HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions
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HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

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TI
CRYOGENICS
HELIX TECHNOLOGY CORPORATION
®
™
On-Board
FastRegen
Control Module
Programming and Operation Instructions
8040406
Rev. C (7/97)
HELIX TECHNOLOGY CORPORATION
Mansfield Corporate Center, Nine Hampshire Street, Mansfield, Massachusetts 02048-9171 Telephone (508) 337-5000

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  • Page 1 CRYOGENICS HELIX TECHNOLOGY CORPORATION ® ™ On-Board FastRegen Control Module Programming and Operation Instructions 8040406 Rev. C (7/97) HELIX TECHNOLOGY CORPORATION Mansfield Corporate Center, Nine Hampshire Street, Mansfield, Massachusetts 02048-9171 Telephone (508) 337-5000...
  • Page 2 No warranties are granted or extended by this document. CTI-CRYOGENICS - Helix Technology Corporation reserves the right to change any or all information contained herein without prior written notice. Revisions may be issued at the time of such changes and/or deletions.

  • Page 3: Table Of Contents

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table of Contents Section 1 - Basic On-Board Module Information Introduction ............1-1 Microprocessor Control System .
  • Page 4 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table of Contents (continued) Repurge Cycles ..........3-16 Base Pressure .
  • Page 5 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table of Contents (continued) Time Since Last Full Regeneration ......3-40 Time Since Last Fast Regeneration .
  • Page 6 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table of Contents (continued) REGEN Track ..........3-65 Rough Valve .
  • Page 7 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table of Contents (continued) Figure 3-11: Full Regeneration Cycle Function Flowchart ....3-11 Figure 3-12: REGEN ON/OFF Display ......3-13 Figure 3-13: Delay Start of Regeneration Display .
  • Page 8 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table of Contents (continued) Figure 3-53: Cryo Thermocouple Pressure Limits Display ....3-59 Figure 3-54: Auxiliary Thermocouple Pressure Limits Display ... 3-59 Figure 3-55: Cryopump Display .

  • Page 9: Section 1 - Basic On-Board Module Information

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Section 1 - Basic On-Board Module Information Introduction Section 1 describes the following information which is common to all On-Board Modules: microprocessor control, remote operations, keypad/ display, on-line help, software version and verification.

  • Page 10: Keypad/Display Control Description

    CRYOGENICS Basic On-Board Module Information HELIX TECHNOLOGY CORPORATION Keypad/Display Control Description The On-Board keypad/display, shown in Figure 1-1, provides a user interface to the On-Board System for programming and operating all On-Board Cryopump functions. Figure 1-1 shows the location of all function keys and the alphanumeric display.

  • Page 11: Vertical Scroll Display Keys (Last, Next)

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Vertical Scroll Display Keys (Last, Next) The last and next keys allow you to display the preceeding or proceeding messages of the respective Module software. Refer to the flowcharts in Section 3 - Programming and Operation for more information on the messages.

  • Page 12: Software Version Identification

    CRYOGENICS Basic On-Board Module Information HELIX TECHNOLOGY CORPORATION TO STOP REGEN TO STOP REGEN PRESS 0 THEN PRESS 2 Last TO CONFIRM. MONITOR CONTROL PRESS NEXT Next TO MODIFY REGEN REGEN RELAYS PROGRAM. Clear SERVICE HELP Enter ® ON-BOARD NOTE: After pressing the HELP key, press the Next key to display the help message line by line.

  • Page 13: Section 2 - System Power

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Section 2 - System Power Before You Start Make sure the On-Board Cryopump has been installed according to the directions found in the On-Board Cryopump Installation and Service Instructions manual included with your cryopump.
  • Page 14 CRYOGENICS System Power HELIX TECHNOLOGY CORPORATION 7. Turn the On-Board ON/OFF switch, located on the compressor, to the OFF position. 8. Turn the compressor ON/OFF switch to the OFF position. 9. Turn the roughing pump OFF. P/N 8040406...

  • Page 15: Section 3 - Programming And Operation

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Section 3 - Programming and Operation Introduction Section 3 provides you with a description of programming and operation information for On-Board FastRegen Control Module software. Refer to Table 3-5 at the end of this section for a complete list of all On-Board FastRegen Control Module software parameters.

  • Page 16: Figure 3-1: Monitor Function Flowchart

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION MONITOR HELP Cryopump ON/OFF AUX TC Gauge Pressure Second Stage Temp ON/OFF First Stage and Second Cryo TC Gauge Pressure Stage Temp, ON/OFF and AUX TC Pressure First Stage Relay 1 ON/OFF Temp...

  • Page 17: Cryopump On/Off And Second Stage Temperature

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Cryopump ON/OFF and Second Stage Temperature The first parameter within the MONITOR function displays the On-Board Cryopump ON/OFF status and the second stage temperature (degrees Kelvin) as shown in Figure 3-2.

  • Page 18: First Stage Temperature In Kelvin

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION First Stage Temperature in Kelvin The third parameter of the MONITOR function displays the On-Board Cryopump first stage temperature (degrees Kelvin) as shown in Figure 3-4. 1ST STG. = 65K Last MONITOR CONTROL...

  • Page 19: Auxiliary Thermocouple Gauge Pressure

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Auxiliary Thermocouple Gauge Pressure The fifth parameter of the MONITOR function displays the auxiliary thermocouple gauge pressure (in microns) when turned ON, and indicates when the gauge is turned OFF. Refer to Figure 3-6. The display indicates pressures between 0 - 999 microns.

  • Page 20: Relay 1 On/Off And Auto/Manual Control

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Relay 1 ON/OFF and Auto/Manual Control The seventh parameter of the MONITOR function displays the ON/OFF status of Relay 1 and whether Relay 1 is in automatic or manual control. Refer to Figure 3-8.

  • Page 21: Monitor Function Operation

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION MONITOR Function Operation Use the following procedure to observe the MONITOR function parameters of the On-Board FastRegen Control Module. NOTE: The On-Line HELP function is always available for use during the operation of the MONITOR function.

  • Page 22: Regeneration Function

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Regeneration Function The REGEN function of the On-Board FastRegen Control Module allows you to initiate a Full or Fast regeneration cycle on your cryopump. Once initiated, the On-Board System automatically sequences your pump through the various phases of the regeneration cycle.
  • Page 23 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION The REGEN program incorporates a number of parameters that are preset at the factory, such as RATE-OF- RISE (10u/min.) and default base pressure (50 microns). The On-Board FastRegen Control Module allows you to reprogram the settings, within limits.

  • Page 24: Figure 3-10: Fast Regeneration Cycle Function Flowchart

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION REGEN HELP REGEN Start Rough out to Base Pressure Delay Start Begin Cooldown Warmup of Cryopump Maintain Pump at Warmup Dwell (Purge OFF) or Below Base Pressure REGEN Complete Pass Fast Rough Test...

  • Page 25: Figure 3-11: Full Regeneration Cycle Function Flowchart

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION REGEN HELP REGEN Start Delay Start Warmup of Cryopump Extended Purge Rough out to Base Pressure Fail Rate-of-Rise Test (ROR) Pass Delay Restart Delay Restart ? of Cryopump...

  • Page 26: Regen On/Off

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Table 3-1: REGEN Function Parameters REGEN Parameter Default Value Range of Values Fast Full REGEN ON/OFF ON/OFF Delay Start 0 - 999.9 hours Delay Restart 0 - 999.9 hours Fast Rough Test (sputter)
  • Page 27 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION REGEN ON/OFF The first parameter of the REGEN function allows you to initialize a Fast or Full regeneration routine. Initially, the current REGEN status is displayed. Once the CONFIRM START message has been displayed, press 2 to start a Full regeneration cycle, or, press 3 to start a Fast regeneration cycle.

  • Page 28: Delay Restart

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Delay Restart The third parameter of the REGEN function allows you to delay the restart of the Full regeneration cycle, if desired. Once the time delay has expired, the cryopump is roughed out again (if applicable) and is cooled down. The Delay Restart display is shown in Figure 3-14.

  • Page 29: Extended Purge

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Extended Purge The fifth parameter of the REGEN function allows you to extend the purge time during Full regeneration to ensure the cryopump has been purged of all contaminants. The extended purge time screen display is shown in Figure 3-16.

  • Page 30: Repurge Cycles

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Repurge Cycles The seventh parameter of the REGEN function allows the user to deter- mine the number of repurge cycles that are performed during a Full regen- eration if the pump fails to rough out to the user determined base pressure as shown in Figure 3-18.

  • Page 31: Rate-Of-Rise

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Rate-of-Rise The ninth parameter of the REGEN function allows you to establish the micron/minute rate in which the Rate-of-Rise (ROR) test is performed during a Full regeneration. The ROR display is shown in Figure 3-20.

  • Page 32: Rough Valve Interlock

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Rough Valve Interlock The eleventh parameter of the REGEN function allows the On-Board roughing valve to operate independent of the rough valve grouping when Rough Valve Interlock is set to OFF (0). The Rough Valve Interlock display is shown in Figure 3-22.

  • Page 33: Power Fail Recovery Temperature

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION POWER FAIL ON Last MONITOR CONTROL Next REGEN RELAYS Clear SERVICE HELP Enter ® ON-BOARD Figure 3-23: Power Fail Recovery Display Power Fail Recovery Temperature The thirteenth parameter of the REGEN function allows you to establish a...

  • Page 34: Regen Function Programming

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION REGEN Function Programming Use the following procedures to program individual REGEN function parameters of the On-Board FastRegen Control Module. Initiate REGEN 1. Press the REGEN key on the keypad/display. The current REGEN status is displayed.

  • Page 35: Delay Restart

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Delay Restart 1. Press the REGEN key on the keypad/display. The current REGEN status is displayed. 2. Press the Next key until the current delay restart time value is displayed in hours.

  • Page 36: Extended Purge

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Extended Purge 1. Press the REGEN key on the keypad/display. The current REGEN status is displayed. 2. Press the Next key until the extended purge value is displayed in minutes. 3. Press the Enter key. The current value is underlined and ready to accept a new value.

  • Page 37: Base Pressure

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION 3. Press the Enter key. The current value is underlined and ready to accept a new value. 4. Press the numeral keys for the desired number of repurge cycles.

  • Page 38: Rate-Of-Rise (Ror) Cycles

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION 5. Press the Enter key. ROR programming is complete. 6. Press the MONITOR key. The On-Board microprocessor will monitor system operation. Rate-of-Rise (ROR) Cycles 1. Press the REGEN key on the keypad/display. The current REGEN status is displayed.

  • Page 39: Power Failure Recovery

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Power Failure Recovery 1. Press the REGEN key on the keypad/display. The current REGEN status is displayed. 2. Press the Next key until the current mode for power failure recov- ery is displayed.

  • Page 40: Performing A Fast Or Full Regeneration Cycle

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION NOTE: If the cryopump temperature stays lower than the setpoint, the cryopump is restarted. The cryopump has 30 minutes for the second stage temperature to cool below 17K. If this temperature is not achieved, the display will read POWER FAILURE - CHECK CRYO TEMP.

  • Page 41: Regen Cycle Examples

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION REGEN Cycle Examples The flowcharts in Figures 3-25 and 3-26 provide you with examples of the typical REGEN cycle for On-Board Cryopumps. NOTE: The values in these examples are for discussion purposes only.
  • Page 42 CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION From page 3-27 Displays the current pressure (125 µ) and the base pressure to be achieved (50 µ). The cryopump is roughed out until the base ROUGH 125 µ /50 µ pressure is reached.
  • Page 43 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION From page 3-28 If a DELAY RESTART time has been programmed, the following events occur: - The On-Board FastRegen Control Module backfills the cryopump with purge gas and waits the programmed DELAY RESTART time DLY RESTART 20.5 HRS.

  • Page 44: Figure 3-26: On-Board Cryopump Fast Regeneration Cycle Example

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION START Press REGEN The On-Board FastRegen Control Module is ready to start a Fast regeneration cycle. REGEN OFF Press 1 To Start Regeneration is ready to start. CONFIRM START Press 3 To Confirm Start Confirms the start of the Fast regeneration cycle.
  • Page 45 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION From page 3-30 The rough valve opens and the display shows the current pressure (345µ) and the base pressure to be achieved (50µ). If the pressure does not drop below 1000 microns before the fast rough test time ROUGH 345µ/50µ...

  • Page 46: Service Function

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION SERVICE Function The On-Board FastRegen Control Module SERVICE function allows you to access cryopump identification information, elapsed pump times, and establish password protection as shown in Figure 3-27. The default and range of SERVICE function parameters are listed in Table 3-2. An explanation of each parameter is provided on the following pages.

  • Page 47: Figure 3-27: Service Function Flowchart

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION SERVICE HELP Display Cryopump Serial Number and Module Software Create Password Version Display Lock Mode Network ID ON/OFF Number Parameter Lock Display System ON/OFF Total Operating Hours Zero Auxiliary...

  • Page 48: Serial Number And Software Version

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Table 3-2: SERVICE Function Parameters SERVICE Parameter Default Value Range of Values Serial Number/Software Version Net ID 0 - 9 Elapsed Pump Time Hours Time Since Last Full Regeneration Hours Time Since Last Fast Regeneration...

  • Page 49: Elapsed Pump Time

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Network Identification Number The second parameter of the SERVICE function indicates the position of the network rotary switch on the On-Board FastRegen Control Module. The position of the rotary switch identifies the network address of the cryopump.

  • Page 50: Time Since Last Full Regeneration

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Time Since Last Full Regeneration The fourth parameter of the SERVICE function allows you to display the total number of hours since the last Full regeneration cycle was performed as shown in Figure 3-31. The clock is automatically reset to zero upon the completion of the last Full regeneration cycle.

  • Page 51: Password

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Password The sixth parameter of the SERVICE function allows you to create or display a password. A password allows a level of system security to prevent unauthorized users from accessing SERVICE functions. The password display screen is shown in Figure 3-33.

  • Page 52: Parameter Lock

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Parameter Lock The eighth parameter of the SERVICE function prevents an unauthorized user from accessing all programmable REGEN parameters and relay setpoints. When an attempt is made to change a programmable setpoint with Parameter Lock ON, the CHANGES LOCKED message is displayed as shown in Figure 3-35.

  • Page 53: Zero Cryo Thermocouple

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Zero Cryo Thermocouple The tenth parameter of the SERVICE function, as shown in Figure 3-37, resets the cryo thermocouple gauge to zero. The cryo thermocouple gauge reading is displayed until the gauge is set to zero.

  • Page 54: Service Function Operation

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION SERVICE Function Operation Use the following procedures to operate the SERVICE function parameters of the On-Board FastRegen Control Module. Serial Number and Software Version 1. Press the SERVICE key on the keypad/display. The serial number and software version information are displayed.
  • Page 55 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Time Since Last Fast Regeneration 1. Press the SERVICE key on the keypad/display. The serial number and software version information are displayed. 2. Press the Next key until the Fast RGN Hours are displayed.
  • Page 56 CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Parameter Lock NOTE: The Parameter Lock parameter cannot be accessed unless a password has been entered. 1. Press the SERVICE key on the keypad/display. The serial number and software version information are displayed.
  • Page 57 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Zero Cryo Thermocouple NOTE: The Zero Cryo Thermocouple parameter cannot be accessed unless a password has been entered. NOTE: The cryo thermocouple gauge must be turned ON and under a...

  • Page 58: Control Function

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION CONTROL Function The CONTROL function within the On-Board FastRegen Control Module allows you to turn the On-Board Cryopump, plus selected gauges, valves, and relays ON or OFF. These functions can be used during manual regeneration and system diagnosis.

  • Page 59: Figure 3-39: Control Function Flowchart

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION CONTROL HELP Display Cryopump ON/OFF and Second Stage Temp Display A TC ON/OFF and TC Pressure Display Cryo TC ON/OFF and TC Pressure Display Rough Valve Open/Closed Display Purge Valve...

  • Page 60: Cryopump On/Off And Second Stage Temperature

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Table 3-3: CONTROL Function Parameters Default CONTROL Parameter Range of Values Value Cryopump ON/OFF ON/OFF Aux TC ON/OFF ON/OFF Cryo TC ON/OFF ON/OFF Rough Valve Open/Closed Closed Open/Closed Purge Valve Open/Closed Closed Open/Closed...

  • Page 61: Aux Tc On/Off And Tc Pressure

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Aux TC ON/OFF and TC Pressure The second parameter of the CONTROL function allows you to turn the auxiliary thermocouple gauge ON or OFF. The keypad/display shows the ON/OFF status of the thermocouple pressure as shown in Figure 3-41.

  • Page 62: Rough Valve Open/Closed

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Rough Valve Open/Closed CAUTION Opening the rough valve when the On-Board Cryopump is turned ON may cause oil from the roughing pump to backstream into the vacuum chamber and contaminate the cryopump arrays. A message is dis- played on the keypad/display warning you about this potential problem.

  • Page 63: Purge Valve Open/Closed

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Purge Valve Open/Closed CAUTION Opening the purge valve when the On-Board Cryopump is turned ON may contaminate the cryopump arrays. A message is displayed on the keypad/display warning you about this potential problem.

  • Page 64: Relay 1 On/Off And Auto/Manual Control

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Relay 1 ON/OFF and Auto/Manual Control The sixth parameter of the CONTROL function allows you to turn relay 1 ON or OFF and select between automatic or manual control as shown in Figure 3-45. Manual control is typically used during system diagnosis when manual activation of relay 1 is required.

  • Page 65: Control Function Operation

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION CONTROL Function Operation Use the following procedures to operate the CONTROL parameters of the On-Board FastRegen Control Module. Cryopump ON/OFF and Second Stage Temperature 1. Press the CONTROL key on the keypad/display. The ON/OFF status and the second stage temperature of the cryopump are displayed.

  • Page 66: Rough Valve Open/Closed

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Rough Valve Open/Closed 1. Press the CONTROL key on the keypad/display. The ON/OFF status and the second stage temperature of the cryopump are displayed. 2. Press the Next key until the current rough valve status is displayed.

  • Page 67: Relay 2 On/Off And Auto/Manual Control

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Relay 2 ON/OFF and Auto/Manual Control 1. Press the CONTROL key on the keypad/display. The ON/OFF status and the second stage temperature of the cryopump are displayed. 2. Press the Next key until the current status and mode for relay 2 are displayed.

  • Page 68: Relays Function

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION RELAYS Function The RELAYS function within the On-Board FastRegen Control Module allows you to program the setpoint relays to open or close when a vacuum system function occurs. NOTE: Relay activation/deactivation is dependent upon the manner in which the relays are wired, normally open or normally closed.

  • Page 69: Select Relay 1 Or 2

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION RELAYS HELP Select Relay Set Aux TC 1 or 2 pressure limits Displays current Sets relay to activate ON/OFF state and based on cryopump auto/manual state motor ON/OFF...

  • Page 70: Table 3-4:Relays Function Parameters

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Table 3-4: RELAYS Function Parameters RELAYS Parameter Range of Values Relay 1 or 2 1 - 2 Relay ON/OFF, Auto/Manual ON/OFF Auto/Manual First Stage Temperature 30K - 310K Second Stage Temperature 10K - 310K...

  • Page 71: Current State Of Relay On/Off, Auto/Manual

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Current State of Relay ON/OFF, Auto/Manual The second parameter of the RELAYS function allows you to determine whether the relay is ON or OFF and in automatic or manual mode shown in Figure 3-49.

  • Page 72: First Stage Temperature Limits

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION First Stage Temperature Limits The fourth parameter of the RELAYS function allows you to establish the upper and lower first stage temperature limits of the cryopump as shown in Figure 3-51. The upper limit is designated as UL and the lower limit is designated as LL.

  • Page 73: Cryo Thermocouple Pressure Limits

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Cryo Thermocouple Pressure Limits The sixth parameter of the RELAYS function allows you to establish the upper and lower pressure limits of the cryopump thermocouple gauge as shown in Figure 3-53.

  • Page 74: Cryopump

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Cryopump The eighth parameter of the RELAYS function allows you to program the setpoint relay to activate when the cryopump motor is turned ON and deactivate when the motor is turned OFF as shown in Figure 3-55.

  • Page 75: Roughing Valve

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Roughing Valve The tenth parameter of the RELAYS function allows you to program the setpoint relay to activate when the rough valve is opened and deactivate when the rough valve is closed as shown in Figure 3-57.

  • Page 76: Relays Function Operation

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION RELAYS Function Operation Only one Relay parameter can be in control of the relay at anytime. Once a Relay parameter has been programmed, your selected relay will be placed in automatic mode as indicated by the FNC = CRYOPUMP message.

  • Page 77: Programming Second Stage Temperature Limits

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Programming Second Stage Temperature Limits This procedure programs relay 1 or 2 to activate/deactivate when either of the cryopump second stage temperature limits are reached. 1. Press the RELAYS key on the keypad/display.

  • Page 78: Programming Auxiliary Thermocouple Pressure Limits

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION limit (UL) value. 7. Using the keypad, enter the new upper limit value. 8. Press the Enter key. The limit values are programmed. 9. Press the MONITOR key. The On-Board microprocessor will monitor system operation.

  • Page 79: Regen Track

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION 4. Press the Enter key. FNC=CRYOPUMP will be displayed. The relay is programmed. 5. Press the MONITOR key. The On-Board microprocessor will monitor system operation. REGEN Track This procedure programs relay 1 or 2 to activate/deactivate when the cryopump is in a regeneration cycle.

  • Page 80: Time Delay

    CRYOGENICS Programming and Operation HELIX TECHNOLOGY CORPORATION Time Delay This procedure programs relay 1 or 2 to delay activation/deactivation by a user determined amount of time. 1. Press the RELAYS key on the keypad/display. 2. Press 1 or 2 depending upon which relay is being selected. The selected relay number along with the ON/OFF and Auto/Manual status are displayed.

  • Page 81: Table 3-5:On-Board Fastregen Control Module Software Parameters

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table 3-5: On-Board FastRegen Control Module Software Parameters MONITOR REGEN SERVICE CONTROL RELAYS Cryopump REGEN ON/OFF Serial Number/ Cryopump Relay 1 or 2 ON/OFF Software Version ON/OFF Second Stage...

  • Page 82: Section 4 - On-Board Module Replacement

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Section 4 - On-Board Module Replacement Module Ordering Information The serial numbers of the On-Board Cryopump and On-Board Module must match to ensure module/pump calibration. Refer to Appendix A and...
  • Page 83 CRYOGENICS On-Board Module Replacement HELIX TECHNOLOGY CORPORATION NOTE: The safety interlock screw must be in the vertical position before the Power In cable can be connected. If necessary, turn the screw out 1/4 turn to set the screw in a vertical position as shown in Figure 4-1.

  • Page 84: Appendix A - Customer Support Centers

    CRYOGENICS Appendix A - Customer Support Centers HELIX TECHNOLOGY CORPORATION Appendix A - Customer Support Centers Introduction Refer to Table A-1 for the nearest Customer Support Center for technical assistance or service. North American customers may call 1-800-FOR-GUTS (1-800-367-4887) 24 hours a day, seven days a week.

  • Page 85: Table A-1:Customer Support Center Locations

    CRYOGENICS Appendix A - Customer Support Centers HELIX TECHNOLOGY CORPORATION Table A-1: Customer Support Center Locations United States and Canada United States and Canada CTI-CRYOGENICS CTI-CRYOGENICS Mansfield Corporate Center 3350 Montgomery Drive Nine Hampshire Street Santa Clara, CA 95054, U.S.A.
  • Page 86 CRYOGENICS Appendix A - Customer Support Centers HELIX TECHNOLOGY CORPORATION Table A-1: Customer Support Center Locations (Continued) Japan Korea CTI-CRYOGENICS CTI-CRYOGENICS Daido Hoxan Engineering Co., Ltd. Zeus Company, Ltd. 1-8, Nakahama-cho Zeus Building Amagasaki-shi 3-16, Yangjae-Dong, Sochu-Ku Hyogo Seoul, 137-130...
  • Page 87 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Appendix B - On-Board Module RS-232 Interface Protocol Format The format of RS-232 messages between a computer device (the HOST) and the On-Board module (slave) is the same for both directions of message flow (HOST transmitted or slave transmitted).

  • Page 88: Appendix B - On-Board Module Rs-232 Interface Protocol Format

    CRYOGENICS Appendix B - On-Board Module RS-232 Interface Protocol Format HELIX TECHNOLOGY CORPORATION If this sum matches the final character preceding the CR terminator, then the message is validated and processed by the receiver. If not, then an error has occurred and the action taken depends on whether the receiver is the HOST or slave unit.
  • Page 89 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION There are three categories of error messages. Each category has two possi- ble messages. The first is an error under normal conditions. The second is an error message that also signals a recent power loss. If a power loss sig- nal is received, this flag can be reset by using the S command .
  • Page 90 CRYOGENICS Appendix B - On-Board Module RS-232 Interface Protocol Format HELIX TECHNOLOGY CORPORATION Checksum of hex 40 data field: Bits 76543210 Sum = 40 = 01000000 Bits 7 and 6 aligned for 00000001 X0R result 01000001 Mask D5,D0 00000001 Addend "0"...
  • Page 91 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION IBM-PCxT On-Board Module 2 R x D <- <- T x D 2 3 T x D -> <- R x D 3 Shield 9 Pin Male GND 7...

  • Page 92: Table B-1:On-Board Module Rs-232 Commands

    CRYOGENICS Appendix B - On-Board Module RS-232 Interface Protocol Format HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands Command Parameter Description [0 - 1] | [?] Turns the pump ON and OFF and provides status: 0 - Turns pump OFF...
  • Page 93 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands (Continued) Command Parameter Description [0 - 6,A,G,S] Reads/Sets a regeneration parameter. [5 digit number] | [?] 0 = Pump restart delay (minutes) range = 0 - 59994...
  • Page 94 CRYOGENICS Appendix B - On-Board Module RS-232 Interface Protocol Format HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands (Continued) Command Parameter Description [NONE] [?] Rough valve interlock. If no parameter is specified, the valve token is given to the pump. Once the pump has the token, it will keep it until it is done with the rough valve.
  • Page 95 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands (Continued) Command Parameter Description 1 - 3 Send back various status indicators. Status 1 01H = Pump ON 02H = Rough valve ON...
  • Page 96 CRYOGENICS Appendix B - On-Board Module RS-232 Interface Protocol Format HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands (Continued) Command Parameter Description [1-2] This command programs the setpoint relays. The first parame- {[0-8,ABCF] ter tells the relay number (1 or 2). The second parameter is one [4 digit number] of two forms.
  • Page 97 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands (Continued) Command Parameter Description Reads first 8 characters of pump serial number. Reads remaining 3 characters of pump serial number (if any exist).
  • Page 98 CRYOGENICS Appendix B - On-Board Module RS-232 Interface Protocol Format HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands (Continued) Command Parameter Description None Read error code result of REGEN operation. Returns one of eight characters as defined in Appendix C, should only be used when REGEN response V is returned.
  • Page 99 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands (Continued) Command Parameter Description None Returns an internal interval timer value in minutes. When in the appropriate phase, this value represents the time remaining in the phase (delay start, cryo restart, purge time).
  • Page 100 CRYOGENICS Appendix B - On-Board Module RS-232 Interface Protocol Format HELIX TECHNOLOGY CORPORATION Table B-1: On-Board Module RS-232 Commands (Continued) Command Parameter Description None Inquires pump for several regeneration flag conditions com- bined as bits in one response. The bits are biased by "@" for ASCII printable results.

  • Page 101: Appendix C - Rs-232 Regeneration Responses

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Appendix C - RS-232 Regeneration Responses Introduction Appendix C describes the On-Board Cryopump REGEN responses which are requested by host computer O status command. The regeneration responses inform the host computer of the regeneration cycle status of the On-Board Cryopump.

  • Page 102: Table C-1:Rs-232 Regen Responses And Descriptions

    CRYOGENICS Appendix C - RS-232 REGEN Responses HELIX TECHNOLOGY CORPORATION Table C-1: RS-232 REGEN Responses and Descriptions REGEN Response Description Cryopump OFF B, C, E ,^, ] WARM-UP - During warm-up you may also want to display the actual second stage temperature and the temperature it is attempt- ing to reach.
  • Page 103 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table C-1: RS-232 REGEN Responses and Descriptions (Continued) REGEN Response Description I,J,K, T, a*, b*, j*, ROUGH TO BASE Purging is completed and the pump is being roughed to a base pres- sure.
  • Page 104 CRYOGENICS Appendix C - RS-232 REGEN Responses HELIX TECHNOLOGY CORPORATION Table C-1: RS-232 REGEN Responses and Descriptions (Continued) REGEN Response Description M,N, c*, d*, o* COOLDOWN This display shows the actual second stage temperature and the target temperature which is always 17K. The command is: K actual tem-...
  • Page 105 CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Table C-1: RS-232 REGEN Responses and Descriptions (Continued) REGEN Response Description DELAY RESTART This countdown timer delays starting the pump for cooldown mode after it has been warmed up, roughed out, and passed the ROR test.
  • Page 106 CRYOGENICS Appendix C - RS-232 REGEN Responses HELIX TECHNOLOGY CORPORATION Table C-1: RS-232 REGEN Responses and Descriptions (Continued) REGEN Response Description PURGE COORD WAIT The pump is in a wait mode, waiting for all of the pumps to begin the re-purge cycle.

  • Page 107: Appendix D - Rs-232 Power Failure Recovery Messages

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Appendix D - RS-232 Power Failure Recovery Messages Introduction Appendix D describes the On-Board Cryopump power failure recovery messages which are requested by host computer commands. Power failure recovery messages inform the host computer of the power failure recovery status of the On-Board Cryopump.

  • Page 108: Appendix E - On-Board Keypad/Display Error Messages

    CRYOGENICS On-Board FastRegen Control Module Programming and Operation Instructions HELIX TECHNOLOGY CORPORATION Appendix E - On-Board Keypad/Display Error Messages Introduction Appendix E describes the fault messages that can be tested for in the On-Board Module. Currently, each module must be polled for this information.

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