Pfeiffer Vacuum HiPace 10 Operating Instructions Manual
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Pfeiffer Vacuum HiPace 10 Operating Instructions Manual

Turbopump
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HiPace 10
Turbopump
Operating Instructions
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Summary of Contents for Pfeiffer Vacuum HiPace 10

  • Page 1 HiPace 10 Turbopump Operating Instructions...

  • Page 2: Table Of Contents

    Spare parts HiPace 10 ........

  • Page 3: About This Manual

    About this manual Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refer to the current state of the product's development.
  • Page 4 About this manual Pictograph Prohibition of an action or activity in connection with a source of danger, definitions the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan- ger, the disregarding of which may result in serious accidents Important information about the product or this document...

  • Page 5: Safety

    Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in- stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.

  • Page 6: Protective Equipment

    Safety ● The unit has been accredited with protection class IP 30. Take necessary measures when installing into ambient conditions, which afford other protection classes. ● Do not operate the turbopump with open high vacuum flange. ● Do not carry out any unauthorized modifications or conversions to the pump. ●...

  • Page 7: Proper Use

    Safety Proper use NOTICE CE conformity The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.  Following installation into a plant and before commissioning, the operator must check the entire system for compliance with the valid EU directives and reassess it accor- dingly.

  • Page 8: Transport And Storage

    Transport and storage Transport and storage Transport  Reuse the transport container. Vacuum pumps should be transported or shipped in the original packing only.  Only remove the protective covers from the high vacuum and the fore-vacuum side immediately before connection. ...

  • Page 9: Product Description

    ● TUVdotCOM-ID 0000021320 Characteristics HiPace 10 HV flange DN 25 Flange material Aluminium To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available. D-35614 Asslar HiPace 300 Oil: Mod.: 260 l/s...

  • Page 10: Function

    Product description Function The turbopumps HiPace 10 form a complete unit together with the electronic drive unit. The voltage is supplied via the integrated power supply pack. Brigdes are closed in the connecting plug of the OPS. So the pump can run up at once after establishing the mains supply.

  • Page 11: Range Of Application

    Product description Range of application The pump HiPace 10 must be installed and operated under the following ambient condi- tions: Installation location weather protected (indoors) Protection category IP 30 Protection class Temperature +5 °C to +35 °C max. 80 %, at T ≤ 31 °C, up to max. 50% at T ≤ 35 °C...

  • Page 12: Installation

     Consult Pfeiffer Vacuum for special requirements. Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in- stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
  • Page 13 Installation Vacuum chamber Vacuum chamber SC = Safety Connection Fig. 3: Example: How to secure against shifting and tipping by external tremors High vacuum connection with High vacuum connection with claw grips connection adapter (accessories) Mounting orientation NOTICE The orientation of the fore-vacuum flange depending on the backing pump When using a dry compressing backing pump the turbopump can be mounted and ope- rated with the fore-vacuum flange in any orientation.
  • Page 14 Installation The installation of a Pfeiffer Vacuum mesh screen in the high vacuum flange protects the Use of a mesh screen turbopump against foreign bodies coming from the vacuum chamber. The volume flow rate is reduced as followed. Reduced volume flow rate in %...

  • Page 15: Connections To The Turbopump

    Installation Connections to the turbopump ● TC 110 in standard version Electronic drive unit ● TC 110 PB for Profibus linking ● TC 110 DN for DeviceNet linking ● TC 110 E74 in dependence on specification SEMI E74 ● TC 110 RS with interface RS-485 Detailed description for function, configuration and operation with the respective connec- tion panel are given in the specific operating instructions for the electronic drive unit.
  • Page 16  Remove bridges in the connecting plug via DIL swichtes S1 and S2.  Configurate the preferred accessory output via RS485 using a Pfeiffer Vacuum dis- play and control unit or a PC.
  • Page 17 Installation Recommendation: As backing pump, use a dry-compressing vacuum pump or a rotary Connecting the fore- vane pump from the Pfeiffer Vacuum programme. The backing pump must generate a vacuum side vacuum pressure of ≤ 5 hPa. DANGER Voltage-bearing elements Danger to life from electric shock.

  • Page 18: Operation

     Ensure the gas mode is correctly set.  Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80). The turbopumps HiPace 10 form a single unit with the electronic drive unit and the power Connecting the supply pack.

  • Page 19: Operation Modes

    Once the self-test has been successfully completed on the TC 110, the tur- bopump and the backing pump - if connected - begin to operate.  Consider the following manuals for the operation via Pfeiffer Vacuum display and con- Operation with DCU...

  • Page 20: Monitoring Of The Operation Conditions

    Operation Monitoring of the operation conditions LEDs in the front panel of the electronic drive unit show basic operating conditions of the Operating mode dis- turbopump. A differentiated malfunction and warning display is possible only for opera- play via LED tion with DCU or HPU.

  • Page 21: Maintenance / Replacement

     Decontaminate affected parts before carrying out maintenance work. NOTICE Disclaimer of liability Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or operating malfunctions due to improperly performed maintenance. The liability and war- ranty entitlement expires.

  • Page 22: Replacing The Operating Fluid Reservoir

    Maintenance / replacement Replacing the operating fluid reservoir WARNING Poisoning hazard through contact with materials that damage health. The operating fluid reservoir and parts of the pump may contain toxic substances from the pumped media.  Dispose of operating fluid reservoir in accordance with the applicable regulations. Sa- fety data sheet on request or under www.pfeiffer-vacuum.com ...

  • Page 23: Replacing The Electronic Drive Unit

    Maintenance / replacement Replacing the electronic drive unit NOTICE Damages to the pump and drive Even after the mains power is switched off, the subsequently running pump delivers electric power to the electronic drive unit. There is a danger of electric body contact by premature separating the pump from the electronic drive unit.

  • Page 24: Decommissioning

     Check turbopump for contamination and moisture.  Clean the turbopump externally with a lint-free cloth and little industrial alcohol.  If necessary, have Pfeiffer Vacuum Service clean the turbopump completely.  If necessary, have the bearings replaced. Take into account the total running time.

  • Page 25: Malfunctions

    ● Collective fault  Reset by switching the mains OFF/ON  Differentiated malfunction display is possible via DCU or HPU  Contact the Pfeiffer Vacuum Service If no display and control unit is available, please contact the Pfeiffer Vacuum Service.

  • Page 26: Service

    The following steps are necessary to ensure a fast, smooth servicing process:  Download the forms "Service Request" and "Declaration on Contamination".  Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum service address.

  • Page 27: Spare Parts Hipace 10

    Spare parts HiPace 10 11 Spare parts HiPace 10 Item Designation Size Order number Notes Pieces Order qty Power supply OPS 40 PM 061 696 AX incl. connecting plug 8.5 Electronic drive unit TC 110 according to the rating plate...

  • Page 28: Accessories

    PM Z01 205 TVV 001 fore-vacuum safety valve, 115 V AC PM Z01 206 Connection cable TPS 180 - MVP 006-4 with HiPace 80/HiPace 10, PM 061 399 -T 0.5 m Control cable 3/2 pole, TC 110 - MVP, 0.5 m...

  • Page 29: Technical Data And Dimensions

    Technical data and dimensions 13 Technical data and dimensions 13.1 General Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps: ● Recommendations of PNEUROP committee PN5 ● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum- pump performance - General description"...

  • Page 30: Dimensions

    Technical data and dimensions Parameter HiPace Permissible magnetic field max. 3 mT Interfaces RS-485, Remote 13.3 Dimensions 168.4 DN 25 ISO-KF 97.3 Ø55 DN 16 ISO-KF M6. 6 deep M5. 8 deep Fig. 10: HiPace 10...

  • Page 31: Declaration Of Conformity

    In addition, the product cited below satisfies all relevant provisions of EC directive "Elec- tromagnetic Compatibility" 2004/108/EC . The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. HiPace 10 Guidelines, harmonised standards and national standards and specifications which...
  • Page 32 Vacuum solutions Pfeiffer Vacuum stands for innovative and custom from a single source vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range From a single component to complex systems: of products We are the only supplier of vacuum technology that provides a complete product portfolio.

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