User Manuals: Ulvac G-Tran SH2-1 Gauge Sensor

Manuals and User Guides for Ulvac G-Tran SH2-1 Gauge Sensor. We have 1 Ulvac G-Tran SH2-1 Gauge Sensor manual available for free PDF download: Instruction Manual

Ulvac G-Tran SH2-1 Instruction Manual

Ulvac G-Tran SH2-1 Instruction Manual (77 pages)

Multi ionization Gauge Sensor Unit

Brand: Ulvac | Category: Accessories | Size: 2 MB

Table of Contents

Safety Symbols
3
Safety Precautions
4
Revision History
8
Table of Contents
10
1 Introduction

12
- G-Tran Series Overview
  12
- Commentary on Phrasing
  12
2 Specifications

13
- Only )
  13
- Sh2-1/Sh2-2 Specifications
  13
- Spu Combination Mode Key Specifications
  15
- Control Input Signals
  15
- Specifications
  16
- Fil
  16
- Unpacking and Quantity Check
  16
3 Handling Precautions

17
- Post - Operation Checks
  17
- Operating Environment
  17
- Precautions Related to Use
  18
- Power Supply
  19
- Attaching this Unit
  19
  - Sensor Attachment Environment
    19
  - Attaching the Gauge Head
    19
4 Part Names and Functions

20
- Controller
  20
- Anel - Sh2-1 Standard Ype
  21
- Type
  25
- Communications Type
  26
- Spu I/Oconnector
  27
- Sau I/Oconnector
  28
5 Power Supply Internal Circuitry 18

30
- (Sh2-1/Sh2-2)
  30
6 Mode Configurations (Sh2-1/Sh2-2)

30
7 Led State Indicators

30
8 Control Input Signals

32
- Sau Combination Mode Key 8.2. Fil On/Off Signal
  32
- Swu Combination Mode Key 8.4. Degas On/Off Signal
  33
9 Analog Output (Sh2-1/Sh2-2)

34
10 Control Output Signals

40
- Serial Communications Signals
  40
- Ontrol Output Signals
  40
- Communications Type (Sh2-2 Only )
  40
- I/O
  41
- Sensor Error Signal
  41
  - SH2 Independent Mode
    41
  - SPU Combination Mode
    41
  - (Sh2-1 Only )
    41
  - SAU Combination Mode
    41
- I/OCONNECTOR - SH2-2 SERIAL 10.3.4. SWU Combination Mode
  41
- Etpoint Operation Signal
  42
- Only )
  42
- Connection Check Signal
  42
11 Configuring the Setpoints (Sh2-1 Only)

43
- Setpoint Setting Pressure Setpoint Setting Pressure
  43
12 Filament Power Monitor Signal34

45
- Filament Power Monitor Signal
  45
13 Adjusting Sau Pressure

45
- Adjusting on the
  45
  - St2-2
    45
- St2-1
  45
14 Adjusting Swu Pressure

46
- Adjusting on the
  46
- Sh2-1
  46
  - Sh2-2
    46
15 Using Serial Communications (Sh2-2 Only)

47
- Serial Communications Specification
  47
- Settings
  47
  - Wiring Diagram
    47
  - Baud Rate Setting
    48
  - Address Setting
    48
- Basic Data Format
  49
  - Command List
    49
  - Normal Command Reception
    49
  - Abnormal Command Reception
    49
- Command
  50
  - Read Measurement Value, Status
    50
  - Write Status
    50
  - Read Status
    50
  - Check Error Details
    50
  - SAU Atmospheric Adjustment Command
    50
  - SAU Zero Adjustment Command
    50
  - SWU Atmospheric Adjustment Command
    51
  - Check B-A Gauge Filament Current
    51
  - Value
    51
  - Read Software Version
    51
  - Read Setpoint 1 Setting
    51
  - Read Setpoint 2 Setting
    51
  - Write Setpoint 1 Setting
    51
  - Write Setpoint 2 Setting
    51
- Checksums
  52
- Status Settings List
  53
  - When Writing the Status
    53
  - When Reading
    54
- Ascii Code Chart
  55
16 Gauge Head Replacement

56
17 Troubleshooting

58
- Checking for an Internal Electrode
  62
- Pins and the Case
  62
18 Technical Report

63
- Measurement Principle
  63
- Measurement Gas Type and Relative
  63
- Sensitivity Factor
  63
19 Warranty

66
20 Ec Declaration of Conformity

67
21 Certificate of Contamination

68
22 China Rohs Declaration

69
23 Related Drawings

70
- Sh2-1/Sh2-2, Spu, Sau
  70
- Sh2-1/Sh2-2、Swu Connection
  71
- Sh2-1 Dimensions
  72
- Sh2-2 Dimensions
  73
- Auge Head M-34/M-35/M-36 Dimensions
  74
- Display Unit Cable
  75
- Unit Cable (Guc-P)
  76
- Unit Cable (Guc-A)
  77

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