Extended Purge; Repurge - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

On-Board FastRegen Control Module Programming and Operation Instructions

Extended Purge

Repurge

P/N 8040406
The fifth parameter of the REGEN function allows you to extend the purge
time during Full regeneration to ensure the cryopump has been purged of
all contaminants. The extended purge time screen display is shown in
Figure 3-16.
Last
3
1 2
Next
4 5 6
Clear
7 8 9
- 0 .
Figure 3-16: Extended Purge Display
The sixth parameter of the REGEN function allows you to establish the
repurge time in the event of repurge as shown in Figure 3-17. A repurge
occurs during Full regeneration when the roughing pressure fails to
decrease at a rate of at least 2% per minute.
Last
3
1 2
Next
4 5 6
Clear
7 8 9
- 0 .
Figure 3-17: Repurge Display
EXTD PURGE 10M
MONITOR CONTROL
REGEN RELAYS
SERVICE HELP
Enter
®
oo
ON-BOARD
10 MIN REPURGE
MONITOR CONTROL
REGEN RELAYS
SERVICE HELP
Enter
®
oo
ON-BOARD
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C TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
3-15