Pfeiffer Vacuum HIPACE 300 M Operating Instructions Manual
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Pfeiffer Vacuum HIPACE 300 M Operating Instructions Manual

Pfeiffer Vacuum HIPACE 300 M Operating Instructions Manual

Turbopump
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OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE 300 M
Turbopump

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Summary of Contents for Pfeiffer Vacuum HIPACE 300 M

  • Page 1 OPERATING INSTRUCTIONS Translation of the Original HIPACE 300 M Turbopump...

  • Page 2: Dear Customer

    Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to support you by its performance, its perfect operation and without interfering your individual application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.

  • Page 3: Table Of Contents

    Limits of use of product Proper use Foreseeable improper use Personnel qualification 2.7.1 Ensuring personnel qualification 2.7.2 Personnel qualification for maintenance and repair 2.7.3 Advanced training with Pfeiffer Vacuum Product description Function 3.1.1 Cooling 3.1.2 Rotor bearing 3.1.3 Venting connection 3.1.4 Drive...
  • Page 4 Operating modes 6.2.1 Operating without operating unit 6.2.2 Operation via multi-function connection "remote" 6.2.3 Operation via connection "E74" 6.2.4 Operation via Pfeiffer Vacuum control unit 6.2.5 Operation via field bus Switching on the turbopump Operation monitoring 6.4.1 Operating mode display via LED 6.4.2 Temperature monitoring...

  • Page 5: List Of Tables

    Factory settings for delayed venting in turbopumps Tbl. 13: Characteristic nominal rotation speeds of the turbopumps Tbl. 14: Troubleshooting turbopumps Tbl. 15: Overview of spare parts available for HiPace 300 M Tbl. 16: HiPace 300 M | Accessories Tbl. 17: Conversion table: Pressure units Tbl. 18: Conversion table: Units for gas throughput Tbl.

  • Page 6: List Of Figures

    Flange connection CF-F, stud screw and tapped hole Fig. 14: Flange connection CF-F, stud screw and through hole Fig. 15: Example of fore-vacuum connection on HiPace 300 M Fig. 16: Connecting the cooling water supply Fig. 17: Example: Connecting the grounding cable Fig.

  • Page 7: About This Manual

    Keep the manual for future consultation. 1.1 Validity This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de- scribe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in this op- erating instructions refers to the product's current development status.

  • Page 8: Pictographs

    This section describes all the stickers on the product along with their meanings. Rating plate (example) The rating plate of the turbopump is located on the lower part D-35614 Asslar Berliner Str. 43 HiPace 300 M of the vacuum pump. Mod. Rating plate of the electronic drive unit PM P03 XXX...

  • Page 9: Abbreviations

    About this manual 1.3.4 Abbreviations Abbreviation Meaning in this document Flange: Metal-sealed connector in accordance with ISO 3669 Diameter value (in mm) Direct current Nominal diameter as size description Rotation speed value of a vacuum pump (frequency, in rpm or Hz) High vacuum flange, high vacuum side Flange: Connection in accordance with ISO 1609 and ISO 2861 Light emitting diode...

  • Page 10: Safety

    Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►...
  • Page 11 Safety Risks during installation DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved will lead to severe injury to death. ► Make sure that the power supply pack meets the requirements for double isolation between mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and IEC 62368-1.
  • Page 12 ► Take suitable safety precautions on-site for the compensation of the occurring torques. ► Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum. WARNING Danger of cut injuries from unexpected start up.
  • Page 13 Safety Risks during maintenance, decommissioning and disposal WARNING Danger to life from electric shock during maintenance and service work The device is only completely de-energized when the mains plug has been disconnected and the tur- bopump is at a standstill. There is a danger to life from electric shock when making contact with live components.

  • Page 14: Safety Precautions

    ► Follow the installation instructions for this turbopump. ► Observe the requirements regarding stability and design of the counter flange. ► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation. WARNING Danger to life from poisoning where toxic process media leak from damaged connections Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate.

  • Page 15: Limits Of Use Of Product

    Safety ► Never put the device into operation with the high vacuum connection open. ► Keep lines and cables away from hot surfaces (> 70°C). ► Never fill or operate the unit with cleaning agents or cleaning agent residues. ► Do not carry out your own conversions or modifications on the unit. ►...

  • Page 16: Personnel Qualification

    The work described in this document may only be carried out by persons who have appropriate profes- sional qualifications and the necessary experience or who have completed the necessary training as provided by Pfeiffer Vacuum. Training people 1. Train the technical personnel on the product.

  • Page 17: Personnel Qualification For Maintenance And Repair

    ─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.7.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training.

  • Page 18: Product Description

    ● Active 5-axis magnetic bearing Operation is maintenance-free due to the use of magnetic bearings. 3.1.3 Venting connection The pre-assembled Pfeiffer Vacuum venting valve is used for automatic venting of the turbopump after switching off or in the event of a power failure. 18/62...

  • Page 19: Drive

    ID no. 000021320. 3.3.1 Product types The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the family name, the size (which is based on the pumping speed of the vacuum pump) and, if required, an additional feature description.

  • Page 20: Transportation And Storage

    ► Do not stack the products. ► Wear protective equipment, e.g. safety shoes. Recommendation Pfeiffer Vacuum recommends keeping the transport packaging and original protective cov- Safe transport of the product ► Transport the turbopump only within the permissible temperature limits.

  • Page 21: Installation

    Installation 5 Installation The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo- pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec- ond.

  • Page 22: Connecting The High Vacuum Side

    ● Make sure that all the torques generated if the rotor blocks suddenly, are absorbed by the system on the operator side and the high vacuum connection. ● Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connec- tion of the turbopump.

  • Page 23: Using A Splinter Shield Or Protective Screen

    1 Safety connection, customer-side 5.2.3 Using a splinter shield or protective screen Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro- tect the Turbopump against foreign matter from the vacuum chamber. The pumping speed is reduced according to the passage guide values and the size of the high vacuum flange.

  • Page 24: Mounting Orientations

    Flange connection ISO-K to ISO-F, bracket screws Connection with bracket screw 1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum. 2. Connect the flange with the components of the mounting kit according to the figure.

  • Page 25: Fig. 6: Flange Connection Iso-K With Iso-F, Hexagon Head Screw And Tapped Hole

    Flange connection ISO-K with ISO-F, hexagon head screw and tapped hole Connection of the hexagon head screw and tapped hole 1. Only use the approved mounting kits of Pfeiffer Vacuum for the connection of the turbopump. 2. Place the collar flange over the high vacuum flange of the turbopump.

  • Page 26: Attaching Iso-F Flange To Iso-F

    Flange connection ISO-K with ISO-F, stud screw and through hole Connection of the stud screw and through hole 1. Only use the approved mounting kits of Pfeiffer Vacuum for the connection of the turbopump. 2. Place the collar flange over the high vacuum flange of the turbopump.

  • Page 27: Attaching Cf Flange To Cf-F

    Connection of the stud screw and tapped hole 1. Only use the approved mounting kits of Pfeiffer Vacuum for the connection of the turbopump. 2. Screw in the stud screws with the shorter end in the tapped holes on the counter flange.

  • Page 28: Fig. 13: Flange Connection Cf-F, Stud Screw And Tapped Hole

    Connection of the stud screw and tapped hole 1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum. 2. Screw in the required number of stud screws with the shorter end in the holes on the counter flange.

  • Page 29: Connecting Fore-Vacuum Side

    Use the turbopump only in combination with a suitable backing pump that can deliver up to the required maximum fore-vacuum pressure. To achieve the fore-vacuum pressure, use a suitable vacuum pump or a pumping station from the Pfeiffer Vacuum range. In this case, the backing pump is also controlled directly via the turbopump electronic drive unit interfaces (e.g., relay box or connection cable).

  • Page 30: Making Cooling Water Connection

    Installation 5.4 Making cooling water connection WARNING Risk of scalding from suddenly escaping hot cooling water The turbopump water connections are open to both sides. When connecting the cooling water supply, there is a risk of scalding from suddenly escaping, hot cooling water at over pressure. ►...

  • Page 31: Connecting Venting Valve

    3. If required, use a connecting adapter for the valve inlet side (not included in the shipment). 5.6 Connecting accessories Installing and operating accessories Pfeiffer Vacuum offers a series of special, compatible accessories for its products. ● Information and ordering options for the approved range of accessories for magnetical- ly levitated turbopumps can be found online.

  • Page 32: Connecting The Electrical Supply

    ● The use of other accessories for turbopumps is possible and requires settings in the configuration of the electronic drive unit. ● The desired accessory output is configured via RS-485 using Pfeiffer Vacuum control units or a PC. ● For detailed information see the “Electronic drive unit TC 400” or “Electronic drive unit TC 700”...

  • Page 33: Establishing Electric Connection

    Installation Fig. 17: Example: Connecting the grounding cable Procedure 1. Use the turbopump ground terminal (M4 female thread). 2. Route the connection in accordance with locally applicable provisions. 5.7.2 Establishing electric connection DANGER Danger to life from electric shock Power supply packs that are not specified or are not approved will lead to severe injury to death. ►...

  • Page 34: Fig. 18: Connecting Electronic Drive Unit To Power Supply Pack

    2. Make sure that the power supply pack main switch is off prior to connection. 3. Use a suitable connection cable from the Pfeiffer Vacuum accessories range. 4. Insert the connecting cable into the connection "DCin" on the electronic drive unit and close the bayonet lock.

  • Page 35: Operation

    Simultaneous loading by means of high drive power (gas throughput, fore-vacuum pressure), high heat radiation, or strong magnetic fields results in uncontrolled heating of the rotor and can destroy the vacuum pump. ► Consult Pfeiffer Vacuum before combining varying loads on the vacuum pump. Lower limit val- ues apply. NOTICE...

  • Page 36: Operating Modes

    Instructions for operation without control panel 1. Use only the approved Pfeiffer Vacuum mating plug with bridges on the connection of the elec- tronic drive unit. 2. Switch on the mains supply of the turbopump only immediately before operation.

  • Page 37: Operation Via Pfeiffer Vacuum Control Unit

    Operation 6.2.4 Operation via Pfeiffer Vacuum control unit Connecting a Pfeiffer Vacuum control unit allows the turbopump to be controlled via static parameters stored in the electronic drive unit. Using control unit 1. Observe the appropriate operating instructions for handling Pfeiffer Vacuum control units: –...

  • Page 38: Operation Monitoring

    6.4.1 Operating mode display via LED LEDs on the electronic drive unit show the basic operating states of the vacuum pump. A differentiated error and warning display is only possible for operation with the Pfeiffer Vacuum control unit or a PC. Symbol...

  • Page 39: Switching Off And Venting

    5. Close the supply lines (e.g. for cooling water or sealing gas). 6.5.2 Electric brake After switching off the pump, Pfeiffer Vacuum recommends the using the electric brake function. It re- duces the slow-down time and permits the controlled braking of the rotor until the pump comes to a standstill.

  • Page 40: Tbl. 12: Factory Settings For Delayed Venting In Turbopumps

    ► Observe the prescribed maximum 15 hPa/s rate of pressure rise. ► Avoid manual and uncontrolled venting of very small volumes. ► First vent via the Pfeiffer Vacuum venting valve up to a rotation speed of 6000 rpm before using an additional ventilation system.

  • Page 41: Maintenance

    2. Replace the electronic drive unit as an independent unit. 3. Comply with the mandatory inspection period for electrical safety devices that is valid locally in each case. 4. For all other cleaning, maintenance or repair work, contact the appropriate Pfeiffer Vacuum Serv- ice location. 41/62...

  • Page 42: Replacing Electronic Drive Unit

    Maintenance 7.3 Replacing electronic drive unit NOTICE Damage to the vacuum pump and electronic drive unit due to improper disconnection of com- ponents Even after the power supply has been switched off, the vacuum pump continues to deliver electrical energy during its run-down period. If the vacuum pump and electronic drive unit are disconnected prematurely, there is the risk of body contact and consequently the destruction of electronic compo- nents.

  • Page 43: Installing Electronic Drive Unit

    Maintenance Fig. 19: Removal of electronic drive unit TM 700 1 Hexagon socket screw Fore-vacuum connection protective cover 2 Electronic drive unit Circuit board 3 High vacuum connection protective cover Procedure 1. Install the turbopump upright if required. 2. Unscrew all 3 Allen head screws from the electronic drive unit. 3.

  • Page 44: Confirming Speed Specification

    5. Set the parameter [P:777] to the required value of the nominal rotation speed in Hertz. Alternative to adjusting the nominal rotation speed confirmation A Pfeiffer Vacuum SpeedConfigurator for the one-time immediate setting of parameter [P:777] is included with the replacement units.

  • Page 45: Decommissioning

    1. Check the turbopump for pollution and moisture. 2. Clean the turbopump exterior with a lint-free cloth and a little isopropanol. 3. If necessary, arrange for Pfeiffer Vacuum Service to completely clean the turbopump. 4. Install the turbopump according to these instructions (see chapter “Installation”, page...

  • Page 46: Recycling And Disposal

    ● Help to reduce the wastage of natural resources. ● Prevent contamination. 9.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron – Aluminium –...

  • Page 47: Malfunctions

    ► Follow the installation instructions for this turbopump. ► Observe the requirements regarding stability and design of the counter flange. ► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation. WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.

  • Page 48: Tbl. 14: Troubleshooting Turbopumps

    ● Reduce the process gas load. ● Rotor not running ● Check the turbopump for noise development smoothly, defective ● Contact Pfeiffer Vacuum Service. bearing ● Run-up time setpoint ad- ● Use a control unit to extend the set value run-up justed too low time [P:700].

  • Page 49: Service Solutions By Pfeiffer Vacuum

    We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality.
  • Page 50 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.

  • Page 51: Spare Parts For Hipace 300 M

    TM 700 tion panel Venting valve PM Z01 291 Incl. sealing ring Banjo fitting P 4131 007 E Water cooling Tbl. 15: Overview of spare parts available for HiPace 300 M 51/62...

  • Page 52: Accessories

    Optionally with splinter shield or protective screen. Power supply packs and control units Power supply packs for optimal voltage supply of Pfeiffer Vacuum products are characterized by their compact size and adapted power supply with maximum reliability. Display and operating units are used to check and adjust operating parameters.
  • Page 53 Centering ring with multifunction coating and integrated protection screen, DN PM 016 212 AU 100 ISO-K/-F Mounting kit for HiPace 300 M, DN 100 ISO-K, including coated centering ring, PM 016 775 -T bracket screws Mounting kit for HiPace 300 M, DN 100 ISO-K, including coated centering ring,...

  • Page 54: Tbl. 16: Hipace 300 M | Accessories

    PT R70 000 RPT 010, digital Piezo/Pirani sensor PT R71 100 IKT 010, digital cold cathode sensor, low current PT R72 100 IKT 011, digital cold cathode sensor, high current PT R73 100 Tbl. 16: HiPace 300 M | Accessories 54/62...

  • Page 55: Technical Data And Dimensions

    Technical data and dimensions 14 Technical data and dimensions 14.1 General This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps. Technical data Maximum values refer exclusively to the input as a single load. ● Specifications according to PNEUROP committee PN5 ●...
  • Page 56 Technical data and dimensions Type designation HiPace® 300 M HiPace® 300 M HiPace® 300 M Pumping speed for H 170 l/s 170 l/s 170 l/s Pumping speed for He 215 l/s 215 l/s 215 l/s Pumping speed for N 255 l/s 255 l/s 255 l/s Gas throughput at final rotation...

  • Page 57: Substances In Contact With The Media

    -25 – 55 °C ture Weight 13.1 kg 13.4 kg 17.2 kg Tbl. 19: Technical data for HiPace 300 M | TM 700 14.3 Substances in contact with the media Substances in contact with the media Aluminum alloy Stainless steel rare-earth magnet carbon-fiber-reinforced plastic...

  • Page 58: Fig. 23: Dimensions Hipace 300 M | Dn 100 Iso-F

    DN 16 ISO-KF / G1/4" DN 100 ISO-F Ø162 G1/8" Ø8 / G1/4" (2x) M8 (6x) Fig. 23: Dimensions HiPace 300 M | DN 100 ISO-F DN 16 ISO-KF / G1/4" DN 100 CF-F Ø150 Ø162 G1/8" Ø8 / G1/4" (2x) M8 (6x) Fig.

  • Page 59: Ec Declaration Of Conformity

    DIN EN 61010-1 : 2020 DIN EN IEC 63000 : 2019 The authorized representative for the compilation of technical documents is Mr. Tobias Stoll, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Asslar, Germany. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43...

  • Page 60: Declaration Of Conformity

    ISO 21360-4:2018 IEC 61010-1+A1:2010 IEC 63000:2018 The manufacturer's authorized representative in the United Kingdom and the authorized agent for compiling the technical documentation is Pfeiffer Vacuum Ltd, 16 Plover Close, In- terchange Park, MK169PS Newport Pagnell. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43...
  • Page 61 61/62...

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