Pfeiffer Vacuum HIPACE Operating Instructions Manual
Sealing gas monitoring unit
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Summary of Contents for Pfeiffer Vacuum HIPACE
- Page 1 OPERATING INSTRUCTIONS Translation of the Original HIPACE Sealing gas monitoring unit...
- Page 2 These operating instructions describe all models and variants of your product. Note that your product may not be equipped with all features described in this document. Pfeiffer Vacuum constantly adapts its products to the latest state of the art without prior notice. Please take into account that online operating instructions can deviate from the printed operating instructions supplied with your product.
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Page 3: Table Of Contents
Table of contents Table of contents About this manual Validity 1.1.1 Applicable documents 1.1.2 Target group Conventions 1.2.1 Instructions in the text 1.2.2 Abbreviations 1.2.3 Stickers on the product Safety General safety information Safety precautions Proper use Foreseeable misuse Personnel qualification Product description Functional description Scope of delivery... - Page 4 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: Abbreviations used in this document Tbl. 3: Stickers on the product Tbl. 4: Parameter settings in the electronic drive unit of the turbopump Tbl. 5: Warning messages of the electronic drive unit Tbl.
- Page 5 Position of the sticker on the product Fig. 2: Layout of the sealing gas monitoring unit Fig. 3: Example: Fitting a sealing gas monitoring unit to the HiPace 2300 Fig. 4: Example: Connecting the sealing gas monitoring unit to a TC Fig. 5: Example: Connecting inert gas to the sealing gas monitoring unit Fig.
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Page 6: About This Manual
Keep the manual for future consultation. 1.1 Validity This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de- scribe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in this op- erating instructions refers to the product's current development status. -
Page 7: Stickers On The Product
About this manual Drive and magnetic bearing controller of the Turbopump width across flats Tbl. 2: Abbreviations used in this document 1.2.3 Stickers on the product This section describes all the stickers on the product along with their meaning. Rating plate (example) The rating plate is located on the housing Sealing gas monitoring unit... -
Page 8: Safety
Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►... -
Page 9: Proper Use
► Use the sealing gas monitoring unit for controllable admission of inert gases into an inert gas sys- tem on the Pfeiffer Vacuum turbopumps designated for this purpose. ► The sealing gas monitoring unit is to be used exclusively for the supply of dry air or nitrogen. -
Page 10: Product Description
The sealing gas monitoring unit ensures a permanent and consistent supply of sealing gas. Control and monitoring are incorporated in the electronic drive unit of the turbopump. Display and evaluation can be performed by way of a Pfeiffer Vacuum display and control unit. Fig. 2: Layout of the sealing gas monitoring unit 1 Gas inlet, 1/8”... -
Page 11: Installation
Using unfiltered media for the gas inlet of a vacuum pump may result in particle contamination. There is a risk of damage to, and even destruction of, vacuum components. ► Install suitable filters from the Pfeiffer Vacuum accessories range upstream of the gas inlet, be- fore you use ambient air or other unclean media. -
Page 12: Fig. 4: Example: Connecting The Sealing Gas Monitoring Unit To A Tc
Sealing gas line Procedure 1. Ensure a supply of sealing gas (e.g. N 2. If required, use a connection adapter from the Pfeiffer Vacuum accessories range (not included in shipment). 3. Connect the sealing gas line to the inlet side (1/8" thread). -
Page 13: Operation
Important settings and function-related variables are programmed ex factory as parameters in the vac- uum pump electronic drive unit. Each parameter has a three-digit number and a description. Parameter- driven operation and control is supported via Pfeiffer Vacuum displays and control units, or externally via RS-485 using Pfeiffer Vacuum protocol. -
Page 14: Malfunctions
Malfunctions 6 Malfunctions 6.1 Error codes Errors (** Error E–––– **) always cause the connected peripheral devices to be switched off. Warnings (* Warning F –––– *) are only displayed and do not cause components to be switched off. Handling malfunction messages 1. -
Page 15: Accessories
Outlet side Flange with Pipe Thread, DN 16 ISO-KF, G 1/8" PM 016 780 -T Outlet side Sealing gas valve, shielded for HiPace 300 with TC 400 and PM Z01 312 TM 700, TCP 350 Outlet side Sealing gas valve, shielded, HiPace 400/700/800 P with TC PM Z01 313 400 and HiPace 1200–2300 with TC 1200... -
Page 16: Technical Data And Dimensions
Technical data and dimensions 8 Technical data and dimensions 8.1 General mbar l/s sccm Torr l/s Pa m atm cm mbar l/s 59.2 0.75 0.987 9.87 Pa m sccm 1.69 · 10 1.69 · 10 1.27 · 10 1.67 · 10 Torr l/s 1.33 0.133 78.9... -
Page 17: Dimensions
Technical data and dimensions 8.3 Dimensions Fig. 7: Dimensions for sealing gas monitoring unit Dimensions in mm 17/20... -
Page 18: Declaration Of Conformity
Declaration of conformity Declaration for product(s) of the type: Sealing gas monitoring unit HiPace turbopumps We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. Electromagnetic compatibility 2014/30/EU Restriction of the use of certain hazardous substances 2011/65/EU... - Page 19 19/20...
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