Section 1 Cryopump Description; Typical Cryo-U - Ulvac CRYO-U Series Instruction Manual

CRYO-U Cryopump Instruction Manual
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1. CRYOPUMP DESCRIPTION
1.1 General ......................................................................................... 1-1
1.2 Specifications ................................................................................ 1-2
1.3 Environmental Requirements ........................................................ 1-3
General
1.1
CRYO-U
cryopump system is a pump of the type which captures and amasses gas
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molecules by making them condense or adsorb to a cryogenic temperature surface.
Because the cryopump has a big pumping speed in the large pressure range to
almost all gas, it can make a pure high / ultra high vacuum easily.
The system has adopted a two-stage type small refrigerator with the closed cycle
using helium gas as a refrigerant in order to make the cryogenic surfaces (of 20K or
less and 80K or less). It is easily-handled and continuous operation stabilized for a
long time can be performed.
As shown in Figure 1-1, cryopump system consists of a cryopump assembly
(including refrigerator unit), a compressor unit, flexible hoses, and several cables.
Refrigerator unit
Figure 1-1
Cryopump assembly
Flexible hoses
Refrigerator power cable
Typical CRYO-U ® Cryopump System
ULVAC CRYOGENICS INCORPORATED
Input power cable
Compressor
Cooling water line
unit
1-1