On-Board FastRegen Control Module Programming and Operation Instructions
and Module Software
Last Full Regeneration
Last Fast Regeneration
Can only be completed if a
password is created.
P/N 8040406
SERVICE
Display Cryopump
Serial Number
Version
Display
Network ID
Number
Display System
Total Operating
Hours
Display Time Since
Display Time Since
Figure 3-27: SERVICE Function Flowchart
HELP
Create Password
Parameter Lock
Zero Auxiliary
Thermocouple
Thermocouple
Temperature
-
C
TI
CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Lock Mode
ON/OFF
ON/OFF
Zero Cryo
First Stage
Control
3-33