Programming and Operation
Cryopump ON/OFF
Second Stage Temp
First Stage and Second
and AUX TC Pressure
3-2
MONITOR
Stage Temp,
First Stage
Temp
Second Stage
Temp
Figure 3-1: MONITOR Function Flowchart
HELP
AUX TC Gauge Pressure
Cryo TC Gauge Pressure
Relay 1 ON/OFF
Auto/Manual Control
Relay 2 ON/OFF
Auto/Manual Control
-
C
TI
CRYOGENICS
HELIX TECHNOLOGY CORPORATION
ON/OFF
ON/OFF
P/N 8040406