Table of Contents
Advertisement
On-Board FastRegen Control Module Programming and Operation Instructions
Section 3 - Programming and Operation
Introduction
Normal Operation
MONITOR Function
P/N 8040406
Section 3 provides you with a description of programming and operation
information for On-Board FastRegen Control Module software. Refer to
Table 3-5 at the end of this section for a complete list of all On-Board
FastRegen Control Module software parameters.
The On-Board Cryopump has been designed to operate without user
assistance. However, the helium supply pressure gauge on the compressor
should be checked once per week. Make sure the gauge reading is within
the specified range as discussed in the appropriate compressor manual.
Refer to Appendix A and contact the local customer support center
location whenever the helium supply gauge reading is not within the
specified range.
The MONITOR function allows you to observe the following On-Board
Cryopump system data:
•
ON/OFF status of the On-Board Cryopump
•
First and second stage temperature
•
Cryo and auxiliary thermocouple gauge (TC) vacuum pressures
•
ON/OFF status of programmable relays 1 and 2
NOTE: Data can only be displayed while using the MONITOR function.
Data that is displayed using the MONITOR function is useful in
determining the operating status of the On-Board Cryopump. The
flowchart in Figure 3-1 displays all FastRegen Control Module MONITOR
software functions.
CAUTION
-
C
TI
CRYOGENICS
HELIX TECHNOLOGY CORPORATION
3-1
Hide quick links:
Advertisement
Table of Contents
