Section 2 - System Power; Before You Start; Starting The Cryopump; Shutting Down The Cryopump - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

On-Board FastRegen Control Module Programming and Operation Instructions

Before You Start

Starting the Cryopump

Shutting Down the Cryopump

P/N 8040406

Section 2 - System Power

Make sure the On-Board Cryopump has been installed according to the
directions found in the On-Board Cryopump Installation and Service
Instructions manual included with your cryopump.
1. Turn the On-Board ON/OFF switch, located on the compressor, to
the ON position.
2. Turn the compressor ON/OFF switch to the ON position.
3. Turn the roughing pump ON.
4. Ensure that the nitrogen or air supply to the roughing valve is
between 60 - 80 psig.
5. Ensure that the nitrogen supply to the purge valve is between
40 - 80 psig. Do not exceed 80 psig.
NOTE: The On-Board FastRegen Control Module comes programmed
with the default values as shown in Table 3-1.
6. Program the regeneration parameters to your particular values as
described in Section 3 - Programming and Operation or use the
default regeneration values.
7. Perform a Full regeneration cycle as described in Section 3 -
Programming and Operation.
1. Close the hi-vac valve, if there is one located between the
cryopump and the vacuum system.
2. Press the REGEN key on the keypad/display.
3. Press 1 to start the regeneration cycle.
4. Press 2 to confirm the start of the regeneration cycle.
5. Once the cryopump temperature reaches 310K, press 0 to abort the
REGEN cycle.
6. Press 2 to confirm the REGEN abort.
-
C TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
2-1