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On-Board FastRegen Control Module Programming and Operation Instructions
Cryo Thermocouple Pressure Limits
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Auxiliary Thermocouple Pressure Limits
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Figure 3-54: Auxiliary Thermocouple Pressure Limits Display
P/N 8040406
The sixth parameter of the RELAYS function allows you to establish the
upper and lower pressure limits of the cryopump thermocouple gauge as
shown in Figure 3-53.
CRYO TC PRESS
3
MONITOR
CONTROL
6
REGEN
RELAYS
9
SERVICE
Enter
oo
.
ON-BOARD
Figure 3-53: Cryo Thermocouple Pressure Limits Display
The seventh parameter of the RELAYS function allows you to establish the
upper and lower pressure limits of the cryopump auxiliary thermocouple
gauge as shown in Figure 3-54.
AUX TC PRESS
3
MONITOR
CONTROL
6
REGEN
RELAYS
9
SERVICE
Enter
oo
.
ON-BOARD
Last
1
Next
4
Clear
7
HELP
®
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Last
1
Next
4
Clear
7
HELP
®
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C
TI
CRYOGENICS
HELIX TECHNOLOGY CORPORATION
LL=1 µ UL=999 µ
2
3
MONITOR
6
5
REGEN
8
9
SERVICE
Enter
oo
0
.
ON-BOARD
LL=1 µ UL=999 µ
3
2
MONITOR
6
5
REGEN
9
8
SERVICE
Enter
oo
0
.
ON-BOARD
CONTROL
RELAYS
HELP
®
CONTROL
RELAYS
HELP
®
3-59
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