Ulvac DOP-200S Instruction Manual page 3

6. Maintenance, Inspection, and Repair .............................................................................................. 7
6.1. Cautions for Maintenance, Inspection, and Repair ............................................................... 7
6.2 Maintenance ........................................................................................................................ 7
6.3 Regular Inspections ............................................................................................................. 7
6.4 Replacing Consumables and Cleaning ................................................................................. 9
1) Preparations for Replacing the Pump ............................................................................. 10
2) Removing the Head Cover ............................................................................................. 10
3) Removing the Cylinder ................................................................................................... 11
4) Removing the Holder Plate, Cup Packing, and Inlet Valve Rubber Separator ................ 12
5) Removing Small Cylinder Components .......................................................................... 13
6) Detailed Holder Plate Components ................................................................................ 14
7) Replacing and Assembling Consumables ...................................................................... 14
6.5 Troubleshooting List ........................................................................................................... 17
7. Product specification of each model ............................................................................................. 18
8. In Conclusion ................................................................................................................................ 22
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Warranty ................................................................................................................................. 22
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Usage Status Check Sheet
(used with requests for disassembly and repair)
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Product information, service bases, and contact information
Fig. 2.1 DOP-200S .......................................................................................................................... 2
Fig. 2.2 DOP-200SV ....................................................................................................................... 2
Fig. 2.3 DOP-300S .......................................................................................................................... 2
Fig. 2.4 DOP-300SV ....................................................................................................................... 2
Fig. 3.1 Change region of the voltage and frequency ...................................................................... 4
Fig. 3.2 Example of Piping Used When Evacuating a Vessel .......................................................... 4
Table 1.1 Product Specifications (50 Hz/60 Hz) ............................................................................... 1
Table 6.1 Consumables List ............................................................................................................... 8
Table 6.2 Locations for Maintenance and Inspection ......................................................................... 8
Table 6.3 Troubleshooting List ......................................................................................................... 17
Figures and Tables