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When applying a refrigerator to a cryocooler for optical sensors, the
cryocooler falls under row 6.A.2.d.2 of the control list established by
The Wassenaar Arrangement, which is equal to row 10(2) of
appended table 1 of Japan's Export Trade Control Order.
Customers must follow all related rules and regulations such as
Foreign Exchange and Foreign Trade Act and take appropriate
procedures when exporting or re-exporting our refrigerators.
D/N. ME30007E, 2019MY03
4K CRYOCOOLER
Instruction Manual
Export Control Policy
Original Instructions
ULVAC CRYOGENICS INCORPORATED
UHE10F
UHE12F
UHE15F
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Summary of Contents for Ulvac UHE10F
- Page 1 1 of Japan’s Export Trade Control Order. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting our refrigerators. Original Instructions D/N. ME30007E, 2019MY03 ULVAC CRYOGENICS INCORPORATED...
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
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Page 9: Table Of Contents
Prior to Startup ...................... 4-1 4.2. Mounting Samples (load) ..................4-1 4.3. Rough Pumping ....................4-1 4.4. Startup and Cooldown ................... 4-2 4.5. Normal Operation ....................4-2 4.6. Shutdown Procedures ................... 4-3 4.7. Handling of Hazardous Materials................4-4 ULVAC CRYOGENICS INCORPORATED... - Page 10 Scheduled and Unscheduled Maintenance ............6-1 6.2. Charging Helium Gas.................... 6-2 APPENDICES A. Troubleshooting ......................A-1 B. Flexible Hose ......................... B-1 C. Principles of Refrigerator Operation ................C-1 D. Dimensional Drawing ....................D-1 E. Self-Certification ......................E-1 SERVICE NETWORK ......................CS-1 ULVAC CRYOGENICS INCORPORATED...
- Page 11 Figures Figure 1-1 Typical Diagram of 4K Cryocooler System ..........1-2 Figure 3-1 Recommended Mounting Flange for UHE10F,UHE12F and UHE15F .. 3-1 Figure 3-2 Maintenance Space for UHE10F, UHE12F and UHE15F ...... 3-3 Figure 3-3 Connecting helium flexible hoses correctly ..........3-6 Figure 3-4 Flexible hoses connection order ............
- Page 12 Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 13: Safety Instructions
Cryocooler is suspended. (Refer to “5. Shutdown and warm up cryocooler after pumping flammable, explosive, or combustion enhancing gas.”) ULVAC CRYOGENICS INCORPORATED... - Page 14 The customers are requested to take appropriate safety measures for managing the cryocooler operation in a safe manner appropriate for the system hardware or processes. ULVAC CRYOGENICS INCORPORATED...
- Page 15 Carbon Monoxide 15.5 - 94 38 - 90 Ammonium 15 - 79 25.4 - 75 The high pressure gas safety institute of Japan; "Koatsu-gas Kogyo Gijyutu" (High pressure gas industrial technology) published by Kyoritsu Shuppan Co., Ltd. 1977 ULVAC CRYOGENICS INCORPORATED...
- Page 16 Oxygen is the gas that enhances combustion. Use the Cryocooler after confirming the safety precautions or measures when pumping the mixture of oxygen and flammable gas. In particular, the mixture of oxygen and hydrogen, which has a broad range of combustion/detonation, is extremely dangerous. ULVAC CRYOGENICS INCORPORATED...
- Page 17 3. Reconfirm the safety required if the process condition is changed, as it might increase ozone generation. When using oxygen as a process gas, appropriate safety precaution and measures must be taken with reference to “5. Stop and warm up Cryocooler after pumping flammable, explosive, or combustion enhancing gas”. ULVAC CRYOGENICS INCORPORATED...
- Page 18 3) Be sure to use metallic pipes for the roughing system and exhaust lines in order to prevent generation of static electricity. Ground the pipes with the grounding resistance of 100 Ω or less. ULVAC CRYOGENICS INCORPORATED...
- Page 19 If the cryocooler stops due to an abnormal event such as power or water supply failure or compressed air shutoff, pumped gas evaporates and fills the vacuum chamber as the temperature of the Cryocooler rises. The chamber filled with high concentration of flammable, explosive, or combustion enhancing gas may ULVAC CRYOGENICS INCORPORATED...
- Page 20 ☆If the cryocooler is used to pump corrosive gases, periodic pressure proof test is recommended. ☆ ULVAC CRYOGENICS INC. conducts the pressure proof test of cylinders by applying gas pressure of 1.5 times as high as the normal operating pressure.
- Page 21 4. When performing decontamination of helium circuit, follow the instructions described in “6.2 Charging Helium Gas” in this book. Ensure that the bolts are securely tightened. Loose bolts or bolts tighten under the regulation torque may cause severe injury or equipment damage. ULVAC CRYOGENICS INCORPORATED...
- Page 22 Some of the inner parts need replacement at regular intervals (see Section 6 Maintenance). All the maintenance work including these replacements of UHE series are to be conducted by Ulvac Cryogenics. Please contact our service engineering devision or nearest customer service center.
- Page 23 100 Ω or below). Install a ground-fault interrupter at power supply of the compressor unit. Use the UCI-supplied power cable. Do not connect other equipment to the same ground-fault interrupter for the Cryocooler system. ULVAC CRYOGENICS INCORPORATED S-11...
- Page 24 Safety Instructions This page intentionally left blank. S-12 ULVAC CRYOGENICS INCORPORATED...
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Page 25: Disposal Considerations
Contact your safety supervisor and follow the instructions to remove such toxic substances before disposing. We provide Safety Data Sheet (SDS) of our products upon your request. Please contact us if necessary. MZIW002E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1... - Page 26 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
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Page 27: Introduction
（*1） The performance of the Cryocooler may change depending on the installation direction. Note that the specification value of the refrigeration capacity of this 4K Cryocooler system is the value obtained when the cold head faces down (see Table 1-2). ULVAC CRYOGENICS INCORPORATED... - Page 28 (*1)Refer to “Compressor Unit Instruction Manual” for specifications of power supply. (*2) Refer to “Compressor Unit Instruction Manual” for cooling water requirements. No cooling water line in the air-cooling type compressor unit. Typical Diagram of 4K Cryocooler System Figure 1-1 ULVAC CRYOGENICS INCORPORATED...
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Page 29: Specifications
The refrigeration capacity of UHE12F shown in the above table is achieved with the flexible hose of 20A x 20m. The refrigeration capacity of UHE10F and UHE15F shown above is achieved when using 20A x 10mflexible hose. -
Page 30: Vacuum Chamber Specifications
Vacuum chamber which is made of stainless or nickel-plated iron. Specular finished-inner surface is recommended. Be sure that there is no leakage. Vacuum chamber should feature a pressure relief valve to vent gases trapped inside vacuum system in case that the inner pressure exceeds atmospheric pressure. ULVAC CRYOGENICS INCORPORATED... -
Page 31: Regulations Applicable (Cryocooler)
UL471：10 File No. SA44290 Machinery Directive(MD):2006/42/EC ・EN ISO 12100: 2010 ・EN 60204-1:2006+A1:2009 Electro Magnetic Compatibility Directive (EMC): 2014/30/EC ・EN 61000-6-4:2007+A1:2011 Self-certified ・EN 61000-6-2:2005 CE marking ・EN 61000-3-2:2014 ・EN 61000-3-3:2013 ・EN 60601-1-2:2015 ・EN 55011:2009+A1:2010 RoHS Directive:2011/65/EU ・EN 50581:2012 ULVAC CRYOGENICS INCORPORATED... - Page 32 Introduction This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 33: Inspection
Contents of accessories depend on the model of your compressor unit. Read the compressor unit instruction manual for the details. Table 2-2 Shipping List for 4K Cryocooler Package Package Item Quantity quantity 4K cryocooler This instruction manual ULVAC CRYOGENICS INCORPORATED... -
Page 34: First Inspection Of 4K Cryocooler
4K Cryocooler unit, and is moreover no missing parts. If you find any missing parts or damages of the product, please contact our Service Engineering Division or the nearest Customer Support Center. ULVAC CRYOGENICS INCORPORATED... -
Page 35: Installation
It is requested to attach a pressure relief valve that operates when the inner pressure is 10-20kPaG. The dimensions of the vacuum chamber flange to attach UHE10F, UHE12F and UHE15F are shown in Figure 3-1 for O-rings. 8-M4 Tap φ170 (equally spaced) - Page 36 The gauge should be able to measure 10 Pa. An ionization gauge is recommended. ◆Temperature sensor, Temperature indicator: For monitoring the temperature of the 4K Cryocooler. Make sure that the sensor or indicator meet the specifications. ULVAC CRYOGENICS INCORPORATED...
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Page 37: Mounting The 4K Cryocooler To The Vacuum Chamber
When installing the 4K Cryocooler, clear the space for performing maintenance work. Figure 3-4 shows necessary space. Ceiling, Floor, Wall… 真空槽 Vacuum Chamber 床、壁面など Floor, Wall… Floor, Wall… Figure 3-2 Maintenance Space for UHE10F, UHE12F and UHE15F ULVAC CRYOGENICS INCORPORATED... -
Page 38: Connecting Roughing Pump
・ Do not connect or disconnect self-sealing coupling frequently. It may cause gas leakage. If there is a leakage, you may have to replace it with a new one according to the situation of the occurrence of Leakage. ULVAC CRYOGENICS INCORPORATED... -
Page 39: Connecting Remote Wiring
Connect the Cold head drive cable from the compressor unit to the 4K Cryocooler. Connect the ground. Connect the input drive cable from the compressor unit to its power source. Refer to the compressor unit instruction manual for how to start up the compressor unit. ULVAC CRYOGENICS INCORPORATED... -
Page 40: Figure 3-3 Connecting Helium Flexible Hoses Correctly
Connect RETURN and SUPPLY flexible hoses to the correct connectors. Wrong Correct Compressor Unit Compressor Unit RETURN RETURN SUPPLY SUPPLY Flexible Hose Flexible Hose RETURN SUPPLY RETURN SUPPLY Cryocooler Cryocooler unit unit Figure 3-3 Connecting helium flexible hoses correctly ULVAC CRYOGENICS INCORPORATED... -
Page 41: Figure 3-4 Flexible Hoses Connection Order
4K Cryocooler Instruction Manual Connect flexible hoses in the correct order. Figure 3-4 Flexible hoses connection order ULVAC CRYOGENICS INCORPORATED... -
Page 42: Figure 3-5 Using Two Spanners To Connect / Disconnect Flexible Hoses
Installation Use two spanners to connect the flexible hoses to the connectors. Figure 3-5 Using two spanners to connect / disconnect flexible hoses ULVAC CRYOGENICS INCORPORATED... -
Page 43: Operation
3. After the roughing pump completed, close the roughing valves and turn off the roughing pump. (When a large volume of outgas is emitted from the vacuum chamber, start up the 4K Cryocooler while evacuating the vacuum chamber by the high-vacuum pump.) ULVAC CRYOGENICS INCORPORATED... -
Page 44: Startup And Cooldown
The 4K Cryocooler can be operated without operator attendance. Record the operating logs during normal operation on a regular basis. In regard to the operating pressure of the compressor unit, refer to the corresponding compressor instruction manual. ULVAC CRYOGENICS INCORPORATED... -
Page 45: Shutdown Procedures
-40℃ or below or argon. Toxic or corrosive gases must be appropriately detoxified or made inert before they are exhausted outdoors. ULVAC CRYOGENICS INCORPORATED... -
Page 46: Handling Of Hazardous Materials
◆When evacuating toxic or corrosive gases, obtain proper instructions from a safety supervisor. ◆Clearly identify toxic, corrosive, dangerous gases, or liquids on containers used to store or ship equipment after such exposure. ◆Handle hazardous materials with care in accordance with applicable laws and regulations. ULVAC CRYOGENICS INCORPORATED... -
Page 47: Disconnection And Storage
Disconnect the flexible hoses after the first and second stages of the cryocooler return to room temperature. Loosen the nut with a spanner. Hold with a spanner. Loosen the union nut using two spanners and disconnect the flexible hose by hand. Figure 5-1 Disconnecting Flexible Hose ULVAC CRYOGENICS INCORPORATED... -
Page 48: Storage
When the Cryocooler has been left without operating for one year or more, perform helium circuit decontamination before resuming operation. When transporting the 4K Cryocooler Return the Cryocooler to the state when delivered for the first time and avoid excessive shock. ULVAC CRYOGENICS INCORPORATED... -
Page 49: Maintenance
Item code Helium charging adapter kit A700B5101000 (Regulator, Charging hose 2.4M, Charging adopter) <Items independently available> Regulator (for helium gas) A700A5101700 Charging hose 2.4M A700A5101800 Charging adapter A700B5101100 Helium gas (with purity of 99.999% or above) － － ULVAC CRYOGENICS INCORPORATED... -
Page 50: Charging Helium Gas
CAUTION If the helium pressure gauge of the compressor unit shows 0 MPaG, contamination caused by air or moisture may occur in the system. In such a case, contact our Service Engineering Division or customer support center. ULVAC CRYOGENICS INCORPORATED... - Page 51 Slightly open the regulator. Normally the regulator opens by turning the handle clockwise. Slowly open the bottle valve, and purge the air in the gas line for several seconds. Close the regulator. ULVAC CRYOGENICS INCORPORATED...
- Page 52 The pressure relief valve in the compressor unit is set at 2.5MPaG. Close the charge valve after charging helium gas. Close the regulator and remove the charging hose from the charge fitting. ULVAC CRYOGENICS INCORPORATED...
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Page 53: Troubleshooting
Refer to Sec.6.2. 4) Heat load to the Cryocooler Take measures to reduce the is too high. heat load. 5）Helium gas is heavily Please contact us. contaminated. Please contact us. 6) Failure of the Cryocooler or the compressor unit. ULVAC CRYOGENICS INCORPORATED... - Page 54 Service Engineering Division or the nearest CS center. ② Measure resistance and insulation Drive motor circuit failure resistance between the drive motor connector pins (Impressed voltage: 500V) and inform us the measured values with the serial number of the Cryocooler. ULVAC CRYOGENICS INCORPORATED...
- Page 55 Possible Cause Corrective Action 1) Helium gas is heavily Please contact us. Cryocooler drive contaminated. motor is making irregular or intermittent motion. 2) Input voltage to the motor is low. Check the input voltage to the Cryocooler. ULVAC CRYOGENICS INCORPORATED...
- Page 56 DATE Ｖ× φ COMPRESSOR S/N POWER 4K CRYOCOOLER S/N Cryocooler Vacuum Measuring condition Compressor unit Notes Temperature chamber 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
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Page 57: Flexible Hose
・ Avoid twisting the flexible hose especially when making final connection. ・ Keep away from water and salt to prevent corrosion. Do not place heavy objects on the flexible hoses in order to prevent being deformed or collapsed. ULVAC CRYOGENICS INCORPORATED... - Page 58 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 59: Principles Of Refrigerator Operation
Gifford and McMahon developed the concept of G-M cycle in the late 1950’s In the driving method of G-M cycle, there are a way which drives mechanically and a way which drives using the differential-pressure of the operational gas. Since the GM MH0C001E,2010.01 ULVAC CRYOGENICS INCORPORATED... - Page 60 Therefore, it is a highly efficient and reliable refrigeration cycle. In this manual, the refrigeration cycle with the mechanical driving system adopted by ULVAC CRYOGENICS INC is explained. Figure C-2 shows the principle of G-M cycle & P-V chart (P: pressure, V: volume in the expansion chamber).
- Page 61 Moreover, since difference pressure is not applied to seals on the 1st stage and 2nd stage, the structure where the load to the seal is light has been adopted. Therefore, a long-lived, high reliability is acquired. ULVAC CRYOGENICS INCORPORATED...
- Page 62 1 cycle P-V diagram W=∮PdV －P Volume of Expansion Chamber Figure C-2 Principle of G-M Cycle Operation 1st Displacer 1st Seal Regenerator Expansion chamber LOAD 2nd Displacer 2nd Seal Expansion chamber Figure C-3 Two-stage Regenerator LOAD Refrigerator ULVAC CRYOGENICS INCORPORATED...
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Page 63: Dimensional Drawing
4K Cryocooler Instruction Manual Appendix D DIMENSIONAL DRAWING 4K Cryocooler Unit UHE10F ································································ D-2 4K Cryocooler Unit UHE12F ································································ D-3 4K Cryocooler Unit UHE15F ································································ D-4 ULVAC CRYOGENICS INCORPORATED... - Page 64 Dimensional Drawing φ64 48.5 φ125 φ90 φ180 ±0.1 φ145 (150) (291.5) φ180 φ142 O-Ring Groove Inner Diameter ULVAC CRYOGENICS INCORPORATED...
- Page 65 4K Cryocooler Instruction Manual φ64 48.5 φ125 φ90 φ180 ±0.1 φ145 (150) (291.5) φ180 φ142 O-Ring Groove Inner Diameter ULVAC CRYOGENICS INCORPORATED...
- Page 66 Dimensional Drawing φ68 48.5 φ125 φ90 φ180 ±0.1 φ145 (150) (291.5) φ180 φ142 O-Ring Groove Inner Diameter ULVAC CRYOGENICS INCORPORATED...
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Page 67: Self-Certification
4K Cryocooler Instruction Manual Appendix E Self-certification Self-certification of CE marking of the Refrigerator Unit is posted on the next page. ULVAC CRYOGENICS INCORPORATED... - Page 68 Dimensional Drawing ULVAC CRYOGENICS INCORPORATED...
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Page 69: Service Network
ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC. - Page 70 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
- Page 71 Revision No. Contents 2018-11-21 2018.11 First edition 2019-01-08 2019JA01 Appendix D has been modified. 2019-02-27 2019FY02 Descriptions on UHE12F have been added. 2019-05-31 2019MY03 Appendix E “Self-certification” has been added. Name of a component has been modified. ULVAC CRYOGENICS INCORPORATED...
- Page 72 Revisions This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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