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PI X-417 Series User Manual

Integrated multi axis system (imas)
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User Manual
X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx
MMa, 16. February 2024
X-417 Series (Redesign 2023)
Integrated Multi Axis System (iMAS)
NOTICE
Read this manual before installing and operating the product!
This document is a product component.
 Read the corresponding sections of this document and of the related documents before
starting any product-related action.
INFORMATION
For details and meaning of your individual product code, refer to p. 18
INFORMATION
Models including a granite base (X-417.xxxx-G1Zxx-xxCxx-xxxx or X-417.xxxx-G2Zxx-xxCxx-xxxx)
require the following additional items for handling:
4 ring bolts DIN 580 M16
•
•
4 plain washers ISO 7093 M20
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,
physikinstrumente.com
Page 1 / 97

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Summary of Contents for PI X-417 Series

  • Page 1 4 ring bolts DIN 580 M16 • • 4 plain washers ISO 7093 M20 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 1 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 2 Procedure for removing the transport safeguard ......................35 Procedure for Affixing the XY Stage to a Suiting Surface ....................42 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 2 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 3 Figures, Commitment, Actuality ........................... 97 Copyright ..................................97 Contact Person, Feedback ............................. 97 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 3 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 4 The manufacturer accepts no liability for accidents at work, damage to the machine, loss of production or disruptions to the process resulting from failure to observe the user manual. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 4 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 5 Illustrations are for basic understanding and may differ from the actual design of the machine. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 5 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 6 Further Applicable Documents / Information on the System Components The components (incl. software) from PI and PI miCos mentioned here are generally described in more detail separately (search for the product name on the website to get the user manual).
  • Page 7  Measures for avoiding the risk. INFORMATION Information in easier handling, further sources of information etc. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 7 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 8 V-664-type stages 420 V 14.0 A L-310-type stages 48 V 1.5 A Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 8 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 9  Obey the common regulations for crane and handling safety.  Obey the handling steps described below. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 9 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 10 Loosening screws and opening the housing can adversely affect your safety and the functional capability of the positioner, and results in loss of warranty. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 10 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 11 An emergency stop must be possible at any time and in any operating condition. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 11 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 12 (wear parts • excluded). Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 12 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 13 11 … the type/presence of a Z stage 15 … the type/presence of a controller Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 13 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 14 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Estimation Table Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 14 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 15 I.e., if you handle the complete system in this example, safety measured should be based on a weight estimation of 660 kg. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 15 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 16 Z stage Z Adapter Cable management / Energy chain Controller Extension cables Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 16 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 17 / 3 m / 5 m Metrology options see corresponding section below Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 17 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 18 Horiz. position of Z stage: n/a Horiz. position of Z stage: Right Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 18 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 19 The related entries in the table for the following example are indicated by yellow background color. “X-417.244R0-G2Z00-422C41-1322” means: • Performance class 2 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 19 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 20 Selectable payloads, mass [kg] XY combination 12.5 Z stage 12.5 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 20 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 21  If applicable, disconnect the cables connecting the stages or the mains input from the controller. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 21 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 22  De-energize the system before; e. g. by switching off the controller or disconnecting the power cord. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 22 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 23 For integration of additional electrical devices: Use the provided system-internal PE contact box for Protective Earth connection. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 23 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 24 M20 and the ring bolts M16. Note: The ring bolts are not included in the scope of delivery. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 24 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 25 Granite base with center of gravity (CoG), spatial view Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 25 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 26 Range” section (p. 18 ff) and use your product ID for determining the mandatory scope. 10. Keep all packaging materials in case the product needs to be returned. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 26 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 27  Check the contents of the packages.  If items are missing, contact service@pi.de. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 27 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 28 To prevent small parts from falling into the mounting holes (shown below), we recommend covering the mounting holes with the plastic caps provided with the product. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 28 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 29 Lower bracket Transport bolt Wrench flat Mounting screw ISO 4762 M6 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 29 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 30 1. Remove the wing grip screws M4 by manually turning them counterclockwise. 2. Remove the wing grip screws M6 by manually turning them counterclockwise. Also Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 30 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 31 4. Using the hex key, turn the illustrated screws of the Y stage counterclockwise and remove them. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 31 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 32 MMa, 16. February 2024 5. Manually turn each of the star grips counterclockwise and lift/remove it. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 32 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 33 8. Place the stud bolt puller onto one of the studs so that the stud is inserted, following the scheme below. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 33 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 34 11. Repeat the two previous steps for the remaining relevant stud. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 34 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 35 Procedure for removing the transport safeguard 1. Remove the wing grip screws M4 by manually turning them counterclockwise. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 35 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 36 2. Remove the wing grip screws M6 by manually turning them counterclockwise. Also remove the related washers. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 36 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 37 X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 3. Lift and remove the upper bracket. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 37 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 38 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 38 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 39 5. Using the wrench AF 13 mm, turn each of the transport bolts counterclockwise to remove it. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 39 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 40 MMa, 16. February 2024 6. Rotate the lower bracket for some degrees and pull it away from the Y stage. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 40 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 41 8. Using the wrench AF 13 mm, turn each of the two remaining bolt parts counterclockwise to remove it. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 41 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 42 X component must cover those of the mounting surface. 4. Insert the provided mounting screws in the mounting holes of the X stage Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 42 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 43 MMa, 16. February 2024 5. Using the hex key, tighten the mounting screws with a torque of max. 3 Nm. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 43 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 44 Hex key SW 5 mm or compliant tool Procedure 1. At the corresponding position, place the eccentric wheel. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 44 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 45 3. Using the hex key, turn the mounting screw until the eccentric wheel is nearly fixed. 4. Turn the eccentric wheel until it is in firm contact with the X component’s base body. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 45 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 46 If you remove the XY stage temporarily, keep the eccentric wheel installed for easy alignment when installing the stage anew. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 46 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 47 (right side of the illustrations) show all applicable mounting interfaces in detail. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 47 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 48 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 48 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 49 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 49 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 50  (Optional:) Alignment pins Ø 4 mm  Suitable hex key / screwdriver or compliant tool Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 50 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 51 3. Use the mounting screws to affix the payload. 4. Check that the payload is attached firmly to the platform of the positioner. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 51 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 52 5: Encoder 0 6: Motor 0 7: Encoder 1 8: Motor 1 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 52 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 53 Note the different cable types. The applicable cables are provided with the ordered system. Option1 : Connecting a Performance Class 1 or Class 3 XY Stage Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 53 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 54 MMa, 16. February 2024 Option 2 : Connecting a Performance Class 2 XY Stage Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 54 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 55 • Option 2: Performance class 2 (L-412-type stage) Option 1 (L-812-type stage) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 55 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 56 X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Option 2 (L-412-type stage) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 56 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 57 Depending on the stage type, different diagrams apply. Option L: Connect the lift Z stage Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 57 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 58 X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Option R: Connect the Rotation Stage Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 58 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 59 The zero point of the axes is defined by the middle position of the corresponding platform (according to the complete travel range, see item “O” in the illustration) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 59 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 60 (e. g.: The product code, e.g., V-417.096025E0). For location of the product label, also refer to p. 62 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 60 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 61 (service@pi.de). Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 61 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 62 Its location depends on the model (see arrow in the illustrations below). Minimum configuration (XY combination, schematic) XY combination with base plate, schematic Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 62 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 63 PI miCos GmbH Freiburger Strasse 30 79427 Eschbach, Germany Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 63 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 64 Protection class according to EN 61140 / VDE 0140-1 Degree of pollution according to EN 60664 / VDE 0110-1 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 64 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 65 100 , 200 , 300 407 100 , 200 , 300 , 400, 500 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 65 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 66 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 66 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 67 100 , 200 , 300 , 400 407 100 , 200 , 300 , 400, 500 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 67 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 68 150 , 350 150 , 350 150 , 350 , 550 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 68 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 69 Additional Space Requirements and Details 3 stage (lift/rotation) Performance Class 1 (L-812 Stage Types for XY Stage) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 69 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 70 163,5 214,5 163,5 316,0 163,5 214,5 214,5 316,0 214,5 316,0 316,0 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 70 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 71 MMa, 16. February 2024 Performance Class 2 (L-412 Stage Types for XY stage) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 71 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 72 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 72 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 73 MMa, 16. February 2024 Performance Class 3 (V-417 Stage Types for XY Stage) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 73 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 74 565 689 565 651 282,5 282,5 670 798 670 651 335,0 335,0 670 798 670 760 335,0 335,0 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 74 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 75 X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Base plates (Granite) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 75 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 76 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Z Adapter Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 76 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 77 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 77 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 78 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 78 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 79 X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Installed Z Stage Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 79 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 80 H Pos 1 H Pos 2 H Pos 3 H Pos 1 H Pos 2 H Pos 3 H Pos 1 H Pos 2 H Pos 3 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 80 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 81 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Transport Lock Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 81 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 82 User Manual X417UM0005, applies to X-417.xxxxx-GxZxx-xxxCxx-xxxx MMa, 16. February 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 82 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 83 The controllers used for the iMAS models feature different connectors (and front side layout). For any used type, however, the same dimensions apply. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 83 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 84 For any applicable G-901-type controller, the “middle” rack module is relevant for connecting the XY stage. Abbreviations M: Motor, E: Encoder Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 84 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 85 Clock output - DATA + Data output + DATA - Data output - Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 85 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 86 Phase 3 PE PE Protective earth PTC+ Temperature + PTC- Temperature + Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 86 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 87 Temperature + PTC- Temperature + Motor brake power Motor brake GND Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 87 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 88 Phase 2 Motor brake power (DC 24 V) Motor brake GND Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 88 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 89 Temperature + 15 CLOCK - Clock output - 16 - 17 - Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 89 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 90 Temperature + PTC- Temperature + Outer shielding PE PE Protective earth Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 90 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 91 13 PTC+ Temperature + 14 PTC- Temperature - 15 SH (Shield) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 91 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 92 Temperature + PTC- Temperature + Outer shielding PE PE Protective earth Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 92 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 93 13 PTC+ Temperature + 14 PTC- Temperature - 15 SH (Shield) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 93 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 94 13 PTC+ Temperature + 14 PTC- Temperature - 15 SH (Shield) Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 94 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 95 Temperature + PTC- Temperature + Motor brake power Motor brake GND Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 95 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, physikinstrumente.com...
  • Page 96 The manufacturer reserves the right to make technical changes within the scope of improving the usability and further development. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 96 / 97 Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,...
  • Page 97 Copyright © 2024 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe, Germany. The product and the associated technical documentation are protected by copyright. Information on any brand names used can be found under: https://www.physikinstrumente.com/en/about-pi/legal-information/...