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EX500 Serial System
8 -3. How to install the SI Unit
The following figure shows how to install / remove the SI Unit with / from the Manifold Valve.
Refer to the Catalogues or Technical Instruction Manual of SV and VQC series Manifold Valve
for more details.
M3×10 : 2 pcs.
！ ！ ！ ！
CAUTION
Tight the screws which hold the SI Unit with SUP / EXH Block Ass'y with specified tightening torque.
( Tightening torque : 0.6 N・m )
SUP / EXH Block Ass'y
SI Unit for SV series Manifold
SI Unit for VQC series Manifold
- 33 -
EX## - OME0008
M3×30 : 4 pcs.
SUP / EXH Block Ass'y
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