diagnostic port (→ [4]) or the EtherCAT interface (→ [5], [6]). The status of the gauge is output as a digital signal. -
Page 35: Diagnostic Port (Usb Interface)
(→ [4]). A standard USB cable type A/mini B can be used. Required software: T-Gauge. Please contact your local INFICON service center. Mini USB type B... - Page 36 For operating the gauge via EtherCAT, prior installation of the device specific ESI file is required on the bus master side. This file can be downloaded from our website (www.inficon.com). Explicit Device Address Setting (default During device initialization, the device address switches are read by the device firmware.
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Page 37: Deinstallation
Deinstallation WARNING Fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER Contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. - Page 38 Caution Dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Vent the vacuum system. Put the gauge out of operation. ...
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Page 39: Maintenance, Repair
We recommend checking the zero at regular intervals (→ 24). INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. Returning the Product... - Page 40 Disposal DANGER Contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. WARNING Substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimen- tal to the environment.
- Page 41 Further Information Operating Manual Single-Channel Controller VGC401 tinb01e1 INFICON AG, LI–9496 Balzers, Liechtenstein Operating Manual Two- & Three-Channel Measurement and Control Unit VGC402, VGC403 tinb07e1 INFICON AG, LI–9496 Balzers, Liechtenstein Operating Manual One-, Two- & Three-Channel Measurement and Control...
- Page 42 [10] ETG.5003.2080 S (R) V1.3.0: Semiconductor Device profile – Part 2080: Specific Device Profile (SDP): Vacuum Pressure Gauge tina84e1-a (2019-07)
- Page 43 EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the following directives: • 2014/30/EU, OJ L 96/79, 29.3.2014 (EMC Directive; Directive relating to electromagnetic compatibility) • 2011/65/EU, OJ L 174/88, 1.7.2011 (RoHS Directive;...
- Page 44 LI–9496 Balzers Liechtenstein +423 / 388 3111 Fax +423 / 388 3700 reachus@inficon.com Original: German tina84d1-a (2019-07) t i na84e1-a www.inficon.com...