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6.2 Detectable Gases
VC4™ system Chemcassette™ analyzer are continuous monitoring instrument. The initial analysis period listed in the following table varies based on the programmed alarm levels. This period is valid only after the
system pulls a new Chemcassette™ window. Increasing the programmed alarm levels will decrease the initial sample period.
For accurate detection, gas must be present at sufficient levels and durations. Typical response times are shown in this table at 2 TLV, which will vary in duration depending on the target gas and alarm level
settings. For high concentrations (greater than full scale) a minimum of 4 seconds is required.
Family
CC Name (P/N)
XP6-VC4 Hydrides
1
(1904-9300)
Table
Gas Name
TLV
1
Arsine XP6 (AsH
)
5 ppb
3
Arsine XP6 (AsH
) Low
3
2
5 ppb
Level
3
Diborane XP6 (B
H
)
100 ppb
2
6
4
Germane XP6 (GeH
)
200 ppb
4
5
Phosphine XP6 (PH
)
50 ppb
3
6
Silane XP6 (SiH
)
5 ppm
4
7
Silane-M XP6 (SiH
- M) 5 ppm
4
Hydrogen Sulfide XP6
8
1 ppm
(H
S)
2
Default
Default
LAL
LDL
Alarm
Alarm
Range
Level 1
Level 2
2.5
0-500
3 ppb
25 ppb
50 ppb
ppb
ppb
0.5
0.3
0-50
2.5 ppb
5 ppb
ppb
ppb
ppb
15
0-1000
10 ppb 50 ppb
100 ppb
ppb
ppb
100
100
0-2000
100 ppb
200 ppb
ppb
ppb
ppb
0-3000
5 ppb 5 ppb
25 ppb
50 ppb
ppb
0.5
0.3
0-50
2.5 ppm
5 ppm
ppm
ppm
ppm
0.05-
0.06
0.05
2.5 ppm
5.0 ppm
15
ppm
ppm
Ppm
0.2
0.1
0-10
0.5 ppm
1 ppm
ppm
ppm
ppm
Initial Ana-
Alarm Set-
Time to 1TLV alarm @ 2TLV con- cen-
lysis Period
ting
tration, 10ft sample line
(second)
<24 sec (Alarm @ 50 ppb with 100 ppb AsH
3-500 ppb
30
gas)
0.5-1.9 ppb
300
150
2-4.9 ppb
<60 sec
60
5-9.9 ppb
30
10-50 ppb
15-49 ppb
60
50-99 ppb
45
<45 sec
100-1000
30
ppb
100-149
ppb
480
150-199
360
<200 sec
ppb
240
200-2000
ppb
5-3000
<30 sec (Alarm @ 50ppb with 100ppbPH
15
ppb
gas)
0.5-4.9
ppm
60
5-9.9 ppm
45
<35 sec
10-19.9
30
ppm
15
20-50 ppm
0.05-2.49
ppm
180
2.5-4.99
60
ppm
<35 sec
45
5-9.99
30
ppm
10-15 ppm
0.2-0.4
ppm
45
0.5 - 0.9
30
20 sec
ppm 1-1.9
15
ppm
10
2-10 ppm
3
3
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