Ulvac DA-41D Instruction Manual page 27

Valve mounting order of DA-41D, DA-41DK
Secondary side
Valve mounting (1):
Secondary side
Valve mounting (2):
Secondary side
Valve mounting (3):
Secondary side
Valve mounting (4):
Secondary side
Valve mounting (5):
First side
Mount valve A to the position shown by the above Photo one by one. (mount to
arrow position)
First side
Mount valve B to the position shown by the above Photo one by one. (mount to
arrow position)
First side
Mount valve holder B to the position shown by the above Photo one by one .(Mount
to arrow position)
First side
Mount valve holder A to the position shown by the above Photo one by one.
First side
Mount valve plate to the position shown by the above Photo one by one. (mount to
arrow position)
Valve mounting order of DA-81S, DA-81SK
Secondary side
Secondary side
Secondary side
Secondary side
Secondary side
Photo17
17
First side
First side
First side
First side
First side