Ulvac DA-41D Instruction Manual page 3

Diaphragm type dry vacuum pump

Table of Contents

6-5 DA-41D(K), 81S(K) Major Parts Material Indication ··············································· 22

6-6Trouble Check List ···························································································· 23

7. Conclusion ······································································································· 25

・Warranty ········································································································ 25

Fig. 2 -1 DA-41D, DA-81S Appearance ········································································· 3

Fig. 2 -2 DA-41DK, DA-81SK Appearance ····································································· 3

Fig. 3 -1 Piping Example for Evacuation of Container ······················································ 5

Table 1 -1 Equipment Specifications ············································································ 1

Table 6 -1 Consumable Parts List ·············································································· 10

Table 6 -2 Inspection Positions and Guideline of Parts Replacement ································ 11

Table 6 -3 DA-41D(K),DA-81S(K) major parts material Indication ····································· 22

Table 6 -4 Trouble Check List ··················································································· 23

Drawing List

Table of Contents

Da-81s Da-41dk Da-81sk