HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions page 45

On-Board FastRegen Control Module Programming and Operation Instructions
From page 3-30
ROUGH 345µ/50µ
REPURGE 20 SEC
COOLDOWN 123K/17K
REGEN COMPLETE
END
Figure 3-26: On-Board Cryopump Fast Regeneration Cycle Example (continued)
P/N 8040406
The rough valve opens and the display shows the current pressure
(345µ) and the base pressure to be achieved (50µ). If the pressure
does not drop below 1000 microns before the fast rough test time
has expired, the pump will automatically go into a repurge phase.
Shows the time remaining for the purge cycle. The pump returns
to the purge OFF and sit phase.
NOTE: You cannot change the repurge parameter.
The heaters are OFF and the rough valve is closed. During
cooldown, the display shows real time temperature (123K) and the
base temperature (17K). The rough valve will cycle to maintain the
pump below the rough setpoint and will not cycle below 100K. This
would indicate a vacuum leak.
Fast regeneration is complete when the cryopump reaches 17K.
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C TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
3-31