First Stage Temperature In Kelvin; Second Stage Temperature In Kelvin; Figure 3-4: First Stage Temperature; Figure 3-5: Second Stage Temperature - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

Programming and Operation

First Stage Temperature in Kelvin

Second Stage Temperature in Kelvin

3-4
The third parameter of the MONITOR function displays the On-Board
Cryopump first stage temperature (degrees Kelvin) as shown in
Figure 3-4.
Last
3
1 2
Next
6
4 5
Clear
9
7 8
- 0 .

Figure 3-4: First Stage Temperature

The fourth parameter of the MONITOR function displays the On-Board
Cryopump second stage temperature (degrees Kelvin) as shown in
Figure 3-5.
Last
3
1 2
Next
4 6
5
Clear
7 8 9
- 0 .

Figure 3-5: Second Stage Temperature

1ST STG. = 65K
MONITOR CONTROL
REGEN RELAYS
SERVICE HELP
Enter
oo ®
ON-BOARD
2ND STG. = 12K
MONITOR CONTROL
REGEN RELAYS
SERVICE HELP
Enter
oo ®
ON-BOARD
-
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