Cryopump; Regeneration - HELIX CTI-CRYOGENICS On-Board FastRegen Programming And Operation Instructions

Programming and Operation

Cryopump

Regeneration

3-60
The eighth parameter of the RELAYS function allows you to program the
setpoint relay to activate when the cryopump motor is turned ON and
deactivate when the motor is turned OFF as shown in Figure 3-55.
Last
3
1 2
Next
4 5 6
Clear
7 8 9
- 0 .
Figure 3-55: Cryopump Display
The ninth parameter of the RELAYS function allows you to program the
setpoint relay to activate when the cryopump is in regeneration mode as
shown in Figure 3-56.
Last
3
1 2
Next
4 5 6
Clear
7 8 9
- 0 .
Figure 3-56: Regeneration Display
CRYOPUMP
MONITOR CONTROL
REGEN RELAYS
SERVICE HELP
Enter
oo ®
ON-BOARD
REGEN TRACK
MONITOR CONTROL
REGEN RELAYS
SERVICE HELP
Enter
oo ®
ON-BOARD
-
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