1.4
Definitions of terms
Table 1-1
Terms describing Convectron ATM module and components
Term
Module
Convectron gauge
Differential pressure sensor
1.5
Customer service
®
Convectron
ATM Vacuum Gauge Module Instruction Manual
The following terms are used throughout this manual in reference to the
Convectron ATM vacuum gauge module:
Description
The Convectron ATM vacuum gauge module, which contains a Convectron
convection-enhanced Pirani heat-loss pressure gauge and a Piezo resistive
diaphragm pressure sensor and electronics
The Convectron convection-enhanced Pirani heat-loss gauge, which measures
pressure within the vacuum chamber
The Piezo resistive diaphragm sensor, which measures the pressure differential
between atmospheric and vacuum chamber pressures
For customer service:
• Phone 1–303–652–4400 or 1–800–776–6543 within the U.S.A.
• Email custserv@helixtechnology.com.
Before You Begin
3