Table of Contents
Advertisement
On-Board FastRegen Control Module Programming and Operation Instructions
Auxiliary Thermocouple Gauge Pressure
Last
1
2
Next
4
5
Clear
7
8
-
0
Cryo Thermocouple Gauge Pressure
Last
1
Next
4
Clear
7
-
P/N 8040406
The fifth parameter of the MONITOR function displays the auxiliary
thermocouple gauge pressure (in microns) when turned ON, and indicates
when the gauge is turned OFF. Refer to Figure 3-6. The display indicates
pressures between 0 - 999 microns.
AUX TC = 243 µ
3
MONITOR
6
REGEN
9
SERVICE
Enter
oo
.
ON-BOARD
Figure 3-6: Auxiliary Thermocouple Gauge Pressure
The sixth parameter of the MONITOR function displays the cryopump
thermocouple gauge pressure (in microns) when turned ON, and indicates
when the gauge is turned OFF if the cryopump is equipped with a
thermocouple gauge. Refer to Figure 3-7. The display indicates pressures
between 0 - 999 microns.
CRYO TC = 52 µ
3
2
MONITOR
6
5
REGEN
9
8
SERVICE
Enter
oo
0
.
ON-BOARD
Figure 3-7: Cryo Thermocouple Gauge Pressure
Last
1
CONTROL
Next
4
RELAYS
Clear
HELP
7
®
-
Last
1
CONTROL
2
Next
RELAYS
4
Clear
7
HELP
®
-
-
C
TI
CRYOGENICS
HELIX TECHNOLOGY CORPORATION
AUX TC = OFF
3
2
MONITOR
5
6
REGEN
9
8
SERVICE
Enter
oo
0
.
ON-BOARD
CRYO TC = OFF
3
MONITOR
6
5
REGEN
8
9
SERVICE
Enter
oo
0
.
ON-BOARD
CONTROL
RELAYS
HELP
®
CONTROL
RELAYS
HELP
®
3-5
Hide quick links:
Advertisement
Table of Contents
