Rough Valve Open/Closed - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

Programming and Operation

Rough Valve Open/Closed

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3-48
Opening the rough valve when the On-Board Cryopump is turned ON
may cause oil from the roughing pump to backstream into the vacuum
chamber and contaminate the cryopump arrays. A message is dis-
played on the keypad/display warning you about this potential problem.
The fourth parameter of the CONTROL function allows you to open or
close the rough valve as shown in Figure 3-43.
ROUGH V OPEN
3
MONITOR CONTROL
6
REGEN RELAYS
9
SERVICE HELP
Enter
oo ®
. ON-BOARD
Figure 3-43: Rough Valve Open/Closed Display
CAUTION
ROUGH V CLOSED
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C TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
MONITOR CONTROL
REGEN RELAYS
SERVICE HELP
oo ®
ON-BOARD
P/N 8040406