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Pfeiffer Vacuum HiPace 400 M Operating Instructions Manual
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Pfeiffer Vacuum HiPace 400 M Operating Instructions Manual

Pfeiffer Vacuum HiPace 400 M Operating Instructions Manual

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HiPace 400 M
Turbopump
Operating Instructions
EN

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Summary of Contents for Pfeiffer Vacuum HiPace 400 M

  • Page 1 HiPace 400 M Turbopump Operating Instructions...
  • Page 2 Spare parts HiPace 400 M ........
  • Page 3 1 About this manual 1.1 Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refer to the current state of the product's development.
  • Page 4 About this manual Pictograph Prohibition of an action or activity in connection with a source of danger, definitions the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan- ger, the disregarding of which may result in serious accidents Important information about the product or this document...
  • Page 5 Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in- stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
  • Page 6 Safety ● Do not loosen any plug connection during operations. ● Wait for the rotor to reach standstill before peforming work on the high vacuum flange. ● Keep leads and cables well away from hot surfaces (> 70 °C). ● Never fill or operate turbopump with cleaning agent. ●...
  • Page 7 Safety ● The vacuum pump may only be used to generate a vacuum. ● Only operate the turbopump with an approved backing pump. 2.4 Improper use Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as usage for purposes deviating from those mentioned above, especially: ●...
  • Page 8 Transport and storage 3 Transport and storage 3.1 Transport  Reuse the transport container. Vacuum pumps should be transported or shipped in the original packing only.  Only remove the protective covers from the high vacuum and the fore-vacuum side immediately before connection.
  • Page 9 Made in Germany Fig. 1: Example for a rating plate ● HiPace 400 M with TM 700 and 48 V DC ± 5 % Scope of delivery ● Venting valve PM Z01 291 ● Protective cover for the high vacuum flange and the fore-vacuum flange...
  • Page 10 Product description 4.2 Function The turbopump HiPace 400 M forms a complete unit together with the electronic drive and magnetic bearing unit TM 700 (in the following just: "electronic drive unit"). For the voltage supply only Pfeiffer Vacuum power supplies may be used (e.g.TPS or DCU).
  • Page 11 Product description 4.3 Range of application The pump HiPace 400 M must be installed and operated under the following ambient conditions: Installation location weather protected (indoors) Protection category IP 54 Protection class Ambient temperature +5 °C to +35 °C with air cooling +5 °C to +40 °C with water cooling...
  • Page 12  Only use Pfeiffer Vacuum original components (accessories) for installation. Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in- stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
  • Page 13 Fig. 3: Example: How to secure against shifting and tipping by external tremors The installation of a Pfeiffer Vacuum centering ring with splinter shield or protection Use of a splinter screen in the high vacuum flange protects the turbopump against foreign bodies coming shield or protection from the chamber.
  • Page 14  The combination of different flange types is impermissible in any case.  Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis- sible fastening. NOTICE...
  • Page 15 For the installation of the flange connections the following components are available: Installation of ISO-K flange with ISO-K ● the valid mounting kit of the Pfeiffer Vacuum accessories programme flange ● protection screen or splinter shield are optionally  Mind that the sealing surfaces are not damaged.
  • Page 16 The connection types for installation of CF to CF flange are "stud screw and blind hole" as well as "hex screw and through hole". The following elements are required: ● the valid mounting kit of the Pfeiffer Vacuum accessories programme ● A copper seal ●...
  • Page 17 DC in Fig. 5: Conneting the TM 700 to a power supply pack using a Pfeiffer Vacuum cable  Switch off switch S1 on the power pack (position "0").  Insert the connection cable with the socket in the connection "DC in" on the electronic drive unit and close the bayonet lock.
  • Page 18 Installation The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut-down or Venting valve power failure. The permissible connection pressure is max. 150 kPa absolute. Fig. 6: Connecting the venting valve 24  Plug in and fix the accessory’s control lead to the corresponding accessory connection port on the TM 700.
  • Page 19 Counter sunk screw  Insert the threaded adapter into the designated borehole of the pump lower part.  Fix the Pfeiffer Vacuum air cooling unit to the holes of the turbopump and the threaded adapter using two screws.  Plug in and fix the accessory’s control lead to the corresponding accessory connection port on the TM 700.
  • Page 20 Installation The turbopump and vacuum chamber can be heated to reach the final pressure more Heating jacket quickly. Use of a heating jacket is only permissible for pumps with the high vacuum flange in stainless steel design. The heating duration depends on the degree of contamination as well as the final pressure to be reached and should be at least 4 hours.
  • Page 21 ● When operating the pump with more than 50 % of the maximum gas throughput, seal- ing gas must be used to ensure rotor cooling. ● The sealing gas flow rate amounts 12-15 sccm for the HiPace 400 M. Sealing gas supply without control valve Fig.
  • Page 22  Install the sealing gas supply (e.g. inert gas) via a connection adapter or on the inlet side (G 1/8") of the control valve. The turbopumps HiPace 400 M with TM 700 have water cooling as standard equipment. Water cooling ●...
  • Page 23  Ensure the gas mode is correctly set.  Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80). In rare cases, the magnetic bearing sensors may trigger re-calibration on enabling of the Magnetic bearing cal- drive electronics.
  • Page 24 "remote" connection  Consider the following manuals for the operation via remote control: ● Operating instructions "Electronic drive unit TM 700"  Consider the following manuals for the operation via Pfeiffer Vacuum display and con- Operation with DCU trol units: or HPU ●...
  • Page 25 Balance ance is expressed as a percentage of the maximum possible rotor imbalance due to the drive electronics and can be viewed via the RS-485 interface using the Pfeiffer Vacuum display and control unit or PC. 6.5 Switching off and venting...
  • Page 26  Only vent the pump via the provided venting valve.  Do not replace the Pfeiffer Vacuum venting valve by other venting units.  It is recommended first to vent via the Pfeiffer Vacuum venting valve until a rotation speed of 6000 rpm, before using additional venting units.
  • Page 27  Decontaminate affected parts before carrying out maintenance work. NOTICE Disclaimer of liability Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or operating malfunctions due to improperly performed maintenance. The liability and war- ranty entitlement expires.
  • Page 28 Maintenance / replacement  Do not exercise any mechanical load on the electronic drive unit.  Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if neces- sary.  Only separate the pump and the electronic drive unit from each other after disconnect- ing the supply voltage and the complete standstill of the pump.
  • Page 29  Check turbopump for contamination and moisture.  Clean the turbopump externally with a lint-free cloth and little industrial alcohol.  If necessary, have Pfeiffer Vacuum Service clean the turbopump completely.  Installation and commissioning in accordance with the operating instructions.
  • Page 30  Reset via pin 13 on the "REMOTE" connection  Differentiated malfunction display is possible via "RS 485"  Contact the Pfeiffer Vacuum Service If no Pfeiffer Vacuum display and control unit is available, please contact the Pfeiffer Vacuum Service.
  • Page 31 The following steps are necessary to ensure a fast, smooth servicing process:  Download the forms "Service Request" and "Declaration on Contamination".  Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum service address.
  • Page 32 Spare parts HiPace 400 M 11 Spare parts HiPace 400 M Item Designation Size Order number Notes Pieces Order qty. 15.5 Swiveling screw-fitting P 4131 007 E water cooling unit Electronic drive unit TM 700 according to the rating plate...
  • Page 33 Accessories 12 Accessories Designation DN 100 ISO-K DN 100 CF-F DN 100 ISO-F TPS 400, mains pack for wall/standard rail fitting PM 061 343 -T PM 061 343 -T PM 061 343 -T Wall rail fitting TPS 110/180/310/400 PM 061 392 -T PM 061 392 -T PM 061 392 -T TPS 401, mains pack 19"...
  • Page 34 Accessories Designation DN 100 ISO-K DN 100 CF-F DN 100 ISO-F Heating jacket, screened, for HiPace 400 / 700 with TC 400 / TCP 350, PM 071 271 -T 115 V AC, UL plug Mounting kit for HiPace 400, DN 100 ISO-K, including coated centering PM 016 380 -T ring Mounting kit for HiPace 400, DN 100 ISO-K, including coated centering...
  • Page 35 Technical data and dimensions 13 Technical data and dimensions 13.1 General Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps: ● Recommendations of PNEUROP committee PN5 ● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum- pump performance - General description"...
  • Page 36 Technical data and dimensions Parameter HiPace 400 M HiPace 400 M HiPace 400 M Interfaces RS-485, Remote RS-485, Remote RS-485, Remote...
  • Page 37 DN 100 ISO-K DN 25 ISO-KF / G1/4" Ø Ø150 G1/8" Ø8 / G1/4" (2x) M8 (6x) Fig. 14: HiPace 400 M, DN 100 ISO-K DN 100 ISO-F DN 25 ISO-KF / G1/4" Ø Ø150 G1/8" Ø8 / G1/4" (2x) M8 (6x) Fig.
  • Page 38 In addition, the product cited below satisfies all relevant provisions of EC directive "Elec- tromagnetic Compatibility" 2004/108/EC . The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. HiPace 400 M Guidelines, harmonised standards and national standards and specifications which...
  • Page 39 Vacuum solutions Pfeiffer Vacuum stands for innovative and custom from a single source vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range From a single component to complex systems: We are the only supplier of vacuum technology of products that provides a complete product portfolio.