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CTI-CRYOGENICS On-Board FastRegen
HELIX CTI-CRYOGENICS On-Board FastRegen Manuals
Manuals and User Guides for HELIX CTI-CRYOGENICS On-Board FastRegen. We have
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HELIX CTI-CRYOGENICS On-Board FastRegen manual available for free PDF download: Programming And Operation Instructions
HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions (108 pages)
Control Module
Brand:
HELIX
| Category:
Control Unit
| Size: 0 MB
Table of Contents
Table of Contents
3
Section 1 - Basic On-Board Module Information
9
Introduction
9
Microprocessor Control System
9
Remote Operation Options
9
Keypad/Display Control Description
10
Alphanumeric Display
10
Horizontal Scroll Display Keys
10
Figure 1-1: On-Board Keypad/Display
10
Vertical Scroll Display Keys (Last, Next)
11
Clear Display Key
11
Numeric Keypad
11
Enter Command Key
11
Function Keys
11
On-Line Help
11
Software Version Identification
12
Figure 1-2: On-Line Help Message Example
12
Section 2 - System Power
13
Before You Start
13
Starting the Cryopump
13
Shutting down the Cryopump
13
Section 3 - Programming and Operation
15
Introduction
15
Normal Operation
15
MONITOR Function
15
Figure 3-1: MONITOR Function Flowchart
16
Cryopump ON/OFF and Second Stage Temperature
17
Figure 3-2: ON/OFF Status and Second Stage Temperature
17
Figure 3-3: First and Second Stage Temperature and Auxiliary Thermocouple
17
First and Second Stage Temperature and Auxiliary Thermocouple Pressure
17
Figure 3-4: First Stage Temperature
18
Figure 3-5: Second Stage Temperature
18
First Stage Temperature in Kelvin
18
Second Stage Temperature in Kelvin
18
Auxiliary Thermocouple Gauge Pressure
19
Cryo Thermocouple Gauge Pressure
19
Figure 3-6: Auxiliary Thermocouple Gauge Pressure
19
Figure 3-7: Cryo Thermocouple Gauge Pressure
19
Figure 3-8: Relay 1 Automatic or Manual Control
20
Figure 3-9: Relay 2 Automatic or Manual Control
20
Relay 1 ON/OFF and Auto/Manual Control
20
Relay 2 ON/OFF and Auto/Manual Control
20
MONITOR Function Operation
21
Regeneration Function
22
Figure 3-10: Fast Regeneration Cycle Function Flowchart
24
Figure 3-11: Full Regeneration Cycle Function Flowchart
25
Delay Start
26
Regen On/Off
26
Table 3-1:REGEN Function Parameters
26
Delay Restart
28
Fast Rough Test
28
Extended Purge
29
Repurge
29
Base Pressure
30
Repurge Cycles
30
Rate-Of-Rise
31
ROR Cycles
31
Power Fail Recovery
32
Rough Valve Interlock
32
Power Fail Recovery Temperature
33
REGEN Function Programming
34
Initiate REGEN
34
Abort REGEN
34
Delay Start
34
Delay Restart
35
Fast Rough Test
35
Extended Purge
36
Repurge
36
Repurge Cycles
36
Base Pressure
37
Rate-Of-Rise (ROR)
37
Rate-Of-Rise (ROR) Cycles
38
Rough Valve Interlock
38
Power Failure Recovery
39
Power Failure Recovery Temperature
39
Performing a Fast or Full Regeneration Cycle
40
Fast Regeneration Cycle
40
Full Regeneration Cycle
40
REGEN Cycle Examples
41
Figure 3-26: On-Board Cryopump Fast Regeneration Cycle Example
44
SERVICE Function
46
Figure 3-27: SERVICE Function Flowchart
47
Elapsed Pump Time
48
First Stage Temperature Control
48
Table 3-2:SERVICE Function Parameters
48
Elapsed Pump Time
49
Lock Mode
48
Parameter Lock
48
Password
48
Serial Number and Software Version
48
Time Since Last Fast Regeneration
48
Time Since Last Full Regeneration
48
Zero Auxiliary Thermocouple
48
Network Identification Number
49
Time Since Last Full Regeneration
50
Time Since Last Fast Regeneration
50
Password
51
Lock Mode
51
Parameter Lock
52
Zero Auxiliary Thermocouple
52
Zero Cryo Thermocouple
53
First Stage Temperature Control
53
SERVICE Function Operation
54
CONTROL Function
58
Figure 3-39: CONTROL Function Flowchart
59
Cryopump ON/OFF and Second Stage Temperature
60
Table 3-3:CONTROL Function Parameters
60
Aux TC ON/OFF and TC Pressure
61
Cryo TC ON/OFF and TC Pressure
61
Rough Valve Open/Closed
62
Purge Valve Open/Closed
63
Relay 1 ON/OFF and Auto/Manual Control
64
Relay 2 ON/OFF and Auto/Manual Control
64
CONTROL Function Operation
65
Cryopump ON/OFF and Second Stage Temperature
65
Aux TC ON/OFF and TC Pressure
65
Cryo TC ON/OFF and TC Pressure
65
Rough Valve Open/Closed
66
Purge Valve Open/Closed
66
Relay 1 ON/OFF and Auto/Manual Control
66
Relay 2 ON/OFF and Auto/Manual Control
67
RELAYS Function
68
Select Relay 1 or 2
69
Figure 3-47: RELAYS Function Flowchart
69
Table 3-4:RELAYS Function Parameters
70
Current State of Relay ON/OFF, Auto/Manual
71
Current Program for Automatic Control
71
First Stage Temperature Limits
72
Second Stage Temperature Limits
72
Cryo Thermocouple Pressure Limits
73
Auxiliary Thermocouple Pressure Limits
73
Cryopump
74
Regeneration
74
Roughing Valve
75
Delay Activation of Relay
75
RELAYS Function Operation
76
Programming First Stage Temperature Limits
76
Programming Second Stage Temperature Limits
77
Programming Cryo Thermocouple Pressure Limits
77
Programming Auxiliary Thermocouple Pressure Limits
78
Cryopump
78
REGEN Track
79
Rough Valve
79
Time Delay
80
Fastregen Control Module Software Function Parameters
80
Table 3-5:On-Board Fastregen Control Module Software Parameters
81
Section 4 - On-Board Module Replacement
82
Module Ordering Information
82
Module Replacement
82
Appendix A - Customer Support Centers
84
Table A-1:Customer Support Center Locations
85
Appendix B - On-Board Module RS-232 Interface Protocol Format
88
Table B-1:On-Board Module RS-232 Commands
92
Appendix C - RS-232 Regeneration Responses
101
Table C-1:RS-232 REGEN Responses and Descriptions
102
Appendix D - RS-232 Power Failure Recovery Messages
107
Table D-1:Power Failure Recovery Messages
107
Appendix E - On-Board Keypad/Display Error Messages
108
Table E-1:Keypad/Display Error Messages
108
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