Detailed Holder Plate Components; Replacing And Assembling Consumables - Ulvac DOP-200S Instruction Manual

6) Detailed Holder Plate Components

(1) Holder plate and cup packing components list
e: Inlet valve rubber separator

7) Replacing and Assembling Consumables

(1) Replace the cup packing. Place the cup packing on the connecting rod to ensure that
the canopy is downwards.
(2) Insert the new inlet valve rubber separator into the groove on the rear of the cleaned
holder plate.
(3) Align the mark on the holder plate, and tighten the four M5xL12 countersunk screws.
(1) Replacing cup packing.
f: Cup packing
ｅ
14
ｆ
(3) Fitting holder plate.