Figure 3-26: On-Board Cryopump Fast Regeneration Cycle Example - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

Programming and Operation
START
Press REGEN
REGEN OFF
Press 1 To Start
CONFIRM START
Press 3 To
Confirm Start
PRESS 3
DLY START 15.5 HRS.
WARM-UP 125K
Continued on page 3-31

Figure 3-26: On-Board Cryopump Fast Regeneration Cycle Example

3-30
The On-Board FastRegen Control Module is ready to start a Fast
regeneration cycle.
Regeneration is ready to start.
Confirms the start of the Fast regeneration cycle.
A DELAY START has been programmed. The On-Board
FastRegen Control Module will wait 15.5 hours before the
REGEN cycle begins.
The cryopump shuts OFF , the purge valve opens, and purging starts.
Shows current second stage temperature (125K). Cryopump turns
back ON after purge gas check. Heaters are turned ON and the
arrays are warmed up. Purge shuts OFF and pump sits for a short
period of time (approximately 1 minute) to allow second stage gases to
boil OFF.
NOTE: In the case of FastRegen Control Modules for Ion
Implanters, several rough and purge cycles occur during the
warmup phase. These cycles help remove hydrogen gas which
may be present in the cryopump.
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C TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
P/N 8040406