Ulvac DA-41D Instruction Manual page 24

Diaphragm type dry vacuum pump
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CAUTION
(11) Mount the remaining diaphragms likewise.
Vacuum grease
coated portion
Photo11
(12) Apply small quantity of vacuum grease to the connecting tube mounting portion of valve retainer,
and mount the connecting tube.
(13) Cover casing with the connected pump head and fix it with hexagon socket head cap screw (M6 x
25).
CAUTION
(14) Cover top panel and fix it with truss head screws (M4 x 10).
(15) Lay the pump and fix the front panel with truss head screws (M4 x 10).
CAUTION
(16)
Raise the pump and mount the inlet / exhaust pipe.
1) - 2.In case of DA-41DK, 81SK
* Replace the diaphragm according to the procedure for 1)-1 DA-41D, 81S (4) to (13).
● As shown in Photo 10 [Good example], grab diaphragm to
prevent wrinkle of diaphragm and mount it securely.
● Tighten by turning 5 to 10°from the position stopped to
mount the diaphragm.
Be careful not to tighten too much.
Connecting tube
Photo12
Tighten hexagon socket head cap screw (M6 x 25) in
diagonal / even in tightening torque 11 N⋅m.
Pay attention to the mounting direction of the pump
head.
(Photo 13)
When carry out process (14), (15), attach them so that
no clearance between each resin panel.
14
Hexagon socket head
cap screw (M6 x 25)
Photo13
(Photo 11, 12)
(Photo 13)
(Photo 3)
(Photo 2)
(Photo 1)

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This manual is also suitable for:

Da-81sDa-41dkDa-81sk

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