Cryopump On/Off And Second Stage Temperature; First And Second Stage Temperature And Auxiliary Thermocouple Pressure; Figure 3-2: On/Off Status And Second Stage Temperature; Figure 3-3: First And Second Stage Temperature And Auxiliary Thermocouple - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

On-Board FastRegen Control Module Programming and Operation Instructions

Cryopump ON/OFF and Second Stage Temperature

First and Second Stage Temperature and Auxiliary Thermocouple Pressure

Figure 3-3: First and Second Stage Temperature and Auxiliary Thermocouple Pressure
P/N 8040406
The first parameter within the MONITOR function displays the On-Board
Cryopump ON/OFF status and the second stage temperature (degrees
Kelvin) as shown in Figure 3-2.
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Figure 3-2: ON/OFF Status and Second Stage Temperature

NOTE: Refer to Appendix A and contact the local CTI-CRYOGENICS
customer support center if the letters SHO or OPN are displayed.
The second parameter of the MONITOR function displays the On-Board
Cryopump first and second stage temperature (degrees Kelvin) and the
vacuum pressure of the auxiliary thermocouple gauge (microns) as shown
in Figure 3-3. The display indicates pressures between 0 - 999 microns.
The display indicates OFF when the thermocouple gauge is turned OFF.
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- 0
CRYO ON 12K
3
2
MONITOR
6
5 REGEN
8 9
SERVICE
Enter
oo
0 . ON-BOARD
65K, 12K, 243 µ
3
MONITOR
6
REGEN
9
SERVICE
Enter
oo
. ON-BOARD
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C TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
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