Safety Instructions - Ulvac EMP-14W Instruction Manual

1. Danger of electric shock: Do not touch
the live part.
To this unit, voltage that would cause electrocution or serious injuries is applied. It is
extremely dangerous to touch the live part inside the unit. Make sure to turn OFF the
main power source before performing installation, maintenance or repair. Contacting
the internal parts that are not insulated may damage human body or equipments such
as electrical shock.
Connect the earth wire to D type grounding.
2. Danger of oxygen deficiency: Ventilate
well.
Nitrogen gas itself is not toxic to human bodies but it reduces the oxygen level in the
atmosphere (the oxygen concentration of 18% or below is defined as an
oxygen-depleted state). Choose a well-ventilated and good-air-circulated location to
install the EMP-14W, and install a ventilator with a capacity of at least 1000 m
airflow. In addition, do not stay together with a dewar containing liquid nitrogen in a
sealed space, such as an elevator or a car.
3. Danger of explosion: Do not seal LN
The volume of nitrogen gas is 700 times of liquid nitrogen. Confining atmospheric
pressure liquid nitrogen in an airtight space produces high-pressure gas as high as
700 Atm, possibly resulting in explosion. Use liquid nitrogen in the condition constantly
open to air.

Safety Instructions

ULVAC CRYOGENICS INCORPORATED
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