Supported Plug-In Modules - Keysight Technologies B1500A Configuration Manual

03 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Supported Plug-in Modules

The B1500A supports ten slots for plug-in modules.
Module Name
occupied
B1510A High power
source/monitor unit
(HPSMU)
B1511B Medium power
source/monitor unit
(MPSMU)
B1517A High resolution
source/monitor unit
(HRSMU)
B1514A 50 µs Pulse
medium current source/
monitor unit (50 µs
Pulse MCSMU)
B1520A Multi-frequency
capacitance measure-
ment unit (MFCMU)
B1525A High voltage
semiconductor pulse
generator unit
(HV-SPGU)
B1530A Waveform
generator/fast measure-
ment unit (WGFMU)
Slots
Key Features
2 – Range up to 200 V/1 A with 4-quadrant operation
– Minimum measurement resolution 10 fA/2 µV
1 – Range up to 100 V/0.1 A with 4-quadrant operation
– Minimum measurement resolution 10 fA/0.5 µV
– Optional ASU (atto-sense and switch unit) for 100
– aAresolution and IV/CV switching capability
1 – Range up to 100 V/0.1 A with 4-quadrant operation
– Minimum measurement resolution 1 fA/0.5 µV
– Optional ASU (atto-sense and switch unit) for 100
– aAresolution and IV/CV switching capability
1 – Range up to 30 V/1 A pulsed (0.1 A DC) with 4-quadrant operation
– Pulse measurement from 50 μs pulse width with 2 μs resolution
– Oscilloscope view (voltage/current waveform viewer) is supported
– Minimum measurement resolution 10 pA/0.2 µV
1 – AC impedance measurement (C-V, C-f, C-t)
– 1 kHz to 5 MHz frequency range with minimum 1 mHz frequency resolution
– 25 V built-in DC bias and 100 V DC bias with SMU and SCUU (SMU CMU Unify Unit)
– Easy and fast yet accurate IV and CV automated connection change by SCUU
1 – High voltage output up to ±40 V applicable for non-volatile memory testing
– Two-level and three-level pulse capability by single channel
– Flexible arbitrary waveform generation with 10 ns resolution (arbitrary linear waveform generation
function)
– Two channels per module
1 – Ultra-fast IV measurement capability for the pulsed IV and transient IV such as NBTI/PBTI,
RTN, etc.
– Waveform generation with 10 ns programmable resolution
– Simultaneous high-speed IV measurement capability (200 MSa/s, 5 ns sampling rate) 10 V peak-to-peak
output
– No load line effect accurate pulsed IV measurement by dynamic SMU technology
– Spot, sweep and more measurement
capabilities
– Sampling (time domain) measurement
from 100 μs
– Pulse measurement from 500 μs pulse
width
– Accurate Quasi-Static Capacitance
Voltage (QS-CV) measurement with
leakage current compensation