Rough Valve Interlock; Power Fail Recovery - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

Programming and Operation

Rough Valve Interlock

Power Fail Recovery

3-18
The eleventh parameter of the REGEN function allows the On-Board
roughing valve to operate independent of the rough valve grouping when
Rough Valve Interlock is set to OFF (0). The Rough Valve Interlock
display is shown in Figure 3-22. When the rough valve interlock is ON,
the rough valve will open during regeneration when permission is received
from the Network Terminal.
0 ROUGH VALVE INTERLOCK
Last
3
1 2
Next
6
4 5
Clear
9
7 8
- 0 .
Figure 3-22: Rough Valve Interlock Display
The twelfth parameter of the REGEN function allows the On-Board
cryopump to automatically perform a REGEN cycle, or to cool down if
below the power failure recovery temperature, after a power failure has
occurred, as shown in Figure 3-23. There are three settings available to
you:
• 0 - Power Fail OFF
• 1 - Power Fail ON
• 2 - Power Fail Cool
NOTE: If Power Fail Cool is selected, and the power failure occurs while
the cryopump is ON, the cryopump will only cool down if it is below the
power fail recovery temperature setpoint. If the cryopump temperature is
above the setpoint, the cryopump will remain OFF.
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REGEN RELAYS
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