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Brooks 5850EMH Quick Start Manual

Brooks 5850EMH Quick Start Manual

585xemh series high temperature thermal mass flow controllers metal seal

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ITW-Japan Ltd.
ITW-Japan Ltd.
ITW-Japan Ltd.
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ITW-Japan Ltd.
1-4-4 Kitasuna Koto Ku
Tokyo, 136-0073 Japan
Tel +81 (0) 3 5633 7100
Fax +81 (0) 3 5633 7101
E-mail Sales-Japan@BrooksInstrument.com
Brooks is a trademark of Brooks Instrument, LLC.
All other marks are property of their respective owners.
PN: 541B209AAG/A
Reference: 834z986
© Copyright 2016, Brooks Instrument, LLC,
All rights reserved. Printed in USA.
X-TMF-585xEMH-QS-eng
January, 2016
PN: 541B209AAG/A
Quic
Quic
k Start Guide
k Start Guide
Quic
Quick Start Guide
Quic
k Start Guide
k Start Guide
585xEMH High T T T T T emper
585xEMH High
585xEMH High
585xEMH High
585xEMH High
emper
emper
emperatur
emper
atur
ature e e e e
atur
atur
Thermal Mass Flow Con
Thermal Mass Flow Con
Thermal Mass Flow Contr tr tr tr trollers
Thermal Mass Flow Con
Thermal Mass Flow Con
ollers
ollers
ollers
ollers
Metal Seal
Metal Seal
Metal Seal
Metal Seal
Metal Seal
Thermal Mass Flow
Thermal Mass Flow
Thermal Mass Flow
Thermal Mass Flow
Thermal Mass Flow
5850EMH
5850EMH
5850EMH
5850EMH
5850EMH
Step 1: Location/Orientation
Step 1: Location/Orientation
Step 1: Location/Orientation
Step 1: Location/Orientation
Step 1: Location/Orientation
The instrument may be located anywhere in the process line, as long as the
following conditions are met:
• Ambient temperature must remain between 85° and 105°C (185°F and 221°F).
• The instrument (cable connections, wiring compartments and/or conduit
openings) should be accessible for service.
The instrument can be mounted in any orientation. It's best if the mounting
orientation matches the orientation specified on the Calibration Data Sheet.
Refer to Figure 1 for the different mounting options:
Step 2: Mounting the Controller to a Plate, Shelf or Panel
Step 2: Mounting the Controller to a Plate, Shelf or Panel
Step 2: Mounting the Controller to a Plate, Shelf or Panel
Step 2: Mounting the Controller to a Plate, Shelf or Panel
Step 2: Mounting the Controller to a Plate, Shelf or Panel
2
5850EMH
5851EMH
Step 3: Gas Connections
Step 3: Gas Connections
Step 3: Gas Connections
Step 3: Gas Connections
Step 3: Gas Connections
3
After mounting the
Controller, carefully connect
and tighten the process lines.
Ensure the fittings are leak-free.
1
Attitude #1
Attitude #2
Flow: Horizontal
Flow: Vertical
Mount: Base Down
Mount: Inlet Up
Attitude #3
Flow: Horizontal
Mount: Either Side Down
Attitude #4
Flow: Vertical
Attitude #5
Mount: Inlet Down
Flow: Horizontal
Mount: Upside Down
Inch
[mm]
4

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Summary of Contents for Brooks 5850EMH

  • Page 1 Tokyo, 136-0073 Japan Tel +81 (0) 3 5633 7100 Fax +81 (0) 3 5633 7101 E-mail Sales-Japan@BrooksInstrument.com Brooks is a trademark of Brooks Instrument, LLC. All other marks are property of their respective owners. PN: 541B209AAG/A After mounting the Reference: 834z986 Controller, carefully connect and tighten the process lines.
  • Page 2 Step 4: Remote Electronics Box Step 4: Remote Electronics Box Step 4: Remote Electronics Box Step 4: Remote Electronics Box Step 4: Remote Electronics Box Step 5: Electrical Connections Step 5: Electrical Connections Step 5: Electrical Connections Step 5: Electrical Connections Step 5: Electrical Connections The remote electronics box can be mounted in any position that is convenient and within reach of the high temperature cable.