Ulvac DOP-200S Instruction Manual page 25

(4) Place two inlet valves on the washed cylinder and place the backup inlet valve, inlet
valve holder plate on top. Ensure that the inlet valve holder plate is mounted in the
correct orientation. The top of the inlet valve holder plate is set facing up so that the
shorter direction (distance from the center of the hole to the edge face) is pointing
towards the right-hand side of the inlet valve. When set in place, tighten the M3xL5
roundhead screw to prevent the inlet valve contacting the groove on the periphery.
(5) Place the outlet valve on the cylinder, and place the backup outlet valve on the outlet
valve.
(6) Place the outlet valve holder plate on the backup outlet valve and tighten the M3xL5
roundhead screw. Tighten the screw while ensuring that the valve does not contact the
groove on the periphery.
Top
Bottom (valve side)
(4) Fitting the inlet valve
(5) Fitting the outlet valve holder plate
(4) Fitting the outlet valve
(6) Tightening the screw
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