Purge Valve Open/Closed - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

On-Board FastRegen Control Module Programming and Operation Instructions

Purge Valve Open/Closed

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P/N 8040406
Opening the purge valve when the On-Board Cryopump is turned ON
may contaminate the cryopump arrays. A message is displayed on the
keypad/display warning you about this potential problem.
The fifth parameter of the CONTROL function allows you to open or close
the purge valve as shown in Figure 3-44.
PURGE V OPEN
3
MONITOR CONTROL
6
REGEN RELAYS
9
SERVICE HELP
Enter
oo ®
. ON-BOARD
Figure 3-44: Purge Valve Open/Closed Display
CAUTION
PURGE V CLOSED
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C TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
MONITOR CONTROL
REGEN RELAYS
SERVICE HELP
oo ®
ON-BOARD
3-49