Brooks SLAMf60 Installation And Operation Manual

Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
August, 2009
®
Brooks Models SLAMf50, SLAMf51, SLAMf53
Mass Flow Controllers and Models SLAMf60,
SLAMf61, SLAMf63 Mass Flow Meters
®
Brooks Industrial Digital Series MFC's and MFM's
Model SLAMf50S
Analog I/O MFC
with RS-485
®
Brooks Digital MFC's and MFM's
Model SLAMf50F
Digital I/O
F ® Fieldbus MFC
OUNDATION
Model SLAMf53D
Digital I/O
TM
DeviceNet MFC